Part.1 Main aspects of the control issues in the micro/nano-world - - PowerPoint PPT Presentation
Part.1 Main aspects of the control issues in the micro/nano-world and Part.2 From closed-loop to open-loop control of piezocantilever Micky Rakotondrabe Philippe Lutz vnement - date 1 Control issues in the micro/nano-world
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Control issues in the micro/nano-world – May, 17, 2009 1
Part.1 – Main aspects of the control issues in the micro/nano-world and Part.2 – From closed-loop to open-loop control of piezocantilever
Micky Rakotondrabe Philippe Lutz
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The roots of our activity comes from Watchmakers industry in Besançon area & Automotive industry in Belfort area.
ENGINEERING SCIENCES
TECHNOLOGY facility
to industrial partnership
. 500 staff people . 28 M annual overall budget including 10 M operational budget . About 250 running research contracts
Besançon Belfort
6 research departments 6 main application fields 1 microfabrication center
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13 % 13 % 13 % 15 % 15 % 15 % 15 % 24 % 24 % 24 % 24 % 19 % 19 % 19 % 19 % 9 % 9 % 9 % 9 % 20 % 20 % 20 % 20 %
!"#!"$%#&'$" % $"($(" )*'% $" &#"'+)'"#&,"$# ("&'"# *%% +%$, $*#% $#"% #(%$# $"#%)!-# $"$* '&".(*'$"# #+* "+*'$"# #+*)'#) + "+*%*%$')%+ )#!"#$$#)') !*%% ($#'$#$"# "#"#,#$% "#'$"#% "#'!( $#)'"#%%', * '$))%+$/$*+() "#)#%$"('$$# #%% "###(%$% ( $!*% "#%*%$'% "#0#'$" % )%("&% #$#%)$ #''($#% ##!$% !$# $"#% # "#!$% 1#!#$#%
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Automated Systems for Micromanipulation and Microassembly
– Create microrobots and microrobotic cells for flexible micromanipulation and microassembly
Because of the growing number of microproducts to assemble, efficient and reliable micromanipulation systems are required Micro-assembly
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Automated Systems for Micromanipulation and Microassembly
– Control complex microsystems
MEMS = specific paradigms for control science
Microgripper from Femto-tools (FT G100) Nanotweezer from LIMMS
1 mm
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Automated Systems for Micromanipulation and Microassembly Robotic cells
Microhandling Microassembly Vision Micromanipulators Actuators
Control
Adressed issues
Grippers, DEP, phase, functionalisation, pH, …
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Automated Systems for Micromanipulation and Microassembly Modelling and control of:
management Control by exteroceptive sensors: visual servoing Main addressed scientific issues on control in the SAMMI group/ FEMTO-ST
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Some characteristics of the « microworld »
1 mm 100 µm 10 µm 1 µm 1µm 10µm 100µm 1mm Optical microscopy Electronic scanning Microfabrication manufacturing Surface effects are predominant 200 µm
bacterium 2-6 µm pollen 20-40 µm lymphocyte 6-15 µm prothèse auditive 1 mm engrenage 800 µm carbon nanotube Diameter: 100 nm coil 130 µm
30 µ m 10 µ m
Lens with its support 500 µm mirror spectrometer
Assembled systems
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Main consequences for micromanipulation
Macro Macro-
manipulation Micro Micro-
manipulation
Scale effect Component Ni 100x120x150 µm3 Advanced Microsystems Laboratory Minnesota University, Minneapolis, USA
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Main consequences for micromanipulation and microrobot design
To avoid adhesion …
hydrophobic coating of the manipulator tips
(oxyde=dielectric)
acceleration)
A smaller and smaller object means less and less fingers to manipulate it! A smaller and smaller object means the use of strategies (dynamic)!
