T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Nanofabrication Facility Advanced Materials and Process Engineering Laboratory 2355 East Mall, Vancouver, BC V6T 1Z4 WETBENCH: Summary of SOP Mario Beaudoin beaudoin@physics.ubc.ca 604-822-1853 July 2004 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Purpose • Standardize SOP for yellow room wetbench • Ensure operator safety • Ensure process cleanliness • Ensure proper disposal of solvents and acids • Convey cleanroom etiquette in a mutually respectful manner Related documents • Nanofabrication Facility: Wetbench SOP • AMPEL Nanofabrication Facility Member’s Laboratory Guide • THIS PRESENTATION DOES NOT COVER ALL MATERIAL IN THE GUIDE OR THE SOP 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Safety: What every user should know • Where to find protective gear • How to dispose of aqueous chemicals • How to dispose of organic solvents • Where to find MSDS information • How to determine the chemical compatibility of a glove • What to do in case of chemical spills (small or large) • What to do in case of an HF spill • What to do in case of an exposure to HF • What to do in case of exposure to chemicals • How to store chemicals properly (All this information is found in the Wetbench SOP) 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Process Cleanliness: What every user should know • Principle of the wetbench operation • Materials incompatible with the wetbench • How to pour aqueous chemicals from bottles • How to use, clean and store general use labware (beakers, developing trays, tweezers, etc.) (All this information is found in the Wetbench SOP) 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Qualification procedure During qualification, you will be asked to answer questions on: • safety and • process cleanliness A score of 100% is required to obtain qualification. 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A The wetbench • Laminar flow through HEPA filters • Net inward flow • Class 10 or better inside hood • Best practice: do not obstruct outflow through exhaust grids • Contains – Common use labware – Squeeze bottles with solvents – Spinner – Hotplates – Ultra-sonic bath – DI water: gooseneck & gun – N2 gun – Etcetera 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Wetbench chemicals (common use) • The Nanofabrication Facility supplies common use chemicals – Solvents – Acids & Bases – Photoresist – Other chemicals • Common use chemicals identified as cleanroom and have the opening date written on the bottle (or container) • Solvents: stored in the grey solvents cabinet • Other chemicals: stored in clearly identified boxes under the wetbench • Waste solvents: in red plastic cans under the wetbench • Waste acids: in identified waste acid plastic bottles • Wipes: follow procedures outlined in SOP • Empty containers: follow procedures outlined in SOP Chemicals not identified as cleanroom belong to a research group 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Shared labware (in process) • A number of cleanroom labware is share ware (found in wetbench) – Developing trays – Tweezers: metal and fluoroware – Glass beakers and other dishes – Fluoroware beakers/graduate (for HF use) • Please clean all share ware after use – Never wipe beakers – this contaminates them – Beakers used for solvents rinsed with acetone, propanol & DI – Beakers for acids rinsed with DI – Beakers are hung on drying rack to dry • Users leaving their own beakers on right half of drying rack should store them when they have dried to free the 28-Jul-04 AMPEL - UBC space
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Safety (more info in Member’s Laboratory Guide) • MSDS sheets are found on UBC website – www.safety.ubc.ca/inner.php?scid=15&pid=101 – Microscope computer has web access • Buddy system – No one should work alone in lab – Please read section in Member’s Laboratory Guide • Protective equipment (available in cleanroom) – Wear safety glasses in yellow room – Wear splash goggles when handling chemicals – Wear full faceshield when handling HF – Choose the proper gloves for your task (glove specs are posted on shelf in gowning area) – Know the location of safety shower, eyewash, first aid, etc. 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Safety (continued) • Chemical spills – When in doubt: flee and evacuate cleanroom (press red alarm button) – All spills must be cleaned up at once when/if you are 100% certain that it is safe to do so – Refer to Wetbench SOP and Member’s Laboratory Guide for more info 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Etiquette • Please leave your work area clean – Wipe down the wetbench after use – Wetbench cleanliness is defined by the MOST DEMANDING USER and adopted as the standard • Please clean all share ware • If you must leave unfinished or in-process work: – Identify all samples, etc, with your name, time, phone # and expected return time (please return as soon as possible) – Try to leave room for others on the wetbench • Reserve equipment: in the reservation sheet in the reception desk binder • Work storage is assigned: if you need storage area, please contact the cleanroom manager. 28-Jul-04 AMPEL - UBC
T H E U N I V E R S I T Y O F B R I T I S H C O L U M B I A Summary • As per Member’s Laboratory Guide – Contact a user to get trained – Contact a superuser to get qualified • All users qualified prior to July 2004 will need to be requalified – Please set up an appointment with a superuser 28-Jul-04 AMPEL - UBC
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