Micro Milling of High Aspect Ratio Micro Process Engineering IMVT - - PowerPoint PPT Presentation

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Micro Milling of High Aspect Ratio Micro Process Engineering IMVT - - PowerPoint PPT Presentation

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Forschungszentrum Karlsruhe in der Helmholtz-Gemeinschaft Micro Milling of High Aspect Ratio Micro Process Engineering IMVT Engineering IMVT Structures in Ceramics T. Gietzelt, L. Eichhorn, J. Binder* Institute of Micro Process Engineering,

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SLIDE 1

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Micro Milling of High Aspect Ratio Micro Structures in Ceramics

  • T. Gietzelt, L. Eichhorn, J. Binder*

Institute of Micro Process Engineering, Institute of Material Research III Forschungszentrum Karlsruhe, P.O. Box 3640, 76021 Karlsruhe, Germany mail to: thomas.gietzelt@imvt.fzk.de

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SLIDE 2

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Machinable Ceramics

shrinkage during sintering, more tool wear good chem. resistance ZrO2 Al2O3

Aluminiumsilicate

processed in presintered state very brittle low tool wear, good chem. resistance, joining possible Sigradur (glassy

carbon)

processed before ceramization due to organic binder no cleaning in US &

  • rganic solvents

tool wear

(Graphite),

chem. resistance? Disad- vantage no sinter shrinkage, machining dimension ≡ final dimension no thermal treatment, easy to clean Advant- age ZrSi2 Graphite MACOR

Aluminiumsilicate

Material processed in pressed state processed in final state State

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SLIDE 3

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Cutting edge

Tools Made of:

Monocrystalline Diamond Hard Metal

Diameter down to 100µm Diameter down to 30µm

  • sharp cutting edge
  • no burr formation
  • for nonferrous metals & polymers
  • tools limited to low AR`s
  • composite material => jagged cutting

edge or rounded due to coating

  • for steel & ceramics
  • burr formation at ductile materials
  • tools for high AR`s available
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SLIDE 4

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Machining Ceramics in the Final State

Microstructure of glassy ceramic

(MACOR) consisting of 45 %

borosilicate glass matrix and 55 % mica-crystals as origin of micro cracks Microstructure of fine grain graphite R8710 by SGL Carbon with an average grain size of 3 µm and an open porosity of 10 %

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SLIDE 5

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Machining of Glassy Ceramic

Micro heat exchanger structure made

  • f MACOR, trench width: 0.4 mm

depth: 0.6-2.9 mm, n=15.000 rpm, f=600 mm/min, ap=0.05 mm Detail of the surface

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SLIDE 6

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Presintered Ceramics

Machining somewhere between sinter neck formation and compaction

Keramiken

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SLIDE 7

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Examples of Micromixers Made of Different Presintered Ceramics

Overview of a micro mixer

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SLIDE 8

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Micromixer Made of Commercial Presintered Al2O3

Mixing chamber in the sintered state, predicted shrinkage: 15-18%, value for this detail: 15,53%, at the

  • uter diameter of the part: 16,7%

Mixing chamber in the green state

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SLIDE 9

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Micromixer Made of Presintered ZrO2

Mixing chamber in the sintered state, predicted shrinkage: 19,71%, experimental value for this detail: 19,88 % Mixing chamber in the green state

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SLIDE 10

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Micromixer Made of Aluminiumsilicate

Mixing chamber after firing at 1100 ° C, nearly free of shrinkage (+1.8 %) but with enhanced mechanical properties Mixing chamber made

  • f

Aluminiumsilicate before firing

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SLIDE 11

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Shrinkage Free Ceramic Based on ZrSi2

Machining test : columns before (left) and after reaction sintering (right)

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SLIDE 12

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Manufacturing Process of Glassy Carbon (Sigradur)

  • Raw polymer material with threedimensional, cross-linked structure
  • Pyrolysis in solid state
  • Advantageous is a high carbon yield of the polymer after pyrolysis,

meaning as few as possible carbon-containing gas should be generated

  • Most suitable are highly cross-linked aromatic poylmers e.g.

polyphenylene, polyimide, phenol- and furan resins

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SLIDE 13

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Microstructures in Glassy Carbon

Nozzle plate Micro fluidic structure (CE-Chip)

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SLIDE 14

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Dependence of Machining Results on Strength of Ceramic Blanks

Microstructures made from gel-casted zirconia blanks with machining marks, presintering temperature 900 ° C

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SLIDE 15

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Dependence of Machining Results on Strength of Ceramic Blanks

Microstructures made from gel-casted zirconia blanks without machining marks, presintering temperature 1100 ° C

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SLIDE 16

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Joining of Ceramic Components

Adaption of a ceramic micromixer made of zirconia by thermal shrinking into Hastelloy C-22-Housings

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SLIDE 17

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Joining of Ceramic Components

Joining of several microstructured layers of cross-linked resin using resin as glue and subsequent pyrolyzation to glassy carbon

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SLIDE 18

Forschungszentrum Karlsruhe

in der Helmholtz-Gemeinschaft

Institute Institute for for Micro Micro Process Process Engineering IMVT Engineering IMVT

4M2007 Conference on Multi-Material Micro Manufacture, 3rd - 5th October, 2007, Borovets, Bulgaria

Summary and Outlook

  • Ceramic materials offer some interesting properties like high

temperature stability, biocompatibility, corrosion resistance and hardness

  • By micromilling a wide range of ceramic materials can be

structured

  • It was shown that micro features without faults at the edges and

with high aspect ratios could be produced

  • Tight tolerances can be met also using presintered ceramics
  • Further efforts have to be made to join ceramic materials and to

implement to micro process engineering