[PPT] - New Developments in Silicon Detectors (at Max Planck Society PowerPoint Presentation

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Jelena Ninkovic

New Developments in Silicon Detectors

(at Max Planck Society Semiconductor Lab)

MPS Semiconductor Lab
Devices & Selected Applications

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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MPS Semiconductor Laboratory (in German: MPG Halbleiterlabor - HLL)

MPG HLL is the only lab worldwide doing fully depleted silicon radiation sensors with integrated electronics optimized for different scientific projects Located in the south-east of Munich on the Siemens Campus in Neuperlach 30 employees: scientists, engineers and technicians + guest scientists, engineers and students

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Inside HLL – Sensor Fabrication

cleaning thermal lithography inspection implantation

6” Si full processing line class 1000 to class 1 in certain areas

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Inside HLL – Sensor Fabrication

plasma and sputter Cu line flip chip assembly and test

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Inside HLL – Sensors and Systems: Design & Test

@ HLL: sensor design and fabrication interconnection system/camera design and test

Process simulation Device simulation, 2D and 3D State-of-the-art layout tools Wire bonding, hybrid assembly System test facilities Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Goal : High SNR

Decrease noise
Amplify signal

DEPFET (has both)

n+ contact (0V) p+ contact (-V) Avalanche multiplication Diode Sideward depletion structure First Amp stage in the sensor

τ A I q A C a π τ A C g kT α ENC

L tot f tot m 3 2 2 1 2

2 1 2   

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Devices @ HLL

Building blocks

Diodes Strip detectors Silicon drift detectors (SDD)

pnCCDs

MOSFETs JFETs

Devices

DEPFETs

p+ contact (0V) n contact (V)

SiMPl

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Entrance window engineering – application optimization

anti-reflective coating (ARC)

 sequence of dielectric layers deposited on the entrance window  variation of material and thickness  transmittance tuning to application needs

polymer passivation

 mechanical protection 

ptical coupling

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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pnCCDs

 definition of potential pockets by differently reverse-biased diodes  charge transport by periodic clocking of shift registers  column-parallel readout  high frame rate (5 msec @ 200 pixel)  integrated 1st FET (1 / column)  low noise (3el. ENC)  backside illuminated, fully depleted  high quantum efficiency Applications

X-ray imaging & spectroscopy
optical light imaging
format

~ cm² … wafer scale

thickness

450 µm

pixel size 36 … 150 µm

Proposed by Lothar Strüder et al., 1987 Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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pnCCDs for eROSITA

„ extended ROentgen Survey with an Imaging Telescope Array “

The main scientific goals are:

map out the large scale structure in the Universe for the study of cosmic structure evolution
Black Holes in nearby galaxies and many (up to 3 Million) new, distant active galactic nuclei and
physics of galactic X-ray source populations, like pre-main sequence stars, supernova remnants and X-ray binaries.

3cm x 3cm pnCCDs still on Si-Wafer. The pn CCDs have 384 × 384 pixels in both image and frame store area. Pixel size: 75 x 75 µm2. Frame time: 50 msec (20Hz)

(collaboration partner MP Extraterrestrial Physics)

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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eROSITA pnCCD-Module

Measurements at C Ka (277eV) and Mn Ka (5,9 keV) on flight- CCDs (2cm × 2cm) show the expected energy resolution and low energy response.

384 384

Shadow image of a 450 mm thick silicon baffle with an 55Fe source mounted directly in front of the sensor

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Small pixel pnCCD @ HLL

Motivation: development of a sensor for Fast Solar polarimetry (collaboration partner MP Solar System Research) Device characteristics:

pnCCD concept:
Backside illuminated,
frame store,
split frame,
column-parallel readout
Format: 1k x 1k storage, 2 x 1 k x 0.5 k framestore
Pixel size: 36 x 36 mm2
Total sensitive area: 36.8 x 73.3 mm2
Total chip size: 4.2 x 8.1 cm2
Optimized for optical wavelength using ARC
Operating temperature: -35°C (target)
Target operating frame rate: 400 Hz (~4 ms /row)
Data rate: 840 Mbyte / s (16 bit)

Compact vacuum-tight camera housing ~ 18 x 25 x 10cm 3

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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FEL radiation detection

Synchrotron light from the National Synchrotron Light Source (NSLS), Brookhaven

Sensors for LCLS (collaboration partner MP Extraterrestrial Physics)

