New FETs [Spectrum 11/2011, 01/2013 and 08/2019] The smaller you - - PowerPoint PPT Presentation

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New FETs [Spectrum 11/2011, 01/2013 and 08/2019] The smaller you - - PowerPoint PPT Presentation

New FETs [Spectrum 11/2011, 01/2013 and 08/2019] The smaller you make a CMOS transistor, the more current it leaks between gate and channel silicon oxide insulator replaced with hafnium oxide , reducing the tunneling of electrons


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SLIDE 1

New FETs

[Spectrum 11/2011, 01/2013 and 08/2019]

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SLIDE 2

The smaller you make a CMOS transistor, the more current it leaks

  • between gate and channel
  • silicon oxide insulator replaced with hafnium oxide,

reducing the tunneling of electrons

  • between source and drain when it’s switched off (small

distance between source and drain -> poor gate control)

  • thin silicon channel turned by 90 degrees, creating a

“fin”

  • - gate brackets the channel on three sides
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SLIDE 3
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SLIDE 4
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SLIDE 5
  • Cadence has already spent some 4000 man-years
  • verhauling computer code for today’s generation of chips

so that processor operation can be simulated in a realistic time frame

  • It will cost the foundries and their partners some US $6

billion to develop the manufacturing process and the computational tools needed to make14-nm and 16-nm chips

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SLIDE 6

[Spectrum, Aug 2019]

  • Right now, 7 nm is the cutting edge
  • Samsung and TSMC are moving to the next node, 5 nm
  • following node: 3 nm
  • limited manufacture around 2020
  • completely new design

FinFET’s shortcomings 1. more width -> more current -> faster switch

  • the transistor fins can’t vary very much in height without

interfering with the interconnect layers

  • 2. gate surrounds the fin on only three sides -> some

leakage current when the transistor is off

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SLIDE 7

Evolution of the FET

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SLIDE 8

Gate-all-around, or stacked nanosheet FET

Sacrificial layers, selective chemical etchants, and advanced atomically precise deposition technology are needed to make nanosheets

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SLIDE 9

And then?

  • To a large degree, what’s at issue here is heat
  • power density limited to about 100 watts per cm2
  • more energy-efficient transistors are needed
  • Potential solution: new materials for the channel
  • faster electrons -> lower VDD
  • Ge, GaAs, InGaAs
  • n-type InAs and p-type GaSb (gallium antimonide)
  • SiGe (because Ge still has some manufacturing

process and reliability issues)