σ σ σ σs (Epoxy-Cu)=0.04 mC.m-2 , σ σ σ σs (Glass-Au)=4.2 mC.m-2
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A light and compact mechanism is intrinsically more precise than a large and heavy mechanism
a « 400 km » arm with an accuracy of 4 cm …
C corresponds to L=480 nm for a 40 mm steel beam
Friction is the mortal enemy of the resolution (and then precision)
Deforming mechanisms, bearings without contacts
ρ E α m k α f
15 silicon silicon 9 kevlar kevlar 2,62 aluminium aluminium 2,66 steel steel E/ρ ρ ρ ρ.107 m2/s2 material material
Sensor as near as possible to the end-effectors, use of microscopic vision systems
Main consequences for micromanipulation and microrobot design
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Main consequences for control
input controller system Measurement/sensors Output Noisy signals:
unfavourable High environment sensibility Non linear, variant and stochastics models
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Today Approched Control Issues
Part.1 - Main aspects of the control issues in the micro/nanoworld, piezoelectric bender control Part.2 - From closed-loop to open loop control of piezocantilevers Micky RAKOTONDRABE and Philippe LUTZ, from FEMTO-ST (Besançon, France) Force control for nanohandling inside Scanning Electron Microscopes Daniel JASPER, from AMiR (Oldenburg, Germany) Controlled Optical Trapping of Nanoparticles Jason J. GORMAN, Thomas W. LEBRUN and Arvind BALIJEPALLI, from MEL (Gaithersburg, USA) Precision-Driven Hybrid Control for 3D Microassembly Dan O. POPA and Aditya N. DAS, from ARRI (Fort Worth, USA) Towards the mechanical and control-oriented optimization of micromechatronic systems for robust control Mathieu GROSSARD, Nicolas CHAILLET, Mehdi BOUKALLEL, Arnaud HUBERT and Christine ROTINAT-LIBERSA, from FEMTO-ST (Besançon, France) and CEA (Paris, France) Robust Vision-Guided Multi-probe Microassembly John WASON and John WEN, from CATS (Troy, USA) Fast and Precise Micropipette Positioning System based on Continuous Camera-Robot Recalibration and VisualServoing Leonardo S. MATTOS and Darwin G. CALDWELL, from ARD (Genova, Italia) Control of an Active Handheld Instrument for Microsurgery and Micromanipulation Robert A. MACLACHLAN, Brian C. BECKER and Cameron N. RIVIERE from RI (Pittsburgh, USA)
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1 - Characteristics of piezoelectric cantilevers: hysteresis creep badly damped vibration sensitivity to thermal variation 2 - Closed-loop robust control 3 - Open-loop control
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1 - Characteristics
Piezoelectric cantilever Piezoelectric cantilever Small object piezogripper
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[Haddab, PhD00]
1 - Characteristics
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+
Passive layer Electrodes 15 mm 0,3 mm 2 m m Unimorph piezocantilever
+
1 - Characteristics
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[Haddab, Phd00] [Rakotondrabe et al, AIM06] [Rakotondrabe et al, IROS07a] [Rakotondrabe et al, CASE07] [Rakotondrabe et al, ICRA09] [Ivan et al, RSI09]
Manipulation force:
Deflection modeling and control.
δ
+
1 - Characteristics
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+
U δ
Dynamic hysteresis
(dynamic hysteresis)
1 - Characteristics
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U
+
δ
dynamic hysteresis static hysteresis linear dynamic
[Low and Guo, JMEMS95] [Croft et al, ASME-JDSMC01] [Rakotondrabe et al, T-CST09]
(separation principle)
1 - Characteristics
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+
δ
and accuracy(time conditioned)
1 - Characteristics
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+
δ
1 - Characteristics
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+
δ
T [° C] deflection [µm] U=0V U=15V U=30V
is highly sensitive to thermal variation
[Rakotondrabe et al, IROS07b]
90%deflection of maximal range use
1 - Characteristics
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1 - Characteristics of piezoelectric cantilevers: hysteresis creep badly damped vibration sensitivity to thermal variation 2 - Closed-loop robust control 3 - Open-loop control
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2 – Robust control
Max
α
min
α
Quadrilateral approximation
+ +
U
s
b δ
D p α
+ +
∆ Wα
+ ++ +
U
s
b δ
D p α
+ ++ +
∆ Wα
[Rakotondrabe et al, T-CST09]
0.U
δ α =
+ +
U
s
b δ
D p α
ε
c
δ ( ) K p
+ +
∆ Wα
+ ++ +
U
s
b δ
D p α
ε
c
δ ( ) K p
+ ++ +
∆ Wα
W2 W1
Fails with large hysteresis
uncertain
.
