SPS PRESENTATION COBETTER WWW.SPS-EUROPE.COM WWW.SPS-AMERICA.COM - - PowerPoint PPT Presentation

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SPS PRESENTATION

COBETTER

SPS Products

Handling Shipping Wetprocess / CMP Thin film Photolithograpy

SPS-Europe B.V. Midden Engweg 41 NL-3882 TS Putten The Netherlands Tel.: (31) 341 360 590

Offices:

SPS-Europe GmbH Weisbergerstraße 3 D-85053 Ingolstadt Germany Tel.: (49) 841 370 530 S.P.S. Ltd. Aghmhor Annex Whitmuir, Selkrik TD7 4PZ United Kingdom Tel.: (44) 1750 725 712 S.P.S. bvba Steenweg op Withof 5 B-2960 St. Job in ’t Goor Belgium Tel.: (32) 3 440 0895 S.P.S. bvba 9, Rue du Pont 69390 VOURLES France Tel.: (33) 4 72 31 78 35 S.P.S. S.R.L. Via Pietro Mascagni 31 20122 Milano Italy Tel.: (39) 3 457 357 177 SPS-Asia Technology Pte. Ltd. 10 Ubi Crescent Ubi Techpark Lobby B, #06-18 Singapore 408564 Tel.: (65) 911 30 172

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C O B E T T E R I N T R O D U C T I O N

R&D, Lab and Factory

SET UP C1 Factory Membrane Filter Manufacturing 9400 SQM C2 Factory Depth Filter Manufacturing 9000 SQM C3 Factory Semiconductor Filter Manufacturring 13600 SQM, 2019 C4 Factory Sustainless Filter Manufacturing & Fluoroplastics Resurtech Manufacturing & Housing Manufacturing 28000 SQM Building C5 Factory R&D Lab center 41000 SQM, 2020 C6 Factory Life Center 25000 SQM, 2020

C5 C6 C4

C 1 C 2 C 3

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Company Profile Cobetter

S P S c o m p a n y p r e s e n t a t i o n

Customers in over 80 countries. Japanse Customers more than300. Provide over 4,000,000 filters

• annually. To3200 customers

worldwide. 30%+

140 million USD (2018) 1500+人 201902

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1nm ~ 100µm

FILTRATION , SEPARATION & PURIFICATION

Full Range of Manufacturing Capabilities for the Filtration Industry

COBETTER CAN PROVIDE

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§ Accredited by China National Accerditation Service for Conformity (CNAS) § Uses Advanced Experiment Instruments and Standard Operating Procedures (SOP) § Confidentiality Rules and Regulations to Control Test Procedures and Results § Validation Services to All Customers § ISO 9001:2015 Certified Company § ISO 17025:2018 Qualified Laboratories

E S T A B L I S H E D A D V A N C E D A N A L Y S I S C E N T E R They have 9 Labs

80+ Scientists & technicians

More than 54 Testing Items and 1200+Reports per Year

10+Unique Filtration Media 100+Patents 1200+Filtration Products

D R I V E N B Y T E C H N O L O G Y

ModulesCommitted to Producing Microfiltration Membranes, Nano- fibers, and UF Modules

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HAPES vs. PTFE

§ Better particle removal § Maximum temperature up to 60 ºC § Reduce equipment pre operation time § High flowrate and longer life time

Features

HAPES Membrane

SEM SEM

§ Natural hydrophobic membrane § Excellent chemical compatibility § High meltinh point (327ºC) § Low extractables § High porosity, uniform pore size distribution

Features

PTFE Membrane (Polytetrafluoroethylene)

SEM

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HAPES vs. PTFE

ITE M H A P E S 5 nm P TF E 5 nm P TF E 20 nm

Molecular Structure Flow (kPa@20L/min) 30 50 30 Chemical Compatibility DIW / BOE / BHF / DHF / SC1 /SC2 (H2O2＜5%) /……, except for the strong oxidizing reagent HPM,SPM,SC1,SC2,HNO3…… Applicable Temperature ≤60 ℃ ≤180 ℃

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HAPES vs. PTFE

Application Comparing with PTFE filter, HAPES shows even better particle removal efficiency

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HAPES Chemical Compatibility

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HAPES Filter Performance

C a r t r i d g e D i s p o s a b l e Membrane High asymmetric polythersulfone Support / Cage / Core / End caps HDPE O-ring TEV or EPDM Shell ( Compact Capsule ) HDPE Shell ( Disposable ) PFA F i l t e r X 1 Z 1 Z 2 Diameter Φ68 Φ83 Φ83 Filter Area 0.8 m2 / 10" 1.4 m2 / 10" 1.8 m2 / 10" Removal Ratings 10/20/30/50 nm 2/5/10/20/ 30/50 nm 2/5/10/20/ 30/50 nm § Reduce equipment pre-operation time； § Excellent retention； § Very high flow rate and longer life； § Ultralow metal ion extractables option； § Manufactured in a cleanroom environment； § 100% integrity tested. § Process: Wet Etch and Cleans； § Installation Point: Point of Tool； § Chemistry: § Dilute acids (such as BOE/DHF/SC2)， § Dilute bases (such as SC1/TMAH)，DIW.

