SLIDE 1
PVMD
Delft University of Technology
Close space sublimation
substrate Target Graphite block substrate heater lamps source heater lamps source thermocouple substrate thermocouple Graphite block
PVMD Delft University of Technology Close space sublimation - - PowerPoint PPT Presentation
PVMD Delft University of Technology Close space sublimation - - PowerPoint PPT Presentation
Other TF deposition techniques part 2 Arno Smets PVMD Delft University of Technology Close space sublimation substrate heater lamps Graphite block substrate thermocouple substrate Target source thermocouple Graphite block source heater
SLIDE 2
SLIDE 3
Chemical bath deposition
spinner hot plate pH probe temperature probe Substrates
SLIDE 4
Molecular beam epitaxy
RHEED gun RHEED screen Effusion cells Ionisation gauge Beam flow gauge Heater Liquid nitrogen Substrate
SLIDE 5
Metal-organic chemical vapour deposition
Ga(CH3)3
Al
C C C
As
N N
C C C Ga As
AsH3
N N N N
Al(CH3)3 In(CH3)3 PH3
N N
Al
C C
Al
C C C
As As
C
As
N N N N N N N N N N N N N N
Al
C C
Al
C
As
C C C N N N N N N N N
Al
C
Substrate Heater