[PDF] - ME 645: MEMS: ME 645: MEMS: Design, Fabrication Design Fabrication PDF Document

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ME 645: MEMS: ME 645: MEMS: Design Fabrication Design Fabrication

MEMS Nano stage Designed at IIT Bombay

Lecture 1 and 2: Introduction, motivation and course contents

Design, Fabrication Design, Fabrication and Characterization and Characterization

P.S. Gandhi P.S. Gandhi Mechanical Engineering Mechanical Engineering IIT Bombay IIT Bombay

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

What are MEMS? What are MEMS?

MEMS refer to miniature

MEMS refer to miniature mechatronic mechatronic systems bulk fabricated using Very Large systems bulk fabricated using Very Large Scale Integration (VLSI) technology Scale Integration (VLSI) technology

Techniques and processes to design and

Techniques and processes to design and create miniature systems create miniature systems

Miniature embedded systems

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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Sense for scale? Sense for scale?

Decrease in length Interest for MEMS 1m 1cm 1mm 0.1mm 1μm 10nm 100μm

Your height
Distance bet

rails

Meter scale

1km

Small screw

thread

Resolution of

steel ruler

Hair size
Paper

thickness

Spacing of

CD/DVD tracks, HD drives li ht

Virus
Electron

beam wavelength Interest for MEMS

No of components on

No of components on pentium pentium chip? chip?

How these are made??

light

wavelength

soap bubble
X ray

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Motivation Motivation

Why study MEMS?? Why study MEMS??

MEMS benefits MEMS benefits Micro size systems

Micro size systems

Higher sensitivity

Less energy withdrawal from application

Decreased cost of production: bulk processing

Many new features and products previously

Many new features and products previously unthought unthought of can be possible

f can be possible

Combination of MEMS with other branches:

Combination of MEMS with other branches: Example optical MEMS, Bio Example optical MEMS, Bio-

MEMS

MEMS futuristic futuristic devices devices

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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MEMS Applications MEMS Applications

Accelerometers and Gyroscopes Accelerometers and Gyroscopes

Automobile air bags Automobile air bags

Working Principle Based on capacitive sensing

Automobile air bags

Automobile air bags

Inertial navigation systems,

Inertial navigation systems, autonomous aircrafts, autonomous aircrafts, segway egway, one wheel bike , one wheel bike

Based on capacitive sensing for microcombs

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

MEMS Applications MEMS Applications

Cantilever based Cantilever based

Bio Bio-

MEMS Sensors, chemical sensors

MEMS Sensors, chemical sensors

Cantilever based Cantilever based

Concept: cantilever structure with antigen

Effects corresponding bacteria come in

Effects corresponding bacteria come in contact: contact:

Change in mass

Change in mass frequency frequency

Deflection due to repulsive forces

Deflection due to repulsive forces p

Detection of bacteria by

Optical

Capacitive

Other techniques like

Other techniques like resonance frequency measurement resonance frequency measurement

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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MEMS Applications MEMS Applications

Deskjet Deskjet printer cartridge: printer cartridge:

Deskjet Deskjet Printer Printer

Deskjet Deskjet printer cartridge: printer cartridge:

Concept: resistive heating leading to

Concept: resistive heating leading to formation of bubble that pushes the ink out formation of bubble that pushes the ink out from a from a microhole microhole as shown as shown

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

160μm ink Wire contact Nozzles on printer cartridge

MEMS Applications MEMS Applications

Optical switch Optical switch

Optical Optical fiber switching fiber switching

p

Concept: use a

Concept: use a micromirror micromirror and and selectively direct input light to various selectively direct input light to various

utput lines
utput lines

Input fiber electrode Output fibers

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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MEMS Applications MEMS Applications

DLP Chip: DLP Chip:

Digital Digital Light Processing (DLP) Light Processing (DLP)

p

Concept: use thousands of individually

Concept: use thousands of individually actuated actuated micromirrors micromirrors and selectively and selectively project light on each pixel project light on each pixel

electrode

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Micro Micro-

mirror

mirror

C b C b

Comb

Comb Drive Drive

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Courtesy: Dr V . Milanovic Adriatic Research Institute

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MEMS Applications MEMS Applications

Microfluidic Microfluidic channels for: channels for:

Microfluidic Microfluidic Devices Devices

Realizing biosensors discussed before:

Realizing biosensors discussed before: Lab Lab-

on
n-
chip

chip

Reactors at

Reactors at microscale microscale

Microturbines

Microturbines Mi h t Mi h t h

Microheat

Microheat exchangers exchangers

Microcryocoolers

Microcryocoolers

Cell culture investigation

Cell culture investigation

Electro transport

Electro transport

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

MEMS Applications MEMS Applications

Mechanisms for various purposes including Mechanisms for various purposes including

Micromechanisms Micromechanisms

p p g p p g

Nanopositioning

Nanopositioning and and nanomanipulation nanomanipulation: : future HDDs, future HDDs, biocells biocells

Mechanical logic

Mechanical logic gates gates Mi i l ti Mi i l ti

Mirror manipulation

Mirror manipulation

Accelerometer

Accelerometer

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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Flexure Mechanism Flexure Mechanism

