MEMS-Based Resonators and Oscillators are Now Replacing Quartz - - PowerPoint PPT Presentation

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MEMS-Based Resonators and Oscillators are Now Replacing Quartz - - PowerPoint PPT Presentation

Jan 24, 2024 210 likes •399 views

MEMS-Based Resonators and Oscillators are Now Replacing Quartz Dr. Aaron Partridge SiTime Corp. ISSCC February 20, 2012 My purpose is to convince you that MEMS timing is here now. MEMS will r eplace quar t z oscillat or s in m ost

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MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • Dr. Aaron Partridge

SiTime Corp. ISSCC February 20, 2012

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Aaron Partridge 2 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

My purpose is to convince you that MEMS timing is here now. MEMS will r eplace quar t z oscillat or s in m ost

  • applications. The value add is strong

enough t o t r ansfor m an indust r y .

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Aaron Partridge 3 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Quartz Oscillators:

  • Ceramic/ metal package
  • Quartz plate and driver

circuit

  • Dedicated factories

MEMS Oscillators:

  • Plastic QFN package
  • Silicon MEMS die and

CMOS die

  • Standard IC fabs

Ecliptek

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Aaron Partridge 4 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • Like a 2D bell – held in the center with its outer

edges ringing. Motion is a few nanometers.

  • Buried inside the chip, not on the surface.

Edge Corner Center

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Aaron Partridge 5 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • kHz MEMS tuning forks for apps now served by

32kHz quartz tuning forks.

  • Driven with sub-microamp supply currents.
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Aaron Partridge 6 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Encapsulation Resonator Chip Surface

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Aaron Partridge 7 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

CMOS Circuits MEMS Resonator GND Prog &OE Vcc Clk Config PROM Control I/O Regs Frac PLL Sustaining Amp Dvr Temp Sensor

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Aaron Partridge 8 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

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Aaron Partridge 9 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • Tremendous Flexibility
  • New features
  • Delivered performance
  • Short lead times
  • Exceptional quality and reliability
  • Low cost, high value
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Aaron Partridge 10 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

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Aaron Partridge 11 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • 40
  • 20

20 40 60 80

  • 2.5
  • 2
  • 1.5
  • 1
  • 0.5

0.5 1 1.5 2 2.5 TCXO Frequency v. Temperature Temperature (degC) Frequency Variation (ppm)

  • 50 to +90C

1977 units, 5 lots ± 2.5pp m

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Aaron Partridge 12 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

12k-20MHz

  • 125dBc/rtHz
  • 152dBc/rtHz

fcarrier = 156.25MHz Int jitter (12k-20MHz)

  • no spurs = 493fs
  • w/ spurs = 689fs
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Aaron Partridge 13 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Vibration Induced Spur vs. Acceleration

  • 120
  • 100
  • 80
  • 60
  • 40
  • 20

10 20 30 40 50 Vibration Acceleration (g) Vibratiion Spur Value (dBc)

Competitive

  • S. MEMS

fvibration = 100Hz

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Aaron Partridge 14 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Phase Jitter Without and With EMI Interference 5.9 1.6 0.7 21.3 0.5 0.5 1.6 0.8 0.0 5.0 10.0 15.0 20.0 25.0 No Interference Interference Int Phase Jitter (ps, 12k-20MHz)

Competitive

  • S. MEMS

Problematic for electrostatic discharge

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Aaron Partridge 15 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Unit Shipments

10 20 30 40 50 60 2007 2008 2009 2010 2011 Year Units (MU Recognized)

4 of the top 5 Computer Makers 3 of the top 5 Consum er Electronics 3 of the top 5 Contract Manufacturers 5 of the top 5 ODMs

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Aaron Partridge 16 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

  • Technology has

fundamentally helped Humanity.

  • Engineers make sm all

contributions that are multiplied countless times.

  • What you do matters

to Billions of people!

Dorothea Lang, “Migrant Mother” 1936

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Aaron Partridge 17 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Thank You

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Aaron Partridge 18 of 16 MEMS-Based Resonators and Oscillators are Now Replacing Quartz

Abstract

The first commercial MEMS-based tim ing devices shipped in

  • 2007. In just five years they are transform ing the timing
  • industry. The first parts offered XO stability and various

advantages like programmability, but lacked the signal quality to support more than the basic applications. Recent parts are dramatically improved, offering TCXO stability, sub- picosecond integrated jitter, high frequency differential

  • utputs, low phase noise for RF applications, low power for

portable applications, and ultra low power for real time clock

  • applications. Production rates are increasing exponentially

with over 50 million units sold as of June 2011. How does this stuff work? Where will the technology go? Will MEMS replace quartz? What will MEMS timing do for the electronics industry? What will MEMS tim ing do for Humanity?