creep Temperature
s F δ δ δ + + + +
disturbance
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2 – Robust control
δ
( )
U Γ ( ) D p
piezocantilever
( )
1 . −
Γ
s
δ U
Linearized system
+ +
U
s
b δ
ε
c
δ ( ) K p ( )
U Γ ( ) D p
Poutre piézo
( )
1 . −
Γ
+ ++ +
U
s
b δ
ε
c
δ ( ) K p ( )
U Γ ( ) D p
Poutre piézo
( )
U Γ ( ) D p
Poutre piézo
( )
1 . −
Γ
[Rakotondrabe et al, IFAC-WC08]
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2 – Robust control
expensive large sizes (not convenient for packaged systems)
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2 – Robust control
very noisy fragile
[Haddab et al, IFAC-Mech09]
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1 - Characteristics of piezoelectric cantilevers: hysteresis creep badly damped vibration sensitivity to thermal variation 2 - Closed-loop robust control 3 - Open-loop control
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3 – Feedforward control
Piezocantilever Compensator
reference
U
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3 – Feedforward control
+
δ
U
Quadrilateral model Bouc-Wen model Preisach model Prandtl-Ishlinskii (PI) model
[Rakotondrabe et al, T-CST09] [Low and Guo, JMEMS95] [Croft et al, ASME-JDSMC01] [Kuhnen and Janocha, CIS01] [Mokaberi and Requicha, T-ASE08] [Rakotondrabe et al, IROS08]
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3 – Feedforward control
[Kranosel’skii and Pokrovskii, Springer89]
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3 – Feedforward control
( )
1 1 1 1 1 1 2 2
' ; 1 1 ' ' ; 2
k k j k j j k k k k j j j j
r w r r k n w w w w k n w w w w
= − = =
= ⋅ − = = − = = + ⋅ +
∑ ∑ ∑
⋯ ⋯
[Kranosel’skii and Pokrovskii, Springer89]
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3 – Feedforward control
Compensated hysteresis Creep phenomenon Linear but creep phenomenon
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3 – Feedforward control
Hysteresis compensator
+
δ
U
c
δ
[Rakotondrabe et al, T-CST09] c
δ K
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3 – Feedforward control
Hysteresis compensator
+
δ
U
c
δ
Creep compensator
v
δ
c
δ K
in the compensator
1 K ( ) C p
v
δ
[Rakotondrabe et al, T-ASE09]
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3 – Feedforward control
Hysteresis compensator
+
δ
U
c
δ
Creep compensator
v
δ
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3 – Feedforward control
Dyncamic model inversion Input shaping techniques
[Croft et al, ASME-JDSMC01] [Singer et al, Patent90]
[Singer and Seering, ASME-JDSMC90] [Singhose et al, AIAA-JGCD96] [Popa et al, ICRA03] [Paris et al, IWMF08] [Rakotondrabe et al, IROS08]
Vibr. compensator
r
δ
Hysteresis compensator
+
δ
U
c
δ
Creep compensator
v
δ
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3 – Feedforward control
( )
( )
( )
2 2
( ) sin 1 1
i n
t t n i i n i
t K A e t t
ξ ω
ω δ ω ξ ξ
− − ⋅ ⋅
= ⋅ ⋅ ⋅ ⋅ ⋅ − ⋅ − −
[Singer et al, Patent90]
Vibr. compensator
r
δ
Hysteresis compensator
+
δ
U
c
δ
Creep compensator
v
δ
1
1
m i i i
A A
=
= >
∑
(positivity of the amplitudes)
1
( )
m i i
t δ
=
=
(suppression of the vibrations)
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3 – Feedforward control
[Rakotondrabe et al, T-ASE09]
Linear, without creep and well damped
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References
[Kranosel’skii and Pokrovskii, Springer89] - M.A.Krasnosel'skii and A.V.Pokrovskii, `` Systems with Hysteresis '', Springer-Verlag, Berlin, New York, 1989 (410p.) [Singer et al, Patent90] - N.C. Singer, W. P. Seering and K. A. Pasch, ‘Shaping command inputs to minimize unwanted dynamics’, Patent NoUS-4.916.635, 1990. [Singer and Seering, ASME-JDSMC90] - N. C. Singer and W. P. Seering, ‘Preshaping command inputs to reduce system vibration’, ASME Journal of Dynamic Systems, Measurement and Control, Vol.112, pp.76-82, march 1990. [Low and Guo, JMEMS95] - T. S. Low and W. Guo, ‘Modeling of a three-layer piezoelectric bimorph beam with hysteresis’, J. Microelectromech. Syst., vol.4, pp230-237, 1995. [Singhose