Understanding Lateral Tunneling Understanding Lateral Tunneling - - PowerPoint PPT Presentation

Understanding Lateral Tunneling Understanding Lateral Tunneling Accelerometer and The Micromachining Accelerometer and The Micromachining Process Process

Alma Alma Garc Garcí ía a

Architectural Engineering Architectural Engineering Allan Hancock College Allan Hancock College Mentor: Laura Oropeza Mentor: Laura Oropeza Advisor: Kimberly Turner Advisor: Kimberly Turner

Sponsor: Institute for Collaborative Biotechnologies Sponsor: Institute for Collaborative Biotechnologies

Outline Presentation Outline Presentation

• Project and Goals

Project and Goals

• Introduction

Introduction

• Types of Accelerometers

Types of Accelerometers

• Micro Fabrication Process

Micro Fabrication Process

• Actual Pictures

Actual Pictures

• Experimental Testing

Experimental Testing

• Results

Results

• Summary

Summary

• Future plans

Future plans

Project Goals Project Goals

• Getting familiar with MEMS principles

Getting familiar with MEMS principles

• Characterization of different configurations of lateral tunnelin

Characterization of different configurations of lateral tunneling g accelerometers by interferometer technique accelerometers by interferometer technique

• Understanding the physics of the quantum mechanics phenomena

Understanding the physics of the quantum mechanics phenomena

• f
• f “

“tunneling current tunneling current” ” and the importance of using it in ultra high and the importance of using it in ultra high sensitive devices sensitive devices

• Overview of MEMS fabrication process: SOI PROCESS

Overview of MEMS fabrication process: SOI PROCESS

Introduction Introduction

• What is MEMS?

What is MEMS?

• What is an accelerometer?

What is an accelerometer? A sensor that detects A sensor that detects changes on velocity changes on velocity

• Applications

Applications

• Seismology

Seismology

• Air bag deployment

Air bag deployment

• Aerospace

Aerospace

Micro Electro Mechanical Systems

Courtesy of Sandia National Laboratories

I wish I had an air-bag deployment in my car!

One possible application

Two Types Of Lateral Tunneling Accelerometer

* Parallel plates

F

V

• Design 1

Mass~7.08e-10[Kg]

300µm

120µm

V

80µm

F

X~10A° V

Tunneling

100mV

Gold

e e e Top view

• Actuator 1
• Sensor

Tunneling Tip

* Tunneling Tip

• Design 2

It

comb-drive actuator springs proof-mass

• Actuator 2
• Sensor

X~10A° V

Tunneling

100mV

Gold

e e e Poof-mass Top view V

* Interdigitated Comb-Fingers

V Ultra high sensitive!

[Å] [nA]

SOI Fabrication Process

1 2 3 4 5 Photo Resist Silicon Silicon Oxide (SiO2) Gold 6 7 SOI wafer Photo Resist Lithography Deep Etching Remove Photo Resist Release Structure Metal Deposition

Mirror

Monitor Vector Analyzer Oscilloscope Atmospheric Package Holder MEMS Function Generator Vibrometer

Equipment for testing

Joystick Laser

Frequency Response Analysis

Device

Vin=Asin(wt)

Sweeping Wo Amax Device Vin=Asin(w0t) Disp t X’ X Vel t

2 4 6 8 10 12 14 16 18 20 500 1000 1500 2000 Frequency [Hz] A m plitude [m m /s]

Fix-Fix Lateral Tunneling Accelerometer

Results

Large Lateral Tunneling Accelerometer

Wo= natural frequency Amax

soi - 17 FFTA 5 Fr equency R esponse

• 0. 5

1

• 1. 5

2

• 2. 5

3

• 3. 5

4

• 4. 5

5 500 1000 1500 2000

Fr equency [ H z] V e lo c ity [m m /s ]

V=5 V=4

Di spl acem ent at f =3822 and Vsqr t =5

• 0. 2
• 0. 2
• 0. 4
• 0. 6
• 0. 8

1

• 1. 2
• 1. 4

500 1000 1500 2000 2500

Ti m e [ s]

Di s p l [ u m]

Amax

Summary

• Getting familiar with MEMS

Getting familiar with MEMS

• Understand Micromachining

Understand Micromachining process process

• Understand the dynamical

Understand the dynamical parameter of lateral tunneling parameter of lateral tunneling accelerometer accelerometer

• Work with High

Work with High-

• Tech

Tech equipment equipment

• Visit clean room

Visit clean room

• Visit the FIB room

Visit the FIB room

• Learn about the life of grad students

Learn about the life of grad students

• THE MOST EXCITING activity: participating in the micro

THE MOST EXCITING activity: participating in the micro-

• fabrication

fabrication

• f lateral tunneling accelerometer and their characterization!
• f lateral tunneling accelerometer and their characterization!

Acknowledgements

• Mentor: Laura Oropeza

Mentor: Laura Oropeza

• Advisor: Kimberly Turner

Advisor: Kimberly Turner

• People at Turner Lab

People at Turner Lab

• INSET: Trevor

INSET: Trevor Hirst Hirst, Dr. Arnold, Liu , Dr. Arnold, Liu-

• Yen

Yen kramer kramer, Mike Northern , Mike Northern

• AHC: Julie Niles, O

AHC: Julie Niles, O’ ’Connor, Mrs. Connor, Mrs. Wong Wong

• CNSI

CNSI

• UCSB

UCSB

• ICB

ICB