Planar sensor R&D activity in Liverpool Liverpool pixel - - PowerPoint PPT Presentation

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Planar sensor R&D activity in Liverpool Liverpool pixel - - PowerPoint PPT Presentation

Aug 10, 2023 44 likes •204 views

Planar sensor R&D activity in Liverpool Liverpool pixel R&D mask Designed for investigating several issues of general relevance to any pixel system for future Vertex detectors in high luminosity experiments. Important issue are

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Planar sensor R&D activity in Liverpool

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Liverpool pixel R&D mask

Designed for investigating several issues of general relevance to any pixel system for future Vertex detectors in high luminosity experiments. Important issue are obviously charge sharing, thickness, dimensions of the non-sensitive area between the active region and the cut line (usually called “edge”).

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every guard structure has 4 variances to study the cut edges GR structure 5:

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10u m 32 um

  • High resistivity polysilicon used to fill the trenches to assure

mechanical strength

  • Thermal oxide inside trenches to assure insulation.
  • No guard ring

Possible layout n-p

SiO2

80 um 10um 80um

With CNM Barcelona Edgeless detectors with trenches

100um

p+ (epitaxy) p

200um

Al

Side cut (DRIE or Diamond saw)

poly

n+ p+ n+ n+

p-stop strips

p+

Si3N4

guard

p+

Giulio Pellegrini, CNM

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Detector 3

Guard rings P-stops trench DRIE cut line Bias ring Floating ring

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Detector type (6 sensors each on a 4” mask)

  • Detector 1, no floating ring, small bias ring.
  • Detector 2, large bias ring.
  • Detector 3: one bias ring + one floating ring (best conditions

from simulation).

  • Distance between last strip and cut line (DRIE) and Diamond

Saw:

  • Detector 1 80um 325um
  • Detector 2 258um 325um
  • Detector 3 258um 325um
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Many measurements to be performed: Strip readout for studying the charge sharing as a function of fluence (best done in test beam, preliminary measurements in lab with source). Study of thin edge sensors with the options above. CCE and edge as a function of wafer thickness. Studying the pixel sensors with the various readout (more specific to VELO is Medipix, but anything that can be learned with available readout to the various institutes is welcome). Other aspects: operating conditions (annealing and bias voltage), n-in- n, investigation. Need to start rather regular meeting among the “planar sensor institutes’ to distribute tasks and to envisage next steps (first VELO specific mask? .....).