et al, AIAA-JGCD96] - W. Singhose, S. Derezinski and N. Singer, "Extra-insensitive input shapers for controlling flexible spacecraft", AIAA Journal of Gruidance, Control and Dynamics Vol.19, No2, pp.385-391, 1996. [Haddab, Phd00] - Y. Haddab, ‘Design and development of a micromanipulation station with position/force control and dedicated to micrometric objects’, PhD thesis in Automatic Control and Computer Science, Université de Franche-Comté, 2000 [Kuhnen and Janocha, CIS01] - K. Kuhnen and H. Janocha, ‘Inverse feedforwrad controller for complex hysteretic nonlinearities in smart-materials systems’, Control of Intelligent System, Vol.29, No3, 2001. [Croft et al, ASME-JDSMC01] - D. Croft, G. Shed and S. Devasia, "Creep, hysteresis and vibration compensation for piezoactuators: atomic force microscopy application", ASME Journal of Dynamic Systems, Measurement and Control, 2001. [Popa et al, ICRA03] – D.O. Popa, B.H. Kang, J.T. Wen, H.E. Stephanou, G. Skidmore and A. Geisberger, ‘Dynamic modeling and open-loop control of thermal bimorph MEMS actuators’, IEEE ICRA, Taipei, Taiwan, 2003. [Rakotondrabe et al, AIM06] - Micky Rakotondrabe, Yassine Haddab and Philippe Lutz, 'Nonlinear modelling and estimation of force in a piezoelectric cantilever', IEEE/ASME
[Rakotondrabe et al, IROS07a] - Micky Rakotondrabe, Yassine Haddab and Philippe Lutz, 'Modelling and H-inf force control of a nonlinear piezoelectric cantilever', IEEE/RSJ
[Rakotondrabe et al, IROS07b] - Micky Rakotondrabe, Cédric Clévy and Philippe Lutz, 'H-inf deflection control of a unimorph piezoelectric cantilever under theraml disturbance', IEEE/RSJ - IROS, pp:1190-1197, San Diego CA USA, Oct-Nov 2007. [Rakotondrabe et al, CASE07] - Micky Rakotondrabe, Cédric Clévy and Philippe Lutz, 'Modelling and robust position/force control of a piezoelectric microgripper', IEEE - CASE, pp:39-44, Scottsdale AZ USA, Sept 2007. [Rakotondrabe et al, IROS08] - Micky Rakotondrabe, Cédric Clévy and Philippe Lutz, 'Hysteresis and vibration compensation in a nonlinear unimorph piezocantilever', IEEE/RSJ - IROS, pp:558-563, Nice France, Sept 2008. [Rakotondrabe et al, IFAC-WC08] - Micky Rakotondrabe, Mamadou Cissé Diouf and Philippe Lutz, 'Robust feedforward-feedback control of a hysteretic piezocantilever under thermal disturbance', IFAC - WC, pp:13725-13730, Seoul Corea, July 2008. [Mokaberi and Requicha, T-ASE08] - B. Mokaberi and A. A. G. Requicha, "Compensation of scanner creep and hysteresis for AFM nanomanipulation", IEEE Transactions on Automation Science and Engineering (T-ASE), Vol.5, No2, pp.197-208, 2008. [Paris et al, IWMF08] - M. Paris, Y. Haddab and P. Lutz, ‘A new approach for a microparts feeding system based on inertial force’, International Workshop on MicroFactory (IWMF), 2008.
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References
[Rakotondrabe et al, ICRA09] - Micky Rakotondrabe and Philippe Lutz, 'Force estimation in a piezoelectric cantilever using the inverse-dynamics-based UIO technique', IEEE
[Rakotondrabe et al, T-CST09] - Micky Rakotondrabe, Yassine Haddab and Philippe Lutz, 'Quadrilateral modelling and robust control of a nonlinear piezoelectric cantilever', IEEE - Transactions on Control Systems Technology (T-CST), Vol.17, Issue 3, pp:528-539, May 2009. [Haddab et al, IFAC-Mech09] - Y. Haddab, Q. Chen and P. Lutz, ’Improvement of strain gauges micro-forces measurement using Kalman optimal filtering’, International Journal of IFAC Mechatronics, to appear 2009. [Rakotondrabe et al, T-ASE09] - Micky Rakotondrabe, Cédric Clévy and Philippe Lutz, 'Complete open loop control of hysteretic, creeped and oscillating piezoelectric cantilever', IEEE - Transactions on Automation Science and Engineering (T-ASE), conditionally accepted. [Ivan et al, RSI09] - Ioan Alexandru Ivan, Micky Rakotondrabe, Philippe Lutz, Nicolas Chaillet, ‘Current integration force and displacement self-sensing method for cantilevered piezoelectric actuators’, Review on Scientific Instruments (RSI), submitted, 2009.