SLIDE 9 8
- Blisters are formed at low energy dose phase, and grown with merging.
- Blisters are burst and destroyed in high energy dose
- Grain oriented re-formation of 2nd blister is generated in trace of full bursting and
enlarged with increment of energy dose
Results 2. : Blister Growth Characteristics with Energy Dose
768 MJ/m2 (100 eV, 4.80 x 1025 m-2)
Increase energy dose
318 MJ/m2 (100 eV, 1.99 x 1025 m-2) 159 MJ/m2 (100 eV, 9.96 x 1024 m-2) 80 MJ/m2 (100 eV, 4.98 x 1024 m-2) Bursting Growth of 2nd blister
2 μm 2 μm 2 μm 2 μm 400 nm
Blister formation & growth Blister merging
400 nm
Side Bursting
400 nm
Re-formation of 2nd Blister Traces of full bursting
400 nm
Re-formation of 2nd Blister after full bursting
Cross section
Growth of 2nd Blister