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Requirements of the LCLS

LCLS pnCCD single photon resolution yes yes energy range 0.05 < E < 24 (keV) 0.05 < E < 25 [keV] pixel size (µm) 100 75 (150) sig.rate/pixel/bunch 103 (105) 104 quantum efficiency > 0.8 > 0.8 from 0.3 to 12 keV number of pixels 512 x 512 (min.) 1024 x 1024 frame rate/repetition rate 10 Hz - 120 Hz up to 250 Hz Readout noise < 150 e- (rms) < 30 e- (rms) (2 e- possible) cooling possible

20o C optimum

room temperature possible vacuum compatibility yes yes preprocessing no (yes) ? possible upon request

Requirements in FEL radiation applications

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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 Large area pnCCDs: 30 cm2  1024 x 512 pixel of 75 x 75 mm2  3.7 x 7.8 cm2

Large area pnCCDs

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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DEPFETs

p-MOSFET on fully depleted n-substrate

fully depleted sensitive volume
fast signal rise time (~ns), small cluster size
no stitching, 100% fill factor
Charge collection in "off" state, read out on demand
potentially low power device
Non destructive readout
internal amplification
charge-to-current conversion (300 pA/el.)
large signal, even for thin devices
r/o cap. independent of sensor thickness (20 fF)

Applications:

unit cell of active pixel sensor
integrated readout device of SDD, pnCCD, …

Proposed by Josef Kemmer & Gerhard Lutz, 1987 Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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DEPFET classes

Low noise: Spectroscopic X-Ray imaging

pixel size: 100µm, with drift rings several 100s of µm
read out time per row: few µs
Noise: ≈4 el ENC
fully depleted, the thicker the better  large QE for higher E

High Dynamic range

DEPFET Sensor with Signal Compression
Sensitivity to single photons and high dynamic range
pixel size: ~200 µm
hybrid sensor : 1-to-1 bonded to readout chip

Thin & small pixel: vertex, low E electron detectors (TEM)

pixel size: 20µm…75µm
read out time per row: 25ns-100ns
Noise: ≈100 el ENC
thin detectors: 50µm…75µm  still large signal: 40nA/µm for MIP

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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DEPFET detectors

DEPFET readout

 readout sequence

Double sampling
1st measurement: signal + baseline
clear: removal of signal charges
2nd measurement: baseline
difference = signal
Single sampling
Measure pedestals and store
Read once and clear

 active pixel sensor operation

horizontal supply lines, row selection
vertical signal lines
1 active row, other pixels integrating

Amplifier/ digitizer

Rolling shutter read out

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Projects using DEPFETs developed and fabricated @ MPG HLL

Vertex detectors for high energy physics experiments
X-ray fluorescence spectrometer for MIXS on BepiColombo
X-ray imaging spectroscopy - ATHENA mission – Wide Field Imager (WFI)
FEL radiation detection – sensors for European XFEL
Electron Detectors - 80k low E electron detectors

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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BELLE II @ SuperKEKB

e--: 7 GeV, 2.3 A

Belle II

e+: 4 GeV, 4 A

electron (7GeV) positron (4GeV)

Vertex Detector 2 layers DEPFET + 4 layers DSSD

Vertex Detector upgrade DEPFETs are chosen for the inner layers To be developed by the DEPFET collaboration

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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DEPFETs for BELLE II vertexing - Module

All silicon module

Inner layer Outer layer # ladders 8 12

Sens. length

90mm 123mm Radius 1.4cm 2.2cm Pixel size 50x50 μm2 50x75 μm2 # pixels 1600(z)x250(R-ɸ) Thickness 75 μm Frame/row rate 50 kHz/10 MHz

Requirements:

Single point resolution ~10 μm
Radiation

~20 Mrad (10 years)

Material budget

0.2 % X0/layer

Frame time

20 μs DCDB & SWB developed by UNI Heidelberg DHP developed by UNI Bonn

Z. Drasal

Low mass vertex detectors MCMs with highest possible integration!  Thin sensor area  EOS for r/o ASICs  Thin (perforated) frame with steering ASICs

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Thin DEPFETs for BELLE II PXD

Process backside e.g. structured implant

sensor wafer sensor wafer handle wafer handle wafer

Wafer bonding SOI process Thinning of top wafer (CMP) Processing etching of handle wafer (structured)

