f Fermilab SRF Cavity Processing for SRF Cavity Processing for - - PowerPoint PPT Presentation

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f Fermilab SRF Cavity Processing for SRF Cavity Processing for - - PowerPoint PPT Presentation

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f Fermilab SRF Cavity Processing for SRF Cavity Processing for Project X and ILC R& D Allan Rowe Allan Rowe f Outline Outline Fermilab Cavity processing program overview Lab processing facilities, recent accomplishments and

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SRF Cavity Processing for SRF Cavity Processing for Project X and ILC R& D

Allan Rowe Allan Rowe

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Outline Outline

  • Cavity processing program overview
  • Lab processing facilities, recent accomplishments and

p g , p upgrade plans.

  • Processing requirements for Project X and ILC R&D.
  • Processing requirements for Project X production
  • Processing requirements for Project X production.
  • Planned processing recipes for production.
  • ARRA--EP Industrialization and Eco-friendly processing

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 2

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Cavity Processing Program Cavity Processing Program

  • There are two missions to serve:

– Prepare for Project X cavity production—i.e. increase lab-based capacity and industrialize as much processing as is practical to ensure high yield. – R&D and process improvement reach ILC goals

  • These missions intersect across facilities,

schedules and people. Both missions overlap significantly

  • Both missions overlap significantly.

– High yield throughput – Gradient improvement – Process simplification – Process modification – Alternative technologies Alternative technologies

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 3

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S0 Processing Cycle - S0 Processing Cycle - Vert. Test

  • ert. Test

Process Step Required Tool

Clean & Degrease Ultrasonic Tank + UPW Clean & Degrease Ultrasonic Tank + UPW Outside BCP (20um) BCP Tool Bulk Electropolish (120 um) EP Tool Ultrasonically Clean Ultrasonic Tank + UPW Hydrogen Degasification Vacuum Oven (800C) RF Tuning Tuning Machine

FAILURE MODES

US Clean + Light EP (20 um) EP Tool + US Tank + UPW Alcohol Rinse + US Clean Ultrasonic Tank + UPW High Pressure Rinse HPR Tool + UPW

Quench!

High Pressure Rinse HPR Tool + UPW Clean Assem. & Evacuation Vacuum Skid + Class 10 Low Temperature Bake Vacuum Oven (120C)

FE!

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 4

Vertical Test

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Processing Cycle – Processing Cycle – Horiz. Test

  • riz. Test

Process Step Required Tool Process Step Required Tool

Helium Vessel Welding EB/TIG Welder Ultrasonically Clean Ultrasonic Tank + UPW

FAILURE MODES

y Light BCP or EP (20um) BCP or EP Tool Alcohol Rinse + US Clean Ultrasonic Tank + UPW

Quench!

High Pressure Rinse HPR Tool + UPW Clean Assem. & Evacuation Vacuum Skid + Class 10 cleanroom

FE!

cleanroom Horizontal Test or String Assembly

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 5

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JLab Processing & Facilities JLab Processing & Facilities

  • Full complement of

tools tools

– EP, BCP, HPR, Vacuum

  • ven, UPW, etc.

P d ti d

  • Production ready

– Capacity 40 EP-VT/yr

  • Upgrade requests

JLab EP Tool

  • Upgrade requests

– HPR System – UPW System – EP Tool spares – Next gen. EP technology (VEP) – VTA improvements

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 6

JLab HPR & BCP Tools

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JLab Processing & Facilities JLab Processing & Facilities

  • FY09 pace of 30 EP/30 VT cycles—16 thus far
  • Vetting cavity vendors and improving procedures
  • FY10 will continue throughput and upgrade tools

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 7

co t ue t

  • ug put a d upg ade too s
  • Info. from: R. Geng, B. Rimmer, Jefferson Lab
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Cornell Processing & Facilities Cornell Processing & Facilities

  • Growing collaboration

with FNAL

  • Specific efforts

– 2nd sound instrumentation instrumentation – Vertical EP

  • Vertical EP Tech.

f i d transfer to industry. (AES)

  • R&D capacity is 12

R&D capacity is 12 EP-VT cycles/year.

  • May repair pitted

Cornell 2nd sound Cornell vertical

cavities with tumbling

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 8

Provided by: Z. Conway, Cornell University

setup. EP tool.

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ANL/FNAL Proc. & Facilities ANL/FNAL Proc. & Facilities

  • Operational Tools

– EP for 1 and 9 cell EP for 1 and 9 cell – HPR – UPW + US Cleaning – Vacuum system – Clean assembly

SCSPF EP Tool and S. Gerbick

  • 1-cell Program

– Proven operational – FE free processing – >40MV/m, high Q US vendor verif – US vendor verif.

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 9

Cleanroom tooling. G. Wu with US tank & hoist.

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ANL/FNAL Proc. & Facilities ANL/FNAL Proc. & Facilities

  • 1-cell work—Great!

– Most tested w/o FE

  • 9-cell commissioning

*still FE issues*

Improvement plans – Improvement plans underway

  • Current capacity

– 30 9-cell cavities/yr – 20 1-cell cavities/yr

  • Upgrade capacity

Upgrade capacity

– 80 9-cell cavities/yr – 20 1-cell cavities/yr Add 3 t t – Add 3 operators to reach capacity.

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 10 10

  • D. Bice with cavity cart and HPR tool.
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ANL/FNAL Proc. & Facilities ANL/FNAL Proc. & Facilities

Plans for Upgrades and FY10 Goals

  • Purchase with ARRA funds—800C vacuum oven
  • Purchase with ARRA funds—800C vacuum oven
  • Purchase 1-2 more 120C baking systems
  • Purchase critical items to improve redundancy at

p y ANL/FNAL SCSPF

  • Identify & Train 3 more full-time operators
  • Achieve 6-8 EP/HPR cycles/month
  • Longer term plans

Flash EP/BCP fully dressed cavities – Flash EP/BCP fully dressed cavities – Commission 2nd HPR and assembly area in ANL cleanroom C i i ICPA f 1 ll P b 2011 – Commission ICPA for 1-cell Program by 2011 (L. Cooley Talk)

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 11 11

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Facility Polishing Capacities Facility Polishing Capacities

JLab Cornell ANL/FNAL FNAL ICPA Total ICPA

Current 1-cell Throughput 20/year 30+/year (2011) 50/year

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Current 9-cell EP-VT Throughput 40/year 12/year(1) 30/year 82/year Maximum Production EP/VT Th h t 100/year(2) 100/year(2) 200/year Throughput

(1)Cornell to remain R&D only (2)JLab & ANL/FNAL capacity assumes an operating staff increase of 2-3 at each facility f t l l

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 12 12

from current levels

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R&D Processes -- R&D Processes -- Project X + ILC Project X + ILC

R&D Processing: Years 2009-2012

Cavity type Polishing Processes Cavities Polishing Cycles VT (HT) Cycles 1 Cell 1.3 GHz, β 1 EP, CMP, ALD BP BCP 50 90(EP) 125 β=1 ALD, BP, BCP 50 90(EP) 125 9 Cell 1.3 GHz, β=1 EP, CMP, ALD, BP 88 230(EP) 130(70) SSR, TSR BCP, EP 8 24 12 (8)

EP= Electropolishing CMP Ch i l M h i l P li hi CMP= Chemical Mechanical Polishing ALD= Atomic Layer Deposition BP= Barrel Polishing BCP= Buffered Chemical Polishing

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 13 13

BCP= Buffered Chemical Polishing

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R&D Processing & Testing Plan R&D Processing & Testing Plan

R&D EP/BCP Cycles

1-cell 9-cell SSR/TSR

100 120 140 20 40 60 80 20 2009 2010 2011 2012

  • Chart shows anticipated totals
  • Chart shows anticipated totals.
  • Industrial effort may increase both 1-cell and 9-cell

polishing cycles. SSR/TSR li hi f d i ANL G150 f ilit

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 14 14

  • SSR/TSR polishing performed in ANL G150 facility.
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R&D Processing & Testing Plan R&D Processing & Testing Plan

100

Vertical Test Cycles

1-cell 9-cell SSR/TSR

30

9-Cell Horizontal Test Cycles

60 80 100 15 20 25 20 40 5 10 2009 2010 2011 2012 2009 2010 2011 2012

  • Throughput estimates are based on facility capacity and

g p y p y anticipated personnel and cavity availability.

  • Approx. 50% of 9-cell cavities to be horizontally tested.
  • SSR/TSR tested in separate HINS facility

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 15 15

SSR/TSR tested in separate HINS facility

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Project X Production Project X Production

Cavity type Installed Cavities Production Cavities

9 Cell 1.3 GHz, β=1 304 340 9 Cell 9 Cell 1.3 GHz, β=0.81 64 70 SSR1 18 18 SSR2 33 38 TSR 42 49 TOTAL 461 520 TOTAL 461 520

  • Production Years: 2013-2015
  • Extra cavities are due to yield and 10% spares

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 16 16

Extra cavities are due to yield and 10% spares

  • Some spares from R&D program
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Yearly Production Processing Yearly Production Processing

Cavity Bulk EP BCP Light EP Light BCP Vertical Horizontal

Production Years 2013-2015

Cavity type Cycles Industry Cycles Industry Cycles Labs BCP Cycles Labs Vertical Tests Horizontal Tests

9 Cell 140 140 170

(eliminated)

155 50 SSR1, SSR2, TSR* 35* 75* 40* 20* TOTAL

(minimum)

140 175 170 75* 195 70

  • Assumed cavity yield at 25 MV/m = 90% through HT

Assumed cavity yield at 25 MV/m 90% through HT

  • Industry must perform bulk EP and outside BCP
  • ANL/FNAL + JLab can perform light EP for VT
  • Flash BCP post Ti vessel welding may be eliminated

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 17 17

  • Flash BCP post Ti vessel welding may be eliminated

*SSR/TSR cavity recipes and test areas not yet defined

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Capacity Improvement Capacity Improvement

Eliminated Step Savings Possible Alternative Recipes p g

Outside Surface BCP 140 Industry procedures/year Flash BCP (1.3 GHz Only)

  • Cavity inner surfaces

150 Lab Flash BCP procedures/year Cavity inner surfaces isolated during welding procedures/year

  • JLab has eliminated outside BCP with success
  • JLab has eliminated outside BCP with success.
  • Polishing prior to horizontal test exists due to

potential inner surface contamination during h li l ldi Th f li i t th helium vessel welding. Therefore, eliminate the possibility of contamination by optimizing the Ti vessel welding procedure.

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 18 18

g p

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Industrialization Industrialization

Optimized Industrial Recipe Industrial Processes Lab Processes

1 Clean & Degrease 12 US Clean 2 Bulk polish (EP/BP) 13 High Pressure Rinse 3 Ult i ll Cl 14 Cl A F VT 3 Ultrasonically Clean 14 Clean Assem. For VT 4 Hydrogen Degasification Bake 15

  • Vert. Test

5 RF Tuning 16

  • Horz. Test (1/3 of total)

6 US Clean Lab Reprocessing 7 Light EP 1.1 Light EP/BCP 8 Alcohol Rinse 1.2 Alcohol Rinse 9 High Pressure Rinse 1.3 High Pressure Rinse 10 Clean Assem. & Evacuation 1.4 Clean Assem. For Test 11 Helium Vessel Welding 1 5 Retest

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 19 19

11 Helium Vessel Welding 1.5 Retest

Reprocessing requires < 100 cycles/yr!

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ARRA – ARRA – EP Industrialization EP Industrialization Transfer Processing to Industry

Minimum technology transfer for production

  • Minimum technology transfer for production –

ARRA funds for a minimum of 1 vendor by 2011

– Ultrasonic cleaning and rinsing – Outside BCP – Bulk EP

Program

  • Vendor training at ANL/FNAL and JLab
  • Transfer technical expertise and information
  • Transfer technical expertise and information
  • Funds for vendor infrastructure
  • Process 1-cell cavities and VT at FNAL, then

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 20 20

Process 1 cell cavities and VT at FNAL, then

  • Process 9-cell cavities and VT at FNAL
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ARRA – ARRA – EP Industrialization EP Industrialization

  • Minimum technology transfer
  • ARRA funding provides means to perform

g p p industrialization effort for at least one vendor in the next three years. Additional vendor will be required before Project

  • Additional vendor will be required before Project

X production begins. Second vendor qualification effort must begin by 2011.

  • Vendors’ competency verified for 2-3 9-cell

cavities/wk prior to 2013 production ramp-up. O ti i d I d t i l R i i t h

  • Optimized Industrial Recipe increases tech.

transfer and limits Lab-based processing.

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 21 21

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ARRA – ARRA – Eco-friendly Processing co-friendly Processing Non-fluorine based polishing

Tumbling or Barrel Polishing (BP)

  • Tumbling or Barrel Polishing (BP)

– Bulk material removal

  • Chemical Mechanical Polishing (CMP)

g ( )

– Fine surface polishing (<0.01 um Ra)

  • Alternative non-HF based Electrolyte

B lk t i l l – Bulk material removal – Possible improvement in surface polishing

  • Several industrial vendors identified

– Cabot Microelectronics (CMP) – Faraday Technologies (alternative EP) Electrobright (alternative EP) – Electrobright (alternative EP)

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 22 22

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ARRA – ARRA – Eco-friendly Processing co-friendly Processing

Program

  • Focus on materials study with sample analysis
  • Focus on materials study with sample analysis

prior to funding approval

– X-ray Photoelectron Spectroscopy (XPS) – Secondary Ion Mass Spectroscopy (SIMS) – Energy Dispersive Spectroscopy (EDS) – Residual Resistivity Ratio (RRR) y ( ) – Hardness measurements (Rockwell, Vickers, Brinnell)

  • Funds for vendor infrastructure/tooling
  • Vendor polish 1-cell cavities
  • FNAL final clean and HPR cavities then VT
  • Process 9 cell cavities and VT at FNAL
  • Process 9-cell cavities and VT at FNAL

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 23 23

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ARRA – ARRA – Eco-friendly Processing co-friendly Processing

Paradigm Shift in Processing

  • New processing techniques
  • New processing techniques
  • Possible elimination of acids and waste products

– Barrel Polishing (BP) – 3-D Chemical Mechanical Polishing (CMP) – Atomic Layer Deposition (ALD)

  • Non HF based EP
  • Non-HF based EP

– Personnel safety enhancement – Fluorine contamination limited

  • Tighter control on surface characteristics

– BP, CMP, ALD---combination could prove very reliable – Surface and material defects removed – Surface and material defects removed – Extreme surface finishes (<0.01 um RA)

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 24 24

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Concluding Remarks Concluding Remarks

  • Significant progress has been made at all Labs

and the collaborations continue to grow.

  • No new Lab-based processing facility required

with adequate industrialization. Plans are proceeding to increase JLab and

  • Plans are proceeding to increase JLab and

ANL/FNAL capacity + add FNAL ICPA to handle R&D and pre-production efforts.

  • Optimized Industrial Recipe will reduce Lab-

based cavity processing substantially. ARRA F d h t EP i d t i li ti l

  • ARRA Funds shortens EP industrialization cycle

by 1+ years.

  • ARRA Eco-friendly may be transformative!

co e d y ay be t a s o at e

May 18-19, May 18-19, 2009 2009 DO DOE SRF Review SRF Review 25 25