SLIDE 11 Efficient MEMs Thin Film Wafer Manufacturing
How did Pyreos come to Scotland
- Adaption of standard MEMs processes
- Standard tool-set for sputtering & etching processes
- 100% wafer testing after each process
- High yield & economic processing
- Design flexibility for developing products
Silicon Substrate Membrane Layer PZT Layer Top Electrode Patterning Bottom Electrode PZT Patterning Bottom Electrode Patterning Isolation & top electrode Patterning Wiring Patterning Absorber Layer (optional) Backside Etching Singulation
Our competitors do not have a highly controlled manufacturing process
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3 3 7 6 4 8 9 F A X : 7 5 5
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A I L : s z s s 2 @ 1 6 3 . c