FAME M2 semester in Grenoble Materials for Microelectronics and - - PowerPoint PPT Presentation

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May 11, 2023 387 likes •544 views

FAME M2 semester in Grenoble Materials for Microelectronics and Microsystems Coordinators : Fabien VOLPI Annie ANTONI Eirini SARIGIANNIDOU http://www.fame-master.com Grenoble : everyday life Grenoble, a city surrounded by

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http://www.fame-master.com

FAME M2 semester in Grenoble « Materials for Microelectronics and Microsystems »

Coordinators : Fabien VOLPI Annie ANTONI Eirini SARIGIANNIDOU

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Grenoble : everyday life

Grenoble, a city surrounded by mountains… … and ranked as one of the nicest French cities for studying in France… ~ 60 000 students

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http://www.fame-master.com

Development of Micro- and Nano-technologies

MINATEC (Grenoble-INP, UJF, CEA-Grenoble)
Minalogic “Pole de Compétitivité”
ESRF / ILL
STMicroelectronics, SOITEC,…

Grenoble : scientific environment

Development of Photovoltaic

INES CEA-Chambéry
Photowatt,…

« Microtechnologies » key words

Thin film science and technology
Clean-concept
Surface functionalisation / Biotechnologies

35th worldwide on Material Science

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The Micro-world for beginners

Bulk silicon

(STMicroelectronics/SIMAP) (WACKER)

Fabrication of small-scale systems

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FAME M2 in Grenoble

Master 2 – First semester

Process flow for microelectronics
Material and Process selection
Packaging
Simulation at small scales (Finite Element Modelling)
Practical Works
Laboratory project

Multiphysics applied to Materials at small scales Closely connected to academic research and industrial issues Lectures / Long term projects Written exams / Oral presentations - Reports

Master 2 – Second semester

6-month Master thesis

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Master 2

Process flow for microelectronics

CIME-PTA

ALTIS Semiconductor

FAME M2 Courses

 Lectures

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FAME M2 Courses

Master 2

Practical Works (Clean Room, etc)

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http://www.fame-master.com STMicroelectronics

Contact Etch Stop Layer

Replacement of Si3N4 as Contact Etch Stop Layer (STMicroelectronics)

FAME M2 Courses

Passivating graphite in harsh environment (ACERDE) Architectured substrates for solar cells (SIMAP)

Master 2

Material and Process selection

 Lectures + Industrial Project

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FAME M2 Courses

Master 2

Packaging

 Lectures

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Complete simulation of an AFM cantilever in contact with a surface

FAME M2 Courses

Cracking force and depth : Experimental : 60mN / 11nm Modelling : 54mN / 14nl

Master 2

Simulation at small scales (Finite Element Modelling or ab-inition or molecular

……)

Nanoindentation test on alumina films

 Lectures + Project

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FAME M2 Courses

Master 2

Laboratory project

Simulation in entangled materials Cerium Gadolinium Oxide (CGO) Electrolytes by Spray Pyrolysis

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http://www.fame-master.com

FAME M2 Courses

Master 2 – First semester

Process flow for microelectronics

Written exam

Material and Process selection

Report + Oral pres.

Packaging

Written exam

Simulation at small scales (FEM)

Report + Oral pres.

Practical Works

Report

Laboratory project

Report

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And others…

Local laboratories Local companies Key-words Materials and Processes for Microtechnologies and Energy Conception, Modelisation, Elaboration, Caracterisation Strong coupling with industry and academic research

And others…

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Fabien VOLPI fabien.volpi@grenoble-inp.fr Tel : 0033 4.76.82.66.13

Contact

FAME M2 Annie ANTONI annie.antoni@grenoble-inp.fr Tel : 0033 4.76.82.67.47 FAME M1 Eirini SARIGIANNIDOU Eirini.Sarigiannidou@grenoble-inp.fr Tel : 0033 4.56.52.93.33 FAME

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Thank you for your attention