EE 213, Microscopic Nanocharacterization of Materials Class website: - - PowerPoint PPT Presentation

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ee 213 microscopic nanocharacterization of materials
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EE 213, Microscopic Nanocharacterization of Materials Class website: - - PowerPoint PPT Presentation

Oct 13, 2023 490 likes •916 views

EE 213, Microscopic Nanocharacterization of Materials Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190 Admin. Asst.

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EE 213, Nanocharacteriza2on/M.Isaacson

EE 213, Microscopic Nanocharacterization of Materials

Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190

  • Admin. Asst. Rachel Cordero: rcordero@soe.ucsc.edu, 831-459-2921
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S = NJσYF S = signal in counts/sec

N = # atoms in volume probed J = current density in probe (#/area/sec) σ = cross section for interaction (area) Y = yield of process to be detected F = efficiency of collection

EE 213, Nanocharacteriza2on/M.Isaacson

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Kab

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EE 213, Nanocharacteriza2on/M.Isaacson

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Beer’s law

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Inelastic mean free path for electron scattering

From Seah and Dench, 1979. Surf. and Interface Anal.1.36

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Absorption length

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From D.Kyser

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100 nm Aluminum Film Self-Supported on Silicon Fingers

secondary electron image

  • M. Isaacson and K. Lin

SE only SE + SE(BSE)

EE 213, Nanocharacteriza2on/M.Isaacson

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Elas2c sca9ering

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Langmore, Wall and isaacson. Op2k.38(4).(1973).335-350.

Z3/2

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MITIO INOKUTI

  • Rev. Mod. Phys. 43, 297 (1971)
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From MSI, Cornell AEP 661 notes

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Xray and Auger Electron Yields

Cambridge University Press

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Siegnahn, et.al. ESCA. 1967

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Calcula2ons of K shell excita2on by electrons

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Nanodevices Require Atomic Characterization Scanning Transmission Electron Microscope

/ heavy atoms

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Single atom imaging by annular dark field (ADF) STEM

Chicago STEM ~1975 Nion UltraSTEM 2007 Nion UltraSTEM 2010 40 keV: 2.5 Å Au atom 100 keV: 1 Å Au atom 200 keV: 0.6 Å Au atom The resolution has improved, and so has the stability. In ADF STEM, the potential well around the nucleus is imaged. ADF STEM can thus potentially show atoms as only about 0.3 Å large. From Ondrej Krivanek

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EELS from nucleic acid bases

From: M. Isaacson, 1972

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Energy Loss Spectra of Metal Fluorides

  • M. Scheinfein and M. Isaacson, J.Vac.Sci.Tech.B4(1) 1986. 326 – 332.
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Inelastic