EPITAXIAL SCRUBBERS CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN - - PowerPoint PPT Presentation

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EPITAXIAL SCRUBBERS CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN - - PowerPoint PPT Presentation

Feb 05, 2024 120 likes •264 views

Lazzate (MB), Italy EPITAXIAL SCRUBBERS CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO

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SLIDE 1

EPITAXIAL SCRUBBERS

Lazzate (MB), Italy

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 2

LOCATION

Cireco S.r.l. is located in Lazzate(MB), about 30 km far from Milan and 180 Km far from Genova port.

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 3

HISTORY

Cireco S.r.l was born in 2003 as a natural follow-up of CIR Company, ensuring continuity in production and support over all CIR worldwide, since the sixties. Years of experience boost CIRECO to new solutions in advanced technologies. Our equipments suit semiconductor, textile, leather, inks, paints, pharmaceutical and cosmetic industries. These applications are suited by gas scrubber systems (particularly for epitaxy processes) . Our goals are the sustained productivity through certified quality, high economic yields through costs reductions, respect for our environment and for healthy work conditions machinery for texile, chemical and industrial plant.

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 4

PRODUCTS – EPI SCRUBBERS

  • Model 2NR10T
  • Model 2NR10AV
  • Model 4NR10T
  • Model 4NR10AV
  • Model 8NR10T
  • Model 8NR10AV

Wet venturi scrubbers Air venturi scrubbers

  • Customized solutions for all types of installation

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 5

AIR IR VENTURI I SCRUBBERS

2NR10AV MODEL

  • Used for medium vacuum pressure

drops (up to 4 mBar).

  • Blower fan activated venturi and

H2 dilution.

  • Scrubbers used for a single or

multiple wafer reactors

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 6

WET VENTURI SCRUBBERS

8NR10T MODEL

  • Used for high vacuum pressure

drops (up to 20 mBar).

  • Blower fan for H2 dilution only
  • Water pump activated venturi
  • Scrubber used for a single or

multiple wafer reactors

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

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SLIDE 7

FUNCTIONING

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

The scrubbing of contaminants is made with 2 or 3 steps (depending on the scrubber model)

1° step

Scrubbing in the inlet bells → Silica flakes fall in the underneath tank and float into the drain by overflow

2° step

Absorption in the packed bed turret , 30s contact→ Solid bodies hose down by a counter current water spray

3° step (if present)

Venturi throat → the water nozzle is centered just ahead of the converging section of the throat, turbulence and high gas/water contact absorb condensable gases

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SLIDE 8

STEP 1

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

  • Gases are forced to cross into

the inner bell thanks to the particular design of the nozzles (water jet) and water path

  • Gases react with water
  • Silanes decompose and

cristallize in HCl + SiO2 Reactor gas

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SLIDE 9

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

  • Scrubbers are provided with an

auto- cleaning bell solution with scrapers to prevent the growth of the silica and, as consequence, the occlusion of the cylinders

  • A Nitrogen curtain acts as a

barrier against the moisture diffusing upwards and works also for the disributor of the gas at the entry port. scrapers

AUTO CLEANING BELL

When the shaft is fully extended, the edge of the ring scraper is visible just below the bell head

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SLIDE 10

STEP 2

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

The gas mixture flows upwards in the packed tower through a packed bed with high contact surface area The contact time is from 13s to 30s; turbulent gas pattern and mass transfer by impact mode Final dilution of Silanes, HCl and Hydrides, flowing downwards in the base tank The residuals proceeds to step three (if present) Eco Fill ring for packed bed

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SLIDE 11

STEP 3 (if if present)

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

  • The third step is present only for

wet venturi scrubbers

  • A piezoelectric transducer reads the

required pressure

  • Pressure readings feed back to the

inverter that regulates pump or fan speed (it depends on the model) in

  • rder to keep constant pressure
  • A Venturi effect is created in the

venturi throat and the contaminants are removed during the water-air contact

  • Exhausted gas are discharged

through the chimney with blower fan for dilution Venturi throat Water from pump Exhausted gases

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SLIDE 12

H2 DIL ILUTIO ION

CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209

Exhausted gas Scrubbers are designed to provide a dilution system of the H2 exhausted thanks to a fan blower in order to keep the H2 concentration at outlet lower than 2% (safety value). This means that the machinery has no need of additional system for dilution but is enough a simple connection with the drain pipe for gases

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SLIDE 13

REFERENCES