Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Micro Milling of High Aspect Ratio Micro Process Engineering IMVT Engineering IMVT Structures in Ceramics T. Gietzelt, L. Eichhorn, J. Binder* Institute of Micro Process Engineering, Institute of Material Research III Micro Process Forschungszentrum Karlsruhe, P.O. Box 3640, 76021 Institute for for Karlsruhe, Germany Institute Micro mail to: thomas.gietzelt@imvt.fzk.de 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Machinable Ceramics Process Engineering IMVT Engineering IMVT State processed in processed in processed in processed final state pressed state presintered before state ceramization Material Graphite ZrSi 2 ZrO 2 Sigradur (glassy carbon) MACOR Al 2 O 3 Aluminiumsilicate Aluminiumsilicate Advant- no thermal no sinter good chem. low tool wear, Micro Process age treatment, easy shrinkage, resistance good chem. for Institute for to clean machining resistance, dimension ≡ final joining possible Institute dimension Micro Disad- tool wear due to organic shrinkage during very brittle vantage binder no sintering, more (Graphite), chem. cleaning in US & tool wear resistance? organic solvents 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Tools Made of: Process Engineering IMVT Engineering IMVT Monocrystalline Diamond Hard Metal Diameter down to 100µm Diameter down to 30µm Cutting edge Micro Process Institute for for Institute Micro • sharp cutting edge • composite material => jagged cutting edge or rounded due to coating • no burr formation • for steel & ceramics • for nonferrous metals & polymers • burr formation at ductile materials • tools limited to low AR`s • tools for high AR`s available 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Machining Ceramics in the Final State Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Microstructure of glassy ceramic Microstructure of fine grain Micro (MACOR ) consisting of 45 % graphite R8710 by SGL Carbon borosilicate glass matrix and 55 % with an average grain size of 3 µm mica-crystals as origin of micro and an open porosity of 10 % cracks 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Machining of Glassy Ceramic Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Micro heat exchanger structure made Detail of the surface of MACOR , trench width: 0.4 mm depth: 0.6-2.9 mm, n=15.000 rpm, f=600 mm/min, a p =0.05 mm 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Presintered Ceramics Process Engineering IMVT Engineering IMVT Machining somewhere between sinter neck formation and compaction Micro Process Institute for for Institute Micro Keramiken 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Examples of Micromixers Made of Different Process Engineering IMVT Engineering IMVT Presintered Ceramics Micro Process Institute for for Institute Micro Overview of a micro mixer 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Micromixer Made of Commercial Presintered Engineering IMVT Process Engineering IMVT Al 2 O 3 Micro Process for Institute for Institute Micro Mixing chamber in the green state Mixing chamber in the sintered state, predicted shrinkage: 15-18%, value for this detail: 15,53%, at the outer diameter of the part: 16,7% 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Micromixer Made of Presintered ZrO 2 Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Mixing chamber in the green state Mixing chamber in the sintered state, predicted shrinkage: 19,71%, experimental value for this detail: 19,88 % 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Micromixer Made of Aluminiumsilicate Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Mixing chamber made of Mixing chamber after firing at Aluminiumsilicate before firing 1100 ° C, nearly free of shrinkage (+1.8 %) but with enhanced mechanical properties 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Shrinkage Free Ceramic Based on ZrSi 2 Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Machining test : columns before (left) and after reaction sintering (right) 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Manufacturing Process of Glassy Carbon Process Engineering IMVT Engineering IMVT (Sigradur ) • Raw polymer material with threedimensional, cross-linked structure • Pyrolysis in solid state • Advantageous is a high carbon yield of the polymer after pyrolysis, Micro Process meaning as few as possible carbon-containing gas should be Institute for for generated Institute • Most suitable are highly cross-linked aromatic poylmers e.g. Micro polyphenylene, polyimide, phenol- and furan resins 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Microstructures in Glassy Carbon Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Nozzle plate Micro fluidic structure (CE-Chip) 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Dependence of Machining Results on Process Engineering IMVT Engineering IMVT Strength of Ceramic Blanks Micro Process Institute for for Institute Micro Microstructures made from gel-casted zirconia blanks with machining marks, presintering temperature 900 ° C 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Dependence of Machining Results on Process Engineering IMVT Engineering IMVT Strength of Ceramic Blanks Micro Process Institute for for Institute Micro Microstructures made from gel-casted zirconia blanks without machining marks, presintering temperature 1100 ° C 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Joining of Ceramic Components Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Adaption of a ceramic micromixer made of zirconia by thermal shrinking into Hastelloy C-22-Housings 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Joining of Ceramic Components Process Engineering IMVT Engineering IMVT Micro Process Institute for for Institute Micro Joining of several microstructured layers of cross-linked resin using resin as glue and subsequent pyrolyzation to glassy carbon 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Summary and Outlook Process Engineering IMVT Engineering IMVT • Ceramic materials offer some interesting properties like high temperature stability, biocompatibility, corrosion resistance and hardness • By micromilling a wide range of ceramic materials can be structured • It was shown that micro features without faults at the edges and with high aspect ratios could be produced Micro Process • Tight tolerances can be met also using presintered ceramics Institute for for • Further efforts have to be made to join ceramic materials and to Institute implement to micro process engineering Micro 4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria
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