Semiconductor Fluorinated Gas Semiconductor Fluorinated Gas Control - - PowerPoint PPT Presentation

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Semiconductor Fluorinated Gas Semiconductor Fluorinated Gas Control - - PowerPoint PPT Presentation

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Semiconductor Fluorinated Gas Semiconductor Fluorinated Gas Control Concepts Control Concepts First Public Workshop California Air Resources Board Sacramento, CA January 10, 2008 1 Outline Outline Background Potential Options to

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First Public Workshop

California Air Resources Board Sacramento, CA January 10, 2008

Semiconductor Fluorinated Gas Semiconductor Fluorinated Gas Control Concepts Control Concepts

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Outline Outline

  • Background
  • Potential Options to Reduce Emissions
  • Future Activities
  • Comments
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Background

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California Global Warming California Global Warming Solutions Act of 2006 (AB32) Solutions Act of 2006 (AB32)

  • The California Global Warming Solutions Act of 2006

(AB32) requires ARB to identify and publish a list of discrete early action greenhouse gas emission reduction measures.

  • On October 25, 2007, the Board approved the

Semiconductor Perfluorocarbon (PFC) Emissions Reduction Strategy as a discrete early action measure.

  • This measure is scheduled to be adopted by the

Board, and become enforceable by January 1, 2010.

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Memorandums of Memorandums of Understanding Understanding

  • 1996 Memorandum of Understanding

with U.S. EPA

– Data gathering – Emission reduction efforts

  • 2001 Second MOU with U.S. EPA

– Reduce PFC emissions to 10% below 1995 level by 2010 – Three manufacturers in CA are currently participating

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Current Requirements Current Requirements

  • District VOC Rules

– Antelope Valley, Bay Area, Placer, San Diego, South Coast and Ventura County District

  • U.S. EPA

– National Emission Standards for Hazardous Air Pollutants

  • hydrochloric acid (HCl), hydrogen fluoride (HF),

methanol, glycol ethers, and xylene

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Potential Options to Reduce Emissions

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Fluorinated Gases In Use Fluorinated Gases In Use

23,900 n/a 8,700 11,700 6,500 7,000 9,200* 1996 100- Year IPCC GWP 22,800 SF6 Sulfur Hexafluoride 17,200 NF3 Nitrogen Trifluoride 10,300 C4F8 Octofluorocyclobutane 12,200 C2F6 Hexafluoroethane 14,800 CHF3 Trifluoromethane 7,390 CF4 Tetrafluoromethane 8,830 C3F8 Octofluoropropane 2006 100- Year IPCC GWP

Formula

Name

Also C4F8O and C4F6

*1 kg C2F6 = 9,200 kg CO2

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Fluorinated Gas Emission Sources Fluorinated Gas Emission Sources

  • Dry Etching

– Removes material at a finer level than wet etching can achieve (3 microns)

  • Chemical Vapor Deposition (CVD)

Chamber Cleaning

– Removes chemical deposits from chamber walls that may contaminate wafers

  • Others?
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Four Semiconductor Emission Four Semiconductor Emission Reduction Strategies Reduction Strategies

  • 1. Process Optimization

– Reduces the use of fluorinated gases by reducing flow rate

  • 2. Alternative Chemistries

– Substitute gases such as nitrogen trifluoride (NF3) for hexafluoroethane (C2F6) in the chamber cleaning process

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Four Semiconductor Emission Four Semiconductor Emission Reduction Strategies (continued) Reduction Strategies (continued)

  • 3. Emissions Abatement

– Commercially available technologies – Performance of abatement systems varies

  • 4. Recovery/Recycling

– More costly or require more maintenance than other measures – Recovered compounds contain impurities

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Recent Activities Recent Activities

  • Literature Research

– SIA White Paper – ISMI Report – 2006 IPCC Guidelines

  • Emissions Inventory Update
  • Fabrication Site Visits
  • Survey Development
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Survey in Progress Survey in Progress

  • Distributed last month

– CA Semiconductor Facilities – Wafer Production – Fluorinated Gas Usage by Process – Current Emissions Reduction Strategies

  • Due Date: February 15, 2008
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Future Activities

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Future Activities Future Activities

  • First Workshop: January 10, 2008
  • Second Workshop: April 2008
  • Third Workshop: July 2008
  • Board Hearing: December 11, 2008
  • Regulation effective: January 1, 2010
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Stakeholder Participation Stakeholder Participation

  • Evaluate control options
  • Form a working group
  • Individual meetings
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Reminder Reminder

  • Semiconductor website:

http://www.arb.ca.gov/cc/semiconductors/semicondu ctors.htm

  • Please sign up on the

semiconductor list serve by visiting the website:

http://www.arb.ca.gov/listserv/semiconductors.htm

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ARB Points of Contact ARB Points of Contact

Terrel Ferreira, Manager

tferreir@arb.ca.gov (916) 445-3526

Dale Trenschel, Lead

dtrensch@arb.ca.gov (916) 324-0208

Win Setiawan,

Staff Air Pollution Specialist wsetiawa@arb.ca.gov (916) 324-0337

Lynn Yeung,

Air Pollution Specialist lyeung@arb.ca.gov (916) 324-0201

Andrew Mrowka,

Air Resources Engineer amrowka@arb.ca.gov (916) 324-0330