Features Application

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PTFE Chemical Compatibility

Good chemical compatibility

Note

Limited condition use Attacked or dissolved 13

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CHVH Filters Performance

C a r t r i d g e D i s p o s a b l e Support / Cage / Core / End caps HDPE O-ring TEV or EPDM Shell ( Compact Capsule ) HDPE

• Max. Operating

Temperature 70°C

• Max. Differential

Pressure 0.4 MPa / 21°C F i l t e r Φ68 mm Φ83 mm Filter Area m2 / 10” X1 X2 Z1 Z2 Z3 0.91 1.3 1.3 1.9 2.2 Removal Ratings 50nm/0.1/0.2/0.5/1.0/3.0/5.0/10um § Hydrophilic PTFE: do not require preetting in water-based chemicals § HDPE Cage: enchances chemical compatibility, reduces cost and maintain high cleanliness § Wet etch and Clean § High-viscosity photoresist and photochemicals § Bulk chemicals

Features Application

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Filtration Solution for Ultrapure Water

Municipaltap water Multi media filter UV-254 R.O.1

F in al filt e r

Activatedcarbon R.O.2 Vacuumdegassingfilm EDI Polisher UV OX Ultrafiltration FAB

P re filt e r

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Filtration Solution for Ultrapure Water

UPW FAB Waste water treatment station Air flotationtank

P re filt e r

Reactiontank Reverse osmosis Multi media filter Microbiologicaltreatment

P re filt e r

PH neutralizationtank Activatedcarbon filter Recycledwater process

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Pre-filter

S p e c i f i c a t i o n s Media Polypropylene Support and drainage Polypropylene Design Flow Rate 2m3/h/40” Features Lower cost longer lifetime Gradientfiltration& gradedretention

3xlifetimecomparedwithgeneralmeltblownfilter OPTION 1 Rolledfilter & housing OPTION 2 High flow filter & houding

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Final filter

I t e m Membrane media Asymmetric PES Retention rate 10nm, 20nm, 30nm, 50nm, 80nm 0.1μm, 0.2μm,0.45μm

• Highly asymmetric structure & graded pore sizes

§ Higher porosity § Higher flow rate, higher dirt-holding capacity § Ultra high filtration efficiency

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Filtration Solution for Chemical Distribution System

Cleaning § H2O2 § H2SO4 § H3PO4 § NH4OH § HCl § HNO3 § NH4F § HF § IPA § CH3COOH § KOH § NaOH § Acetone § Methanol § Detergent § PI Solvent Etching § SIO Etch § BOE Etch § Poly Etch § Al Etch § Cu Etch § Ti Etch § ITO Etch § Cr Etch § Wu Etch § Mo Etch § GaAs Etch Photo § Developer TMD series DEV series PI develop § Thinner PMP，NBA Toluene,EL. PGMEA….. § Stripper inorganic acid Amine Solvent base § Rinse NMP, DMSO, IPA etc. CMP § OxideSlurries § Metal Slurries § Slurry Additives Fe(NO3)3 base Al2(SO4)3 base § Post CMP cleaning For Cu,Poly- Silicon Proess

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Chemical Distribution System

Chemical Quick CouplingBooth Storage Tank Chemical Transfer or Mixingmodule Day tank or Mixingtank

Pre filter

T-Box Chemical supplyModule

Finalfilter

ValvemanifoldBox Point Of Use

Electronic chemicals supply process

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2 1 Filtration For Chemical

Membrane PTFE Removal Rating 7/10/15/20/30/50nm 0.1/0.2/0.45/1/3/5/10um Cage PFA Filtration Area 0.91, 1.21m2/10"(Φ68mm) 1.3, 2.2, 3.0m2/10"(Φ83mm) Length 10/20"

• Max. Temp.

180℃

• Max. Press.

0.58MPa/25℃ End Cap 222/Flat Package Dry: suit for organic solvents Prewet：suit for acids and alkaline Bowl/Head PFA Locking Ring PVDF: suit for acids PP+GF：suit for alkaline O-ring TEV/FFKM Length 10/20"

• Max. Temp.

100℃

• Max. Press.

0.75MPa/25℃ In/Out 3/4", 1" CFL 3/4", 1" CPL vent/drain 1/2", 1/4"

All-fluoropolymerHousing

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2 2 Filtration For Chemical

Material SUS 316L O-ring TEV/PTFE/EPDM Length 10/20"

• Max. Temp.

130℃ Design Press. 0.6MPa In/Out 1" NPT vent/drain 1/4"NPT

SUS Housing Suitfororganicsolvents

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SUS Housing with GTF Filter In-line Capsule Filter

SUS Housing GTF filter

Trailer Tank Vaporizer

Bulk Gas Supply System

Gas type Produced

• n-site

Storage tank Coutainer Trailer Bundle Compressor CDA √ N2 √ √ O2 √ √ Ar √ H2 √ √ √ √ He √ √ √

Purifier Pre Filter Purifier FinalFilter Pure Gas toFAB General Gas toFAB

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T H E E N D F O R M O R E I N F O R M A T I O N

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