Lazzate (MB), Italy EPITAXIAL SCRUBBERS CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
LOCATION Cireco S.r.l. is located in Lazzate(MB), about 30 km far from Milan and 180 Km far from Genova port. CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
HISTORY Cireco S.r.l was born in 2003 as a natural follow-up of CIR Company, ensuring continuity in production and support over all CIR worldwide, since the sixties. Years of experience boost CIRECO to new solutions in advanced technologies. Our equipments suit semiconductor, textile, leather, inks, paints, pharmaceutical and cosmetic industries. These applications are suited by gas scrubber systems (particularly for epitaxy processes) . Our goals are the sustained productivity through certified quality, high economic yields through costs reductions, respect for our environment and for healthy work conditions machinery for texile, chemical and industrial plant. CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
PRODUCTS – EPI SCRUBBERS Wet venturi scrubbers Air venturi scrubbers - Model 2NR10T - Model 2NR10AV - Model 4NR10T - Model 4NR10AV - Model 8NR10T - Model 8NR10AV • Customized solutions for all types of installation CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
AIR IR VENTURI I SCRUBBERS 2NR10AV MODEL • Used for medium vacuum pressure drops (up to 4 mBar). • Blower fan activated venturi and H2 dilution. • Scrubbers used for a single or multiple wafer reactors CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
WET VENTURI SCRUBBERS 8NR10T MODEL • Used for high vacuum pressure drops (up to 20 mBar). • Blower fan for H2 dilution only • Water pump activated venturi • Scrubber used for a single or multiple wafer reactors CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
FUNCTIONING The scrubbing of contaminants is made with 2 or 3 steps (depending on the scrubber model ) 3° step (if present) 1° step 2° step Venturi throat → the Scrubbing in the inlet Absorption in the bells → Silica flakes water nozzle is centered packed bed turret , 30s contact → Solid bodies just ahead of the fall in the underneath converging section of tank and float into hose down by a counter the drain by overflow the throat, turbulence current water spray and high gas/water contact absorb condensable gases CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
Reactor gas STEP 1 • Gases are forced to cross into the inner bell thanks to the particular design of the nozzles (water jet) and water path • Gases react with water • Silanes decompose and cristallize in HCl + SiO 2 CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
AUTO CLEANING BELL • Scrubbers are provided with an auto- cleaning bell solution with scrapers to prevent the growth of the silica and, as consequence, the occlusion of the cylinders • A Nitrogen curtain acts as a barrier against the moisture When the shaft is fully extended, diffusing upwards and works also the edge of the ring scraper is for the disributor of the gas at the visible just below the bell head entry port. scrapers CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
STEP 2 The gas mixture flows upwards in the packed tower through a packed bed with high contact surface area Eco Fill ring for packed bed The contact time is from 13s to 30s; turbulent gas pattern and mass transfer by impact mode Final dilution of Silanes, HCl and Hydrides, flowing downwards in the base tank The residuals proceeds to step three (if present) CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
Venturi throat STEP 3 (if if present) Exhausted gases • The third step is present only for wet venturi scrubbers • A piezoelectric transducer reads the required pressure • Pressure readings feed back to the Water from inverter that regulates pump or fan pump speed (it depends on the model) in order to keep constant pressure • A Venturi effect is created in the venturi throat and the contaminants are removed during the water-air contact • Exhausted gas are discharged through the chimney with blower fan for dilution CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
H2 DIL ILUTIO ION Scrubbers are designed to provide a dilution system of the H 2 exhausted thanks to a fan blower in order to keep the H 2 concentration at outlet lower than 2% (safety value). This means that the machinery has no need of additional system for dilution but is enough a simple Exhausted gas connection with the drain pipe for gases CIRECO S.r.l. - Via G. PUCCINI, 12 - 20028 SAN VITTORE OLONA (MI) - Tel +39 0331 200.141 Fax +39 0331 281.300 info@cirsrl.com www.cireco.it P.IVA-C.F. 02776530129 Iscrizione Registro Imprese di MILANO R.E.A. 1495209
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