50mm Si

Thin (50µm-75µm) self-supporting all silicon module

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Future all silicon modules - Integrated micro-channels

The SOI appr proach: ch: thin inne ned d all-sil ilic icon n modul dule with th integ

eg. coolin

ing

most heat generated by read-out ASICs
idea: integrate channels into handle wafer beneath the ASICs
make use of the thick handle wafer at the end-of-module
channels etched before wafer bonding  cavity SOI (C-SOI)
full processing on C-SOI, thinning of sensitive area
micro-channels accessible only after cutting (laser)

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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X-ray fluorescence spectroscopy: MIXS on BepiColombo

Mercury composite spacecraft (MCS) MIXS - First Imaging X-ray spectrometer for planetary X-ray fluorescence

 Format  1.92 x 1.92 cm2  64 x 64 pixels  300 x 300 mm2 pixel size  Energy resolution  200 eV FWHM @ 1 keV  QE > of 80 % @ 500 eV  Time resolution  < 1 ms due to dynamics  Radiation hardness  ~ 20 krad ionizing  3 x 1010 10 MeV p/cm2  equivalent to 1.11 x 1011 1 MeV n/cm2

DEPFET Macropixel Matrix

Mercury surface as seem by Mariner 10

is the first planetary XRF instrument using a high performance

imaging optics, not just a collimator. Much better spatial resolution! Look inside craters, identify more features!

is the first planetary XRF instrument using an energy dispersive

solid-state detector with excellent energy resolution and low energy threshold. Allows to observe the important lines of Iron, Silicon, Magnesium

etc. directly!

(collaboration partner MP Solar System Research)

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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MIXS hybrid

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Fully assembled Qualification Model

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Measurements

Shadow image of a 450 mm thick silicon baffle with an 55Fe source mounted directly in front of the sensor Operating conditions

40 °C

Trow = 5.2 ms Tframe = 167 ms / frame Framerate ~ 6 kfps Ipixel = 125 mA

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Spectral performance

55Fe source
singles: FWHM = 124.8 eV @ 5.9keV
T  -85°C
415 µs/frame

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Misfits

Events arriving during signal processing time cause “negative” and “positive” background in signal

(Misfits)

Negative signals are easy to be tagged
Positive signals cause irreducible background
Spectral shape corresponds to the negative misfit background mirrored at the zero peak

Example for negative misfit background in raw data spectrum (no splits recovered) for CAMEX Misfits Zero Peak Signals

Fraction of misfits only depends on

ratio between readout time and integration time

Worse for higher degree of

parallelization

Worst case is fully parallel readout

(hybrid pixel sensor)

How to avoid?

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Solutions for Misfits

Gated PIX (GPIX)

Very effective!
Drawback: Deadtime!
Superpixel composed of two subpixels
One subpixel is sensitive. i.e. collects charge from

bulk

The second one is insensitive, i.e. keeps charge

already collected, but no new charge will be added, as it is collected by sensitive subpixel

Only insensitive pixel can be read out
Shielding is achieved by deviating potentials
Most simple solution: switching the drain potentials
f subpixels

InfiniPIX

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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ATHENA mission – Wide Field Imager (WFI)

~ 15-17cm Athena (the Advanced Telescope for High-Energy Astrophysics), has been proposed as ESA's next-generation X-ray astronomy observatory (Launch slot 2028). To address two key questions in modern astrophysics:

How does ordinary matter form the large-scale structures that we see today?
How do black holes grow and shape the Universe?

(collaboration partner MP Extraterrestrial Physics)

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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ATHENA mission – Wide Field Imager (WFI)

Central chip: fast timing and high count rate capability Idea: use infinipix like DEPFET matrix

First prototypes Infinipix DEPFET

>shutter speed < 200ns
>charge suppression < 5∗10−4
>charge handling ≈23500𝑓 (≈85𝑙𝑓𝑊)

Jelena Ninkovic, MPG HLL

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Requirements for the XFEL detectors

XFEL (e.g. XPCS) DEPFET array system single photon resolution yes yes energy range 0.5< E < 24 (keV) 0.5 < E < 25 [keV]

ang. resolution or pixel size

4 µrad 200 µm sig.rate/pixel/bunch 103 103@10KeV quantum efficiency > 0.8 > 0.8 from 0.3 to 12 keV number of pixels 512 x 512 (min.) 1024 x 1024 frame rate/repetition rate 10 Hz yes, triggerable XFEL burst mode 5 MHz (3.000 bunches) 4.5 MHz Readout noise < 150 e- (rms) < 50 e- (rms) cooling possible

