Device fabrication /3 [Hastings] [In this slides, mask stands for - - PowerPoint PPT Presentation

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Device fabrication /3 [Hastings] [In this slides, mask stands for - - PowerPoint PPT Presentation

Feb 01, 2024 350 likes •705 views

Device fabrication /3 [Hastings] [In this slides, mask stands for photomask, i.e. (photo)reticle ] Si (111) Si (100) After mask 4 ( V T adjust) This step is to increase both V T s, from ~ -1.6 and 0 V to ~ -0.8 and 0.8 V Very small

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Device fabrication /3

[Hastings]

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[In this slides, mask stands for photomask, i.e. (photo)reticle] Si (111)

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Si (100)

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After mask 4 (VT adjust) This step is to increase both VT’s, from ~ -1.6 and 0 V to ~ -0.8 and 0.8 V

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◼ Very small inductors can also be realized

This is an X-band low noise amplifier (LNA), designed in the IHP SG13G2 technology Frequency range: 9-11 GHz

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◼ Example of

available processes (Europractice multi-project wafer schedule 2012) [1/2]

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◼ Example of available processes (Europractice multi-

project wafer schedule 2012) [2/2]

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Now, copper is preferred for interconnections in complex circuits

  • trenches are carved into a dielectric layer
  • and are lined with a layer of tantalum or tantalum nitride;
  • the trenches are then filled with copper using an

electrochemical process. This tantalum layer acts as a barrier to prevent the copper from diffusing its way out of the trenches

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Just to have an idea on the costs... if

  • non-recurring costs:

7 M$

  • recurring costs:

2.3 $ then: