Rosanna Larciprete
CNR-Istituto dei Sistemi Complessi, Roma, Italy and INFN-LFN, Frascati (RM), Italy
The chemical origin of SEY at technical surfaces
ECLOUD'12 La Biodola, Isola d'Elba 7 June 2012
The chemical origin of SEY at technical surfaces Rosanna - - PowerPoint PPT Presentation
The chemical origin of SEY at technical surfaces Rosanna Larciprete CNR-Istituto dei Sistemi Complessi, Roma, Italy and INFN-LFN, Frascati (RM), Italy ECLOUD'12 La Biodola, Isola d'Elba 7 June 2012 S econdary E lectron Y ield universal curve
ECLOUD'12 La Biodola, Isola d'Elba 7 June 2012
universal curve
secondary electron emission three-step process:
the material parameters influencing SEY are: penetration depth of the primary electrons, stopping power, escape depth of the secondary electrons, work function - Z number
Lin et al. SIA 2005, 37 895
metal secondary electrons
escape depth
Al
2.0 1.0 0.0
400 300 200 100 Primary energy (eV)
δmax=2.2 δmax=1.3
Ti the effective SEY of the metal is strongly modified by the surface contamination
SEY
electron analyzer
KE: kinetic energy BE: binding energy
φ: work function KE=hv-BE-φ
287 286 285 284 283 binding energy (eV)
FWHM = 250 meV
θemiss=0°
hv=400 eV
287 286 285 284 283 binding energy (eV)
hv=1253.6 eV FWHM = 0.95 eV
290 288 286 284 282
carbon hydrogen
metal
binding energy (eV) binding energy (eV)
M M-O C1s C=O C1s C-C sp3 C-H C-C sp2 C-O-C O-C=O
125 123 121 119 117 115 113 111
incident beam
electron beam desorption O2, H2O, H2 CO, CO2
sp3 sp2
C C secondary electrons
bond dissociation M-O, C-OH, C-O, C=O, C bond rearrangement
incident beam secondary electrons dissociation of “environmental” molecules → reactions, film growth
1000 800 600 400 200 binding energy (eV)
400 300 200 100 Primary energy (eV) 2.0 1.0 0.0 SEY (arb. units)
δmax=2.2
e- beam 500 eV
2.2 2.0 1.8 1.6 1.4 1.2
δmax
63 62 61 60 59 58 y (mm)
I=5µA Q=1.2x10-3 C/mm2
C1s O1s Cu3p Cu2p
2.2 1.25 1.7
SEY decreases also outside the beam spot
Cu
SEY SEY
C1s O1s
C-O C-C C-H O-C O-Cu
Cu 3p3/2
400 300 200 100 Primary energy (eV) 2.0 1.0 0.0 SEY (arb. units)
δmax=2.2 δmax=1.25 δmax=1.6
the beam spot but also the surrounding area is modified in the beam spot the quantity of surface C increases → graphitic film growth
1.6 1.5 1.4 1.3
δmax
66 64 62 60 58 56 y (mm) 292 290 288 286 284 282 binding energy (eV)
940 936 932 928 binding energy (eV)
538 536 534 532 530 528 binding energy (eV)
metal
E=500 eV I=5µA Q=1.2x10-3 C/mm2
SEY
SEY
1.6 1.5 1.4 1.3
δmax
66 64 62 60 58 56 y (mm)
C1s O1s
C-O C-C C-H O-C O-Cu
Cu 3p3/2
400 300 200 100 Primary energy (eV) 2.0 1.0 0.0 SEY (arb. units)
δmax=2.2 δmax=1.25 δmax=1.6
538 536 534 532 530 528 binding energy (eV) 292 290 288 286 284 282 binding energy (eV)
Ar+ sputtering @ 2.2 KV + e-beam irradiation @ 500 eV, 10µA, 15 h, Q=3.6x10-2 C/mm2 Cu 3p3/2 C1s O1s
292 290 288 286 284 282 binding energy (eV)
940 936 932 928 binding energy (eV)
538 536 534 532 530 528 binding energy (eV)
metal graphitic C
940 936 932 928 binding energy (eV)
1.2 0.8 0.4 0.0 400 300 200 100 Ep (eV)
Ar
+ sputtered Cu
after e
δ δ δ δmax=1.3 δ δ δ δmax=1.2
SEY
C-O C O
Cu
H dissociation C film growth O2 reaction CO2 CO CO Cu-O dissociation O2 C-H dissociation H2 sp3→sp2 conversion
the contribution of all electron-induced surface reactions reduces δmax from 2.2 to 1.1
sp3 sp2
C C
2.2 1.8 1.4 1.0
δ δ δ δmax
10
10
10
10
10
10
Dose (C/mm
2)
normal incidence
10 20 50 200 500
Energy (EV)
after 10
2 @ 200 eV
290 288 286 284 282 Binding energy (eV)
C1s
Intensity (arb. units)
HOPG as received
LHC
fully scrubbed 500 eV fully scrubbed 10 eV
2.0 1.0 0.0 SEY (arb. units) 400 300 200 100 Primary energy (eV) 1.0 0.0
1.0 0.0
1.0 0.0
δmax=2.2 δmax=1.35 δmax=1.1 δmax=1.05
sp2 sp3 sp3 sp2 sp3 C-H C-O O-C=O
SEY
290 288 286 284 282 Binding energy (eV)
C1s
Intensity (arb. units)
HOPG as received fully scrubbed
1.0 0.0
400 300 200 100 Primary energy (eV) 2.0 1.0 0.0 SEY (arb. units) 1.0 0.0 1.0 0.0
δmax=2.2 δmax=1.3 δmax=1.1 δmax=1.05
sp3 C-H O-C=O sp2 sp3 C-H C-Ox
E=500 eV
SEY
3.0 2.0 1.0 0.0 SEY (arb. units) 400 300 200 100 Primary Energy (eV)
2.7 1.8 1.3 Intensity (arb. units) 600 500 400 300 200 100 Binding energy (eV)
O1s C1s N1s Ta Al2s Al2p Ar+ sputtering as received 1.2x10-1C/mm2 @ 500 eV
SEY
78 76 74 72 70 Binding energy (eV) Ar
+ sputtering
Al 2p
72.5 eV Al metallic 73.4 eV Al bonded to chemisorbed O 73.9 eV tetrahedral Al2O3 75.1 eV octahedral Al2O3
the minimal partial pressure of H2O contained in the residual gas is sufficient to hinder the achievement of a stable, clean Al surface. After prolonged ion bombardment there are still Al atoms bonded to O even in a Al2O3 phases
Intensity (arb. units) 600 500 400 300 200 100 Binding energy (eV)
O1s C1s N1s Ta Al2s Al2p Al2s Al2p
3.0 2.0 1.0 0.0 SEY (arb. units) 400 300 200 100 Primary Energy (eV)
3.5 2.7 1.8 1.3 Ar+ sputtering as received 1.2x10-1C/mm2 @ 500 eV 2.9x10-2C/mm2 1.4 C/mm2
e- beam 500 eV
dissociation of residual gas molecules as H2O and CO induced at the metal surface by the e- beam determines a rapid oxidation of the irradiated area, as well as, although to a lesser extent, of the surrounding region
SEY
78 76 74 72 70 Binding energy (eV)
Al2p
Ar
+ sputtering
e- beam irradiation Q (C/mm
2)
1.4 2.9x10
Q (C/mm
2)
C1 C2 C3 C4
Al 2p
72.5 eV Al metallic 73.4 eV Al bonded to chemisorbed O 73.9 eV tetrahedral Al2O3 75.1 eV octahedral Al2O3
Al 2p dramatic enhancement exclusively
1.5 1.0 0.5 0.0 O1s area, C4 area (arb. units)
4 3 2 1
δmax
time as received e
Ar
+ 2 KeV
e
e
the SEY variation follows the oxygen content of the Al surface
O2 C O
Al
H Al-O dissociation reaction CO2 CO
H2O dissociation H2
SEY is determined by the rates of Al oxidation and reduction
C-O C-H dissociation H2 dissociation C film growth O2 CO sp3→sp2 conversion
reactions involving C play a minor role
Gibbs free energy (kJ) 2000 1600 1200 800 400 4Al + 3O2 —> 2Al2O3 2Fe+ O2 —> 2 FeO 4Cu+ 2O2 —> 2 Cu2O 2Cu2O +O2=4CuO temperature (K)
500 400 300 200 100 Binding Energy (eV) C1s O1s
Cu3p Cu3s poly-Cu C/poly-Cu
C film thickness 2-3 nm
1.2 0.8 0.4 0.0 400 300 200 100 Ep (eV)
Cu substrate C film
δ δ δ δmax=1.3 δ δ δ δmax=1.17
a-C films magnetron sputtering @ RT p(Ar)= 10-2 mbar ∆t = 2min
SEY
12 8 4 Binding energy (eV)
valence band
hv=40.8 eV RT 460 ° C 700 ° C
EF
288 286 284 282 Binding energy (eV)
C1s
hv=1253.6 eV FWHM (eV)
1.8 0.9 1.4 1.3
RT 460 ° C 700 ° C HOPG
1.0 0.6 0.2 400 300 200 100 Ep (eV)
1.17 1.10 0.95 δ
2p-π 2p-σ
the graphitization of the C films corresponds to a lower SEY
The SEY of technical samples is strongly affected by the chemical composition of the surface as the presence and the nature of contaminating adsorbates can heavily modify the effectve δmax values. This determines the high variation of the experimental values. For Cu samples electron conditioning at 500 eV reduces the SEY and lowers δmax from 2.2 to 1.1 . Both direct beam and secondary electrons have a role in the chemical reactions which decrease the SEY. Similar results were found for stainless steel samples. On the contrary for Al samples electron conditioning at 500 eV does not succeed in lowering δmax below 1.8 (1.5). In this case the composition of the residual gas in the UHV chamber is extremely importantin limiting the e- beam induced oxidation. For ultrathin C films deposited by magnetron sputtering on copper δmax depends on the sp3/sp2 ratio. The knowledge of the chemical state of a “technical” surface can elucidate the origin of the measured SEY curves and in general provide profitable information for the e-cloud mitigation.
Roberto Cimino, INFN-LNF, Frascati (RM), Italy Davide Remo Grosso, INFN-LNF, Frascati (RM), Italy Mario Commisso, INFN-LNF, Frascati (RM), Italy Theo Demma, INFN-LNF, Frascati (RM), Italy Roberto Flammini, CNR-IMIP, Montelibretti (RM), Italy INFN-LNF, Frascati (RM), Italy Reiner Wanzenberg, Desy, Hamburg, Germany Vincent Baglin, CERN, Geneva, Switzerland Wolfram Fischer, Brookhaven Nat. Lab., USA Antonio Di Trolio, CNR-ISC, Roma, Italy