20o C optimum,

room temperature possible vacuum compatibility yes yes preprocessing no (yes) ? possible upon request 4-side buttability yes yes

Integrating Area Detector

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Detector Concept – DEPFET with signal compression

The internal gate extends into the region below the source Small signals assemble below the channel, being fully effective in steering the transistor current Large signals spill over into the region below the source. They are less effective in steering the transistor current. 200 x 200 mm pixel has been designed and produced

DSSC - DEPFET Sensor with Signal Compression

Jelena Ninkovic, MPG HLL

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source drain gate Internal gate

time time

Charge into internal gate Drain current A constant charge is injected at fixed time intervals and the internal gate regions are progressively filled In the experiment the charge is deposited at once but the DEPFET response is the same

Detector Concept – Working principle

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Focal Plane

Multi Chip Modules

 DEPFET Sensor bump bonded to Readout ASICs  Optional Heat spreader  Flex Hybrid with passive components and auxiliary ASICs (e.g. voltage regulators)  Sensor (512x128 pixels) 2.56x10.24 cm2  16 readout ASICs (64x64)  Dead area: 10-15%

21 cm

detector module (512 x 512) Monolithic detector subunit (128 x 512)

Submodule 128x512 Sensor development by MPG HLL System development by DSSC collaboration 2.8 cm

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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DEPFETs for low E electron detectors

Goal: develop high speed direct hit low energy electron detector Solution: thin, nonlinear DEPFETs with 80kHz frame rate

1Mpix, 60μm DEPFET pixel, 4 quadrants, 6x6 cm² sensitive
50μm thin sensitive area
Bidirectional 4-fold read out, frame rate: 80kHz
memory to store ~100 frames

(collaboration partner MP Structural Dynamics)

Jelena Ninkovic, MPG HLL

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SNR improvements

Amplify signal

n+ contact (0V) p+ contact (-V)

Avalanche Photodiode

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Silicon photomultiplier

Silicon photomultiplier Avalanche photodiode

Operating voltage: «100 V Gain: 105 up to 107 dependence of Gain on Temp.: 0.5% dG/dT

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Silicon photomultiplier

Silicon photomultiplier Avalanche photodiode

n+ p+ n- non-depleted region n- non-depleted region n- depleted gap region n high field

Conventional SiPMs SiMPl concept

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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SiPM cell components  SiMPl approach

n+ p+

n- non-depleted region n- non-depleted region n- depleted gap region

n high field

AD RQ CD CC Vbias

Sensor wafer Handle wafer

SOI wafers

Jelena Ninkovic, MPG HLL

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Prototype production

High homogeneity over big distances! 6 100 cells arrays placed over 6mm distance

High linearity!

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Avalanche Efficiency (1 mm high field region) 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 250000 350000 450000 550000 650000 750000 Field (V/cm) Efficiency Electrons Holes

Detection of particles

Reduction of dark rate and cross talk by order of magnitude

Detection of particles:

High gain in the sensor
Excellent time stamping due to avalanche process (sub-ns)
Minimum ionizing particles generate about 80 e-h-pairs/µm
No need for high trigger efficiency

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Next generation SiMPl devices - DSiPMl – collaboration with DESY

Sensor @ MPG HLL:

Topologically flat surface
High fill factor
Adjustable resistor value

Low RC -> very fast

Single pixel readout
Position sensitivity

ASIC @ DESY:

Active recharge
Ability to turn off noisy pixels
Fast timing
Pitch limited by the bump bonding
Position resolving signal processing

Individual cell electronics, Logic, TDC, Photon counter

+

Individual cell electronics, Logic, TDC, Photon counter

Ultra fast particle tracker - High energy physics application Ultra fast single photon sensitive imager – Photon science

Possible applications:

Future trackers at colliders
Detectors for hadron therapies
X ray detectors
PET detectors
Adaptive optic sensors

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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Summary

I showed :

Some very attractive devices developed and

produced at MPS Semiconductor Laboratory pnCCDs, DEPFETs , SiMPl …

Some of the potentials of those devices are

used in current projects

Still space to explore much more …

Thank you for your attention …

Jelena Ninkovic, MPG HLL

53. International Winter Meeting on Nuclear Physics, Bormio 2015

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