WETBENCH: Summary of SOP Mario Beaudoin beaudoin@physics.ubc.ca - - PowerPoint PPT Presentation

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Nanofabrication Facility Advanced Materials and Process Engineering Laboratory 2355 East Mall, Vancouver, BC V6T 1Z4

WETBENCH: Summary of SOP

Mario Beaudoin beaudoin@physics.ubc.ca 604-822-1853 July 2004

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Purpose

• Standardize SOP for yellow room wetbench
• Ensure operator safety
• Ensure process cleanliness
• Ensure proper disposal of solvents and acids
• Convey cleanroom etiquette in a mutually respectful

manner Related documents

• Nanofabrication Facility: Wetbench SOP
• AMPEL Nanofabrication Facility Member’s Laboratory

Guide

• THIS PRESENTATION DOES NOT COVER ALL

MATERIAL IN THE GUIDE OR THE SOP

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Safety: What every user should know

• Where to find protective gear
• How to dispose of aqueous chemicals
• How to dispose of organic solvents
• Where to find MSDS information
• How to determine the chemical compatibility of a glove
• What to do in case of chemical spills (small or large)
• What to do in case of an HF spill
• What to do in case of an exposure to HF
• What to do in case of exposure to chemicals
• How to store chemicals properly

(All this information is found in the Wetbench SOP)

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Process Cleanliness: What every user should know

• Principle of the wetbench operation
• Materials incompatible with the wetbench
• How to pour aqueous chemicals from bottles
• How to use, clean and store general use labware

(beakers, developing trays, tweezers, etc.) (All this information is found in the Wetbench SOP)

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Qualification procedure

During qualification, you will be asked to answer questions

• n:
• safety and
• process cleanliness

A score of 100% is required to obtain qualification.

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The wetbench

• Laminar flow through HEPA

filters

• Net inward flow
• Class 10 or better inside hood
• Best practice: do not obstruct
• utflow through exhaust grids
• Contains

– Common use labware – Squeeze bottles with solvents – Spinner – Hotplates – Ultra-sonic bath – DI water: gooseneck & gun – N2 gun – Etcetera

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Wetbench chemicals (common use)

• The Nanofabrication Facility supplies common use chemicals

– Solvents – Acids & Bases – Photoresist – Other chemicals

• Common use chemicals identified as cleanroom and have the
• pening date written on the bottle (or container)
• Solvents: stored in the grey solvents cabinet
• Other chemicals: stored in clearly identified boxes under the

wetbench

• Waste solvents: in red plastic cans under the wetbench
• Waste acids: in identified waste acid plastic bottles
• Wipes: follow procedures outlined in SOP
• Empty containers: follow procedures outlined in SOP

Chemicals not identified as cleanroom belong to a research group

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Shared labware (in process)

• A number of cleanroom labware is share ware (found in

wetbench)

– Developing trays – Tweezers: metal and fluoroware – Glass beakers and other dishes – Fluoroware beakers/graduate (for HF use)

• Please clean all share ware after use

– Never wipe beakers – this contaminates them – Beakers used for solvents rinsed with acetone, propanol & DI – Beakers for acids rinsed with DI – Beakers are hung on drying rack to dry

• Users leaving their own beakers on right half of drying

rack should store them when they have dried to free the space

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Safety (more info in Member’s Laboratory Guide)

• MSDS sheets are found on UBC website

– www.safety.ubc.ca/inner.php?scid=15&pid=101 – Microscope computer has web access

• Buddy system

– No one should work alone in lab – Please read section in Member’s Laboratory Guide

• Protective equipment (available in cleanroom)

– Wear safety glasses in yellow room – Wear splash goggles when handling chemicals – Wear full faceshield when handling HF – Choose the proper gloves for your task (glove specs are posted on shelf in gowning area) – Know the location of safety shower, eyewash, first aid, etc.

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Safety (continued)

• Chemical spills

– When in doubt: flee and evacuate cleanroom (press red alarm button) – All spills must be cleaned up at once when/if you are 100% certain that it is safe to do so – Refer to Wetbench SOP and Member’s Laboratory Guide for more info

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Etiquette

• Please leave your work area clean

– Wipe down the wetbench after use – Wetbench cleanliness is defined by the MOST DEMANDING USER and adopted as the standard

• Please clean all share ware
• If you must leave unfinished or in-process work:

– Identify all samples, etc, with your name, time, phone # and expected return time (please return as soon as possible) – Try to leave room for others on the wetbench

• Reserve equipment: in the reservation sheet in the

reception desk binder

• Work storage is assigned: if you need storage area,

please contact the cleanroom manager.

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Summary

• As per Member’s Laboratory Guide

– Contact a user to get trained – Contact a superuser to get qualified

• All users qualified prior to July 2004 will need to be

requalified

– Please set up an appointment with a superuser