PVMD Delft University of Technology Atomic layer deposition C 1. - - PowerPoint PPT Presentation

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PVMD Delft University of Technology Atomic layer deposition C 1. - - PowerPoint PPT Presentation

Jul 22, 2023 276 likes •371 views

Other TF deposition techniques part 3 Arno Smets PVMD Delft University of Technology Atomic layer deposition C 1. C Al C Al Al Al C Al C C C C Al C Al C C Al C C Al Al Al O O O O Substrate Heater Atomic layer

slide-1
SLIDE 1

PVMD

Delft University of Technology

Other TF deposition techniques part 3

Arno Smets

slide-2
SLIDE 2

Al Al Al

Atomic layer deposition

Substrate Heater

O O O O C

Al

C

Al

C

Al

C

Al

C C C C

Al

C

Al

C

Al

C C C Al

1.

slide-3
SLIDE 3

Al Al Al

Atomic layer deposition

Substrate Heater

O O O O C C C C

Al

C

Al

N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N

C C C Al

N N

1. 2.

slide-4
SLIDE 4

Al Al Al

Atomic layer deposition

Substrate Heater

O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O

C C C Al

N N O O

1. 2. 3.

slide-5
SLIDE 5

Al Al Al

Atomic layer deposition

Substrate Heater

O O O O

C C C Al

N N O O

O O O O O O O O O O O O O O O O O O N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N N

N N

1. 2. 3. 4.

slide-6
SLIDE 6

Spin coating

Substrate Solvent Target

slide-7
SLIDE 7

Spin coating

slide-8
SLIDE 8

Evaporation deposition

Metallic layers

Sputtering deposition

TCO’s Metallic layers Chalcogenides

Close space sublimation

Cadmium telluride

Chemical bath deposition

Cadmium sulphide Plasma enhanced CVD Silicon alloys Molecular beam epitaxy III-V alloys Metal-organic CVD III-V alloys Spin coating Organic PV Atomic layer deposition Ultra-thin, uniform layers