These mechanisms are

These mechanisms are very useful at MEMS scale very useful at MEMS scale

N f i ti ( bbi N f i ti ( bbi Concept – – No friction (no rubbing No friction (no rubbing components) components) – Very high positioning Very high positioning accuracy possible accuracy possible

Used in many devices

Parasitic error MEMS Nano stage D i d t IIT B b Designed at IIT Bombay

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

More MEMS devices More MEMS devices

Other micro

Other micro-

sensors:

sensors:

Pressure sensor

Vibrating gyroscope

Bio

Bio-

MEMS sensors: DNA chips, “lab on chip”

MEMS sensors: DNA chips, “lab on chip”

Micro actuators

Comb actuators, micro

Comb actuators, micro-

motors

motors

Thermal actuators

Thermal actuators And many more Yet to come… Thermal actuators Thermal actuators

Piezo

Piezo-

actuators

actuators

Micro

Micro-

gears, micro

gears, micro-

engines

engines

Micro

Micro-

fluidic systems:

fluidic systems: drug delivery drug delivery: smart pill : smart pill

Grating light valve (GLV display)

Digital optical switches

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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Course Contents Course Contents

hi ill l h li hi ill l h li

Course outline

In this course, we will learn how to realize

In this course, we will learn how to realize these applications and innovate new ones these applications and innovate new ones

Introduction to MEMS: Motivation, history

Introduction to MEMS: Motivation, history and current status and current status and current status and current status

MEMS: Fabrication

MEMS: Fabrication

– Conventional MEMS fabrication using VLSI Conventional MEMS fabrication using VLSI technology technology – Nonconventional fabrication Nonconventional fabrication

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Conventional (VLSI ) Conventional (VLSI ) Fabrication processes Fabrication processes

Lithography: patterning

Course outline

Chemical etching

Isotropic

Anisotropic

Plasma etching: RIE

Oxidation

Material removal

Sputtering

Chemical vapor deposition (CVD)

Electroplating

Surface micromachining

LIGA

Material deposition

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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Nonconventional Nonconventional Microfabrication Microfabrication

Course outline

Microstereolithography

Microstereolithography: scanning process, : scanning process, dynamic mask process dynamic mask process

Laser micromachining, processing of metals and

Laser micromachining, processing of metals and nonmetals with laser nonmetals with laser

Electronic packaging

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

MEMS: Design and MEMS: Design and Analysis Analysis

Basic concepts of design of MEMS devices and Basic concepts of design of MEMS devices and

Course outline

– Basic concepts of design of MEMS devices and Basic concepts of design of MEMS devices and processes. processes. – Design for fabrication, other design considerations Design for fabrication, other design considerations – MEM systems theoretic analysis MEM systems theoretic analysis – Analysis of MEMS devices: considerations and use Analysis of MEMS devices: considerations and use

f FEM for MEMS, Modeling and simulation
f FEM for MEMS, Modeling and simulation

techniques techniques

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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MEMS: MEMS: Characterization Characterization

Technologies for MEMS characterization: Scanning Technologies for MEMS characterization: Scanning

Course outline

– Technologies for MEMS characterization: Scanning Technologies for MEMS characterization: Scanning Probe Microscopy (SPM) Probe Microscopy (SPM)

Atomic Force Microscopy (AFM)

Scanning Tunneling microscopy (STM)

Magnetic Force Microscopy (MFM)

Scanning Electron Microscope (SEM) Scanning Electron Microscope (SEM) – Scanning Electron Microscope (SEM) Scanning Electron Microscope (SEM) – Laser Doppler Laser Doppler Vibrometer Vibrometer – Interference based techniques: Electronic Speckle Interference based techniques: Electronic Speckle Interference Pattern technology (ESPI) Interference Pattern technology (ESPI)

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Course Evaluation Course Evaluation

Quizzes: 2 + 1 : 15% Missed quiz: 0

Quizzes: 2 + 1 : 15% Missed quiz: 0

Quizzes: 2 + 1 : 15% Missed quiz: 0

Quizzes: 2 + 1 : 15% Missed quiz: 0

Assignments/Tut sessions: 10% (~ 4)

Assignments/Tut sessions: 10% (~ 4)

Course project : 15%

Course project : 15%

Mid

Mid sem sem : 25% : 25% End End sem sem : 35% : 35%

End

End sem sem : 35% : 35%

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

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What is expected of What is expected of you? you?

BE ETHICAL: the most important Do not copy/

BE ETHICAL: the most important. Do not copy/

BE ETHICAL: the most important. Do not copy/ be truthful/ help each other to clear be truthful/ help each other to clear fundes fundes You are helping yourself by this You are helping yourself by this

Be in class physically as well mentally: then you

Be in class physically as well mentally: then you would have to spend less time studying in room would have to spend less time studying in room

If you have doubt questions feel free to ask It

If you have doubt questions, feel free to ask. It

If you have doubt questions, feel free to ask. It may be common for many may be common for many

Participate

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in

Thank You Thank You

PRASANNA S GANDHI gandhi@me.iitb.ac.in PRASANNA S GANDHI gandhi@me.iitb.ac.in