Cleaning Reporting period: m24 m30 Final Reporting at WP end WPL: - - PowerPoint PPT Presentation

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Cleaning Reporting period: m24 m30 Final Reporting at WP end WPL: - - PowerPoint PPT Presentation

Dec 15, 2022 141 likes •478 views

WP 3 Cleaning Reporting period: m24 m30 Final Reporting at WP end WPL: Teknek (Sheila Hamilton) Partners involved TNO InnoPhysics DTF Philps IBS Eight19 Teknek Rolic M30 Technical review

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SLIDE 1

WP 3 Cleaning

Reporting period: m24 – m30 Final Reporting at WP end

M30 Technical review meeting – 24th & 25th of November 2014

  • TNO
  • DTF
  • IBS
  • Teknek
  • InnoPhysics
  • Philps
  • Eight19
  • Rolic

WPL: Teknek (Sheila Hamilton)

Partners involved

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SLIDE 2

Task 3.1

  • Construct a theoretical model of adhesion forces as related to a contact cleaning

system

  • Model constructed
  • Ongoing work to measure adhesion forces on a variety of substrates
  • Additional investigation into the impact of Humidity on Capilliary forces

M30 Technical review meeting – 24th & 25th of November 2014

Contact Cleaning

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SLIDE 3

Task 3.1

  • Formulate a suite of elastomers tailored to specific applications within the OPV

and OLED manufacturing processes for particles down to 100 nm

  • Nanocleen and UTF elastomers developed
  • Concern about “orange peel” effect at Philips
  • Concern at apparent increase in small Particles after cleaning
  • Potential damage on sensitive coatings and substrate to be evaluated

M30 Technical review meeting – 24th & 25th of November 2014

Contact Cleaning

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SLIDE 4

3.1.1 Test Set Up

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 5

3.1.2 “Orange Peel”

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 6

3.1.3 Substrates Tested

  • SiO2 wafers
  • Gold coated wafer
  • SiN coated wafer
  • Glass Plates
  • ST504 PET foil
  • ST520 PET foil
  • Aluminium coated foil
  • ITO coated foil
  • PEDOT coated foil
  • PAL foil
  • LEP foil

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 7

3.1.4 Residue from UTF

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 8

3.1.5 SEM of Residue

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 9

3.1.6 Effect on Contact Angle

Material Time(ms) C.A.(deg) Comments Glass 100 15.2 Glass cleaned with Nanocleen 100 12.4No change with Nanocleen Glass cleaned with Silicone Roller 100 31.0Surface Energy Changes with Silicone Roller DuPont ST520 peeled 100 63.9 DuPont ST520 Cleaned with Nanocleen 100 63.0No change with Nanocleen DuPont ST520 cleaned with Silicone Roller 100 70.8Surface Energy Changes with Silicone Roller Aluminized PET 100 36.4 Aluminized PET cleaned with Nanocleen 100 34.3 ITO on foil 100 69.6 ITO on foil cleaned with Nanocleen 100 71.2Most rollers can be used PEDOT HILHC5 100 16.8 PEDOT HILHC5 cleaned with Nanocleen 100 16.1No change with Nanocleen PEDOT HILHC5 cleaned with Silicone Roller 100 63.2Surface Energy Changes with Silicone Roller

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 10

3.1.7 Learning points

  • UTF leaves a small amount of residue – enough to be

seen but not enough to be identified by SEM

  • Nanocleen requires thoroughly cleaned using Roller

Doctor pads before testing to remove any particles remaining from the manufacturing process

  • Nanocleen causes no damage to the surface of

sensitive coatings

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 11

Task 3.1

  • Development of vacuum compatible contact roller and adhesive materials for the

removal of particles down to 100 nm

  • Additional opportunity for using Panel elastomer to clean SiN flakes from the drum during chamber

maintenance

  • Additional opportunity for cleaning shields using Panel elastomer during chamber maintenance
  • Additional opportunity to move the Nanocleen unit within the Rewind chamber to clean backside of

the foil

M30 Technical review meeting – 24th & 25th of November 2014

Contact Cleaning

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SLIDE 12

Build up of SiN flakes

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 13

Close up of SiN flakes

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 14

SiN flakes removes by Panel Elastomer

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 15

Cleaning of shields in chamber

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 16

Teknek Barrier Tool Cleaner

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 17

Drum in PECVD chamber

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 18

Particles Removed from Drum

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 19

Potential New Position for Cleaner

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 20

Testing in Applied Materials

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 21

Test Results from Applied Materials

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 22

Degassing Results

M30 Technical review meeting – 24th & 25th of November 2014

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SLIDE 23

Task 3.1

  • Development of contact cleaning strategies for localised particle removal e.g. for

laser ablation debris from repair

  • Local cleaner sent to Holst – still waiting for results
  • New cleaning sheet opens up possibilities for many different shapes of local cleaners

M30 Technical review meeting – 24th & 25th of November 2014

Contact Cleaning

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SLIDE 24

Task 3.2

  • Development of narrow gap cleaning of rigid substrates for effective removal of

particles down to 100 nm

M30 Technical review meeting – 24th & 25th of November 2014

Contact free cleaning

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SLIDE 25

IBS – Narrow Gap Cleaning

M30 Meeting, Eindhoven, 24th & 25th Nov.

  • Goal: Develop cleaning tool for removal of particles from moving foil using

the ‘narrow gap’ principle

  • Performance targets:
  • Equal or better current contact methods; better current non-contact methods

PRE >90% for all metal particles PRE >50% for all other particles between 1 and 40 μm PRE >90% for all other particles > 40 μm

  • Status:

Prototype realized, offline tests on rigid glass/PET plates finished Inline tests ongoing

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SLIDE 26

IBS – Narrow Gap Cleaning

M24

Camera setup realized Particle measurement to ± 1.5 μm Narrow gap cleaner prototype realized

M30 Meeting, Eindhoven, 24th & 25th Nov.

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SLIDE 27

Task 3.2

  • Modification the of narrow gap setup for flexible substrates

M30 Technical review meeting – 24th & 25th of November 2014

Contact free cleaning

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Task 3.2

  • Development of a cleaning nozzle

for local cleaning

  • Lab setup has been modified for

integration in R2R line

  • Setup for integration shows same

performance as table top design

  • Integration scheduled for mid December

M30 Technical review meeting – 24th & 25th of November 2014

Contact free cleaning

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SLIDE 29

Task 3.3

  • Development of a plasma cleaning process suitable for the surfaces investigated in

this project

M30 Technical review meeting – 24th & 25th of November 2014

Plasma cleaning

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SLIDE 30

Task 3.3

  • Development of a R2R compatible plasma-printer for full area and local treatment

M30 Technical review meeting – 24th & 25th of November 2014

Plasma cleaning

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SLIDE 31

Deliverables

M30 Technical review meeting – 24th & 25th of November 2014

No. Title Lead partner Due month Progress*

3.1 Cleaning concepts Teknek 12

F

3.2 Improved Elastomers and adhesive materials Teknek 18

F

3.3 Cleaning process Teknek 18

F

3.4 Cleaning prototypes ready Teknek 27

O/D

(To be submitted in December)

*N – Not started, S – Started, O – Ongoing, F – Finished, D - Delayed

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SLIDE 32

M30 Technical review meeting – 24th & 25th of November 2014