ECSEL Brokerage ECSEL Brokerage Event 2016 Event 2016 ECSEL - - PowerPoint PPT Presentation

ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016

ECSEL

Joint Undertaking

ECSEL

Joint Undertaking

• Dr. Tommi Suni, Picosun Oy,

tommi.suni@picosun.com

Atomic Layer Etching

ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016

ALE project idea

• Conventional etch processes are not able to meet

the requirements of most advanced structures containing atomic scale features

• Atomic layer etching (ALE) is a method where

material is removed atomic layer by layer conformally (in 3D)

• As the process is self-limiting, the control of the

thickness removed can be very precise and the depth is determined by the number of cycles

• Atomic layer etching can also be very material

selective

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ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016

Project & partners we are looking for

• We are looking for a project developing new

processing methods or pilot lines for ICs, MEMS, or nanoelectronics

• r
• Applications that would require ALE

processing steps

• Participating in existing project plan that

would benefit from atomic layer etching also possible

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ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016

Project & partners we are looking for

• We are also interested in projects benefiting

from atomic layer deposition (ALD)

• Desired partners

– Industrial end users – Academic partners with good analysis capabilities – Project partners developing compimentary processing technologies (e.g nanolithography)

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ECSEL Brokerage Event 2016 ECSEL Brokerage Event 2016

Thank you!

Contacts:

• Dr. Tommi Suni
• Dr. Marko Pudas

Tommi.suni@picosun.com Marko.pudas@picosun.com +358-40-8251703 +358-50-3704078

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