M7: 7: Ext xtreme reme ult ltraviolet raviolet (E (EUV) ) li - - PowerPoint PPT Presentation

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M7: 7: Ext xtreme reme ult ltraviolet raviolet (E (EUV) ) li ligh ght t source urce

Denis Rudolf, Jan Bußmann, Larissa Juschkin

RWTH Aachen University, Experimental Physics of EUV, Steinbachstraße 15, 52074 Aachen, Germany

Forschungszentrum Jülich GmbH, Peter Grünberg Institut (PGI-9), JARA-FIT, 52425 Jülich, Germany

RWTH, April 15th 2015

• 22. April 2015

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Ou Outlin line

 Extreme ultraviolet (EUV) radiation: applications, light sources  EUV group @ Research Center Jülich (Prof. Larissa Juschkin)  Lab course for master students

• 22. April 2015

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EU EUV and soft X-ray ray radiatio ation

• T. Popmintchev et al., Science 336

336, 1287 (2012)

Absorption edges of almost every chemical element!

• 22. April 2015

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Image of the sun at 17.1 nm (Fe +8 ions) (Solar Dynamics Observatory)

http://sdo.gsfc.nasa.gov/data/

EU EUV and soft X-ray ray radiatio ation

• 22. April 2015

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Applica ications ions of

• f EU

EUV and soft X-ray ray radiati iation

• n

Spectroscopy Microscopy

• M. Benk et al., Optics Letters 33

33, 2359 (2008)

2.88 nm wavelength

Diatom (algae) Latex spheres

• M. Banyay et al.,
• J. Vac. Sci. Technol. A 30

30, 041506 (2012)

• 22. April 2015

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• C. Wagner, and N. Harned, Nature Photonics 4, 24 (2010)

EUV lithography of integrated circuits at 13.5 nm wavelength

Applica ications ions of EU EUV and soft X-ray ray radiati iation

• n

• 22. April 2015

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EU EUV and soft X-ray ray ligh ght sources rces

Large scale Laboratory-based

• Synchrotron
• Free-Electron

Laser polarized Laser High Harmonics

• X-Ray/EUV Laser
• X-Ray Tube
• Laser-/Discharge-

Produced Plasma unpolarized, yet intense

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• EUV emission from multiply ionized atoms, e.g. Xe X
• Narrow-bandwidth spectral lines (ΔE/E=10-3-10-4, E: photon energy)
• High power, e.g. 1015 – 1016 photons/(s sr) for O VI line at 71.8 eV
• Repetition rate scalable to several kHz depending on gas

Gas-discharge discharge EU EUV ligh ght source ce

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Gas-discharge discharge EU EUV ligh ght source ce

Oxygen/nitrogen

• 22. April 2015

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EU EUV gr group at the he Research earch Ce Center ter Jü Jülich ich

Recorded pattern Reconstruction in Fourier space Reconstruction in real space

Coherent diffractive imaging

• 22. April 2015

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EU EUV gr group at the he Research earch Ce Center ter Jü Jülich ich

Photoemission spectro-microscopy

Ge-Sb-Te sample

• 22. April 2015

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Lab b co course urse

Spectral measurements using an EUV spectrometer

• 22. April 2015

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Lab b co course urse

Multilayer Bragg mirror

Spectral measurements behind a Bragg mirror

Experimental setup 𝑜 ∙ 𝜇 = 2𝑒 ∙ sin(90° − 𝜄)

• 22. April 2015

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Lab b co course urse

Measurement of the energy-per-pulse and solid angle

• O. Rosier, PhD thesis (2004)

• 22. April 2015

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Lab b co course urse

 This experiment takes place at the Research Center Jülich!  Meeting point at 9 am on Wednesdays: room 217, building 2.12  You need a personal ID Card to enter Research Center Jülich  Contact: Denis Rudolf (d.rudolf@fz-juelich.de) Jan Bußmann (j.bussmann@fz-juelich.de)

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Thank you for your attention! Questions?