Birck Nanotechnology Center BNC 202: Solvent Cleaning Course - - PowerPoint PPT Presentation
Birck Nanotechnology Center BNC 202: Solvent Cleaning Course Overview Why clean? What is clean? Chemical / particle contamination Sample handling Quick Review Acid vs Solvent Hood Required PPE Birck Supply
– Chemical / particle contamination – Sample handling
– Acid vs Solvent Hood – Required PPE – Birck Supply Room – Getting supplies into the CR
– Good solvent practices – Common mistakes – Personal Integrity
Poor handling practices of samples are the primary cause of defects
Tweezers are too small and inappropriate for such a large wafer
The Birck supply room offers 7 types of tweezers for handling your sample
sense for your size of sample.
plan to use your tweezers.
316L Stainless Steel Wide Paddle 316L Stainless Steel Narrow Paddle 316L Stainless Steel Angled Point 316L Stainless Steel Straight Point 316L Stainless Steel Carbon Fiber Tip 316L Stainless Steel Teflon Coated Wide Paddle Economy Plastic 1 for solvents 1 for acids 1 for clean sample handling
Poor Practice:
Do not reach over wafers to load more wafers. Also notice the exposed skin at the wrist.
– Cassettes for full wafers – Sample boxes for partial wafers and small samples
Poor Practice:
Samples are stored uncovered and unprotected.
Good Practice:
Samples are stored protected and segregated from one another.
Poly- propylene Table-Top Acid Bottle Storage Acid Hood Label
9
Stainless Steel Table-Top Solvent Bottle Storage Solvent Hood Label
Acid Hoods
(within the cleanroom)
Solvent Hoods
(within the cleanroom) Cleanroom Gloves + Acid Gloves + Cleanroom Suit + Chemical Apron + Goggles + Face Shield Cleanroom Gloves + Solvent Gloves + Cleanroom Suit + Goggles
(Only needed if pouring from supply bottles or using HF/BOE)
Please only buy cleanroom supplies through the Birck supply room (and not other stores across campus) When you purchase your cleanroom supplies through Birck, you ensure:
foxl@purdue.edu
Add the minion slide here, too
1. Move all supplies into the gowning room. A. If you have many supplies to move at
cardboard box. Lorraine can lend you a plastic tote, which you can use and return to her afterwards. B. Take only cleanroom compatible supplies and materials. 2. Place your supplies at the wipe down station 3. Gown up as normal before wiping down your items.
4. Wet a lint-free cloth (with gloved hands) at the wipe down station A. Use 10% IPA / 90% water solution that is provided for you. B. Wipe down all the surfaces of your all your supplies. (Samples excluded) C. Be sure to turn the cloth often so you are not reapplying particles you just removed. D. Once finished, continue into the CR with your wiped-down supplies
Before you clean your sample, you have to start with clean hardware.
Question: What do all these tools have in common? Answer: They are all dirty when new.
***But note these plastics are generally compatible with IPA Clean compatible plastics with the 3 solvents in sequence
– Be deliberate with all movements. Do not rush the process. – Organize your work area before you begin – Prepare the sonicator bath prior to cleaning – Prepare the solvent waste jug with a funnel prior to cleaning – Lay down foil and lint-free wipes for your clean work area – Do not block the air plenum of the hood for your safety – Place solvent bottle caps upside down – Do not touch the solvent bottle to your glassware – Blow dry items only within the fume hood – Handle tweezers only by their handle – There is no need to use an excessive amount of lint-free wipes. – Never place your phone in a fume hood – Clean up after yourself
– Do not touch the lip of your glassware with your hand – Dry the exterior of your glassware after sonication and prior to dumping out used solvent – Do not touch glassware to the waste jug funnel – Do not touch tweezers by their working end – Clean tweezer tubes often through your process flow – Do not store dirty items in clean items (like glassware nested in glassware) – Do not touch the blowgun nozzle to any clean items – Do not use the drying rack for glassware but rather fully dry with the nitrogen blow gun
– Everyone wants you to succeed. – Do not think you will be looked down upon by asking a question. – Raising questions will keep you safe, and keep your research moving forward.
– If your colleague is not doing things right, do not be shy about correcting the behavior.
– Be professional and take responsibility for your action. – Help all users by informing the staff so they can minimize the effect.
– Everything you do affects you as well as your labmates. – Respect others by doing the chores and work expected of you. – You will gain respect by respecting others.
How would you like to begin work in a mess like this?