MEMS MEMS Product update, March 2007 Product update, March 2007 - - PowerPoint PPT Presentation

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MEMS MEMS Product update, March 2007 Product update, March 2007 - - PowerPoint PPT Presentation

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MEMS MEMS Product update, March 2007 Product update, March 2007 Seak-Chuan To Advance Marketing CONFIDENTIAL What are MEMS ? What are MEMS ? What are MEMS ? MEMS = M icro- E lectro- M echanical S ystem Micro : Micro-fabrication

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SLIDE 1 CONFIDENTIAL

MEMS Product update, March 2007 MEMS Product update, March 2007

Seak-Chuan To Advance Marketing

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SLIDE 2 CONFIDENTIAL

What are MEMS ? What are MEMS ? What are MEMS ?

MEMS = Micro-Electro-Mechanical System Micro: Micro-fabrication Technology and dimensions Electro-Mechanical: Electrical and Mechanical Components Systems: integrating MEMS with ‘’chips’’, ie. I/O Controller Micro-Machining: technology to integrate MEMS into same silicon chip or same package.

Stressed
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SLIDE 3 CONFIDENTIAL

How do we build MEMS? How do we build MEMS?

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SLIDE 4 CONFIDENTIAL

THELMA Process Flow

THick Epitaxial Layer for Micromotor and Accelerometer

THELMA Process Flow

THick Epitaxial Layer for Micromotor and Accelerometer

On a layer of silicon Growth of a silicon dioxide layer Etching to create holes Growth of 15 um Epitaxial Layer Deep Silicon Etching Removing the sacrificial layer
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SLIDE 5 CONFIDENTIAL
  • 1. MEMS Sensor: Acceleration
  • Differential Capacitive Change
  • 2. Interface IC: Differential Capacitive Change
  • Output Signal

ain ∆C ∆C V a Vout

Sensor Interface IC

Dual-chip Device

ST Capacitive Accelerometer ST Capacitive Accelerometer

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SLIDE 6 CONFIDENTIAL

rotor

Cs1 Cs2

stator1 stator2

stators rotor springs anchors

Dual Chip Device:

Inertial Sensor Structure Inertial Sensor Structure

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SLIDE 7 CONFIDENTIAL

Three-axis accelerometer Three-axis accelerometer

Z-axis X-Y axis Glassfrit ring Pads region

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SLIDE 8 CONFIDENTIAL QFN Packages (mm3) QFN-28/44: 7x7x1.8 SOPackage(mm3) SO-24: 7x15x2.5 LGA Packages (mm3)

MEMS Linear Accelerometer Portfolio MEMS Linear Accelerometer Portfolio

3-axis 3-axis 2-axis 2-axis Analog

  • utput

Analog

  • utput
SPI/I2C Digital Output & Smart Sensors SPI/I2C Digital Output & Smart Sensors QFN-44 7x7x1.8 mm LIS2L02AQ3 (2-axis) - NOW Analog,PD 2g/6g FS LGA-8 5x5x1.5 mm LIS2L02AL (2-axis) - NOW Analog 2g FS LGA-8 5x5x1.5 mm LIS2L06AL (2-axis) - NOW Analog 2g/6g FS SO-24 15x7x2.6 mm LIS3L02AS4 (3-axis) - NOW Analog,PD 2g/6g FS SO-24 15x7x2.6 mm LIS3L02AS5 (3-axis) - NOW Analog,PD 2g/6g FS QFN-44 7x7x1.8 mm LIS3L02AQ3 (3-axis) - NOW Analog,PD 2g/6g FS LGA-8 5x5x1.5 mm LIS3L02AL (3-axis) - NOW Analog 2g FS LGA-8 5x5x1.5 mm LIS3L06AL (3-axis) - NOW Analog 2g/6g FS QFN-28 7x7x1.8 mm LIS3LV02DQ (3-axis) - NOW SPI/I2C,PD 2g/6g FS SO-24 15x7x2.6 mm LIS2L02AS4 (2-axis) Analog,PD 2g/6g FS LGA-8: 5x5x1.5 Legend: Part_no (# of Axis) –Ready for production LGA-14: 3x5x0.95 LGA-14 3x5x0.95 mm LIS302ALB (3-axis) - NOW Analog 2g FS QFN-44 7x7x1.8 mm LIS3L02AQ5 (3-axis) - NOW Analog,PD 2g/6g FS LGA-16 7.5x4.4x0.95 mm LIS3LV02DL (3-axis) - NOW SPI/I2C,PD 2g/6g FS LGA-14 3x5x0.95 mm LIS302DL (3-axis) - NOW SPI/I2C,PD 2g/8g FS LGA-14 3x5x0.95 mm LIS302ALK (3-axis) - NOW Analog, PD 2g FS
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SLIDE 9 CONFIDENTIAL

Possible System Partitioning w ST Accelerometer Possible System Partitioning w ST Accelerometer

Sensor

A/D I2C/SPI

Analog MUX

I2C/SPI

Chipset

DSP CPU

A/D GPIO x2

A/D DSP CPU DSP CPU

Analog MUX

ANALOG DIGITAL

Interrupt

GPIO

DSP CPU

FREE FALL

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SLIDE 10 CONFIDENTIAL

Analog Output - Three Axis

Accelerometer

S1x

S2x S1y S2y S1z S2z R

MUX DE MUX Voltage and Current Reference Clock & Phase Generator Trimming Circuit & poly fuses Charge amplifier 200KHz

G

Gx

66KHz

Gy Gz OUTx OUTy OUTz

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SLIDE 11 CONFIDENTIAL

Digital Output - Three Axis Accelerometer

S1x S2x S1y S2y S1z S2z R

Charge amplifier MUX DE MUX Σ∆ Σ∆ Σ∆ Σ∆ Reconstruction Filter Σ∆ Σ∆ Σ∆ Σ∆ Reconstruction Filter Σ∆ Σ∆ Σ∆ Σ∆ Reconstruction Filter Regs Array SDA/SDIO CS SCL/SPC SDO I2C/SPI Interface Voltage and Current Reference Clock & Phase Generator Trimming Circuit & Test Interface RDY/INT Contol Logic & Interrupt Generat.
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SLIDE 12 CONFIDENTIAL

GOOD PRODUCT TO CUSTOMER Testing By STMicro. Manufact. By STMicro.

Device Manufacturing Flow Device Manufacturing Flow

Mech Testing

STMicro

Interface Testing

STMicro

Packaging By STMicro.

STMicro

Testing By STMicro. Product Testing & Calibrat.

STMicro

STMICROELECTRONICS MANAGES:

1. ALL THE SUPPLY CHAIN OF “LGA” FAMILY 2. GUARANTEES LONG-TERM SECURITY OF SUPPLY

STMICROELECTRONICS MANAGES:

1. ALL THE SUPPLY CHAIN OF “LGA” FAMILY 2. GUARANTEES LONG-TERM SECURITY OF SUPPLY

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SLIDE 13 CONFIDENTIAL

Key advantages of ST-MEMS Technology Key advantages of Key advantages of ST ST-

  • MEMS Technology

MEMS Technology

Strategic Cost Low Power

Consumption

Low Size & Weight High Volumes High Reproducibility High Thermal Stability

by design

Technology Roadmaps

  • MECHANICAL SENSOR
  • INTERFACE IC
  • PACKAGE
  • ASSEMBLY

High integration with

standard IC devices to built Multi Chip Modules (MCM) or smart sensors

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SLIDE 14 CONFIDENTIAL

MEMS Accelerometer- Main Applications MEMS Accelerometer- Main Applications

Mobile, PDAs, MP4/MP3 HDD Consumer Laptop Automotive White Goods, Industrial & Medical

MEMS Accelerometers

Vibration & Tilt Measurement

Data protection, antitheft HDD data protection, map/document scrolling, menu navigator, portrait-Landscape switch Fall detection, shock sensor, antitheft Assisted navigation, antitheft Vibration Motion Image scrolling, gaming, sport monitoring etc…

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SLIDE 15 CONFIDENTIAL

Many functions- only ONE sensor!

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SLIDE 16 CONFIDENTIAL

ST MEMS for Micro HDD Free Fall / Shock Protection ST MEMS for Micro HDD Free Fall / Shock Protection

ST MEMS Sensor is used to sense shock and free-fall in order to prevent the HDD head/media damage by stopping read/write and parking the head before the impact.

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SLIDE 17 CONFIDENTIAL

MEMS Free-Fall detection MEMS Free-Fall detection

Free-Fall Event window Generated Interrupt signal

MEMS digital Accelerometer will automatically generates an interrupt signal toward the system informing about “FREE FALL EVENT OCCURRED”

X Axis (mg) Y Axis (mg) Z Axis (mg) Free Fall Detection

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SLIDE 18 CONFIDENTIAL

Man Machine Interface Man Machine Interface

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SLIDE 19 CONFIDENTIAL

Picture Browsing Picture Browsing

Photo Album

  • The screen acts as a viewing window
that the user moves to explore the documents.
  • Zoom in/out by moving the terminal closer or away.
  • The reference point can be changed
by pressing a single button while moving the terminal.
  • Jump to the previous/next document
by pressing a button while moving the terminal aside.

Panoramic photo

  • The screen acts as a viewing window
The screen acts as a viewing window that the user moves in order to explore the picture. that the user moves in order to explore the picture.
  • Zoom in/out
Zoom in/out by moving the terminal closer or away. by moving the terminal closer or away.
  • The reference point can be changed
The reference point can be changed by pressing a button while moving the terminal. by pressing a button while moving the terminal.
  • Double
Double-
  • clicking
clicking selects part of the object or pop selects part of the object or pop-
  • up a contextual menu.
up a contextual menu.
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SLIDE 20 CONFIDENTIAL

The END

Browsing complex objects Browsing complex objects

Common features

  • The screen acts as a viewing window
that the user moves to explore the map/object/document.
  • Zoom in/out by moving the terminal closer/away.
  • The reference point can be changed
by pressing a single button while moving the terminal.

Map browsing

  • Rotate the terminal for best visibility
while the map stays horizontal.
  • Double-clicking selects a place/service on the map
and/or pop-up a contextual menu.

Motion-based browsing of a 3D object

  • Double-clicking selects part of the object
and/or pop-up a contextual menu.

Browsing multiple documents (i.e. emails)

  • Jump to the previous/next document
by pressing a button while moving the terminal closer/away.
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SLIDE 21 CONFIDENTIAL

Gaming Gaming

Motion-based maze game

  • The terminal’s movements make the red ball to roll down and
progress through the make.
  • Jumping to pass holes is done applying quick bottom-up movements.

Motorbike race

  • Rotate the terminal left or right to turn. Like for a real motorbike, the
effect is proportional to the inclination.
  • Push or pull the terminal to accelerate or to brake.
  • Zoom in/out is done just by moving the display closer or away.

3D (Doom-like)

  • Move the terminal in all the directions to navigate into the game and
reduce the amount of buttons to handle.
  • Interfacing configurable by the user.
For example, tilting forward/backward the terminal results:
  • either in looking down/up
  • either in going forward/backward
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SLIDE 22 CONFIDENTIAL

Location Based Services Location Based Services

Context-based services

LIS3L02 can help GPS systems to record movements and understand the location and pointing direction of the user.

Digital compass compensation

Digital compasses have to be compensated for non horizontality:

Requires a 3 axis magnetic sensor for X, Y, and Z Use a tilt sensor to measure roll (θ θ θ θ) and pitch (φ φ φ φ)

LIS3L02 can do it with high resolution all over the sphere. This “spherical” compass introduce a world of new applications, like navigation assistance while in the pocket.

What is this building
  • ver there?
It’s Ducal Palace in Venice.
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SLIDE 23 CONFIDENTIAL

ST MEMS for

When people run, there is Z-axis movement to determine how many steps have been taken and then multiply the number of steps taken by the average stride length. With the distance known and the weight of persons, we can determine the amount of calorie burnt
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SLIDE 24 CONFIDENTIAL

Conclusions Conclusions

  • MEMS technology allows the production of a new generation of

cheaper, smaller, high performance and high reliability sensors

  • System-in Package approach is giving flexibility and more

choices for our customers (# of axis vs output mode)

  • ST is able to offer a competitive accelerometer and has a clear

product roadmap well supported by a good patent portfolio.

  • Other MEMS sensors are under development : absolute

Piezoresistive pressure sensor, Gyroscope and digital microphone.

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SLIDE 25 CONFIDENTIAL

THANK YOU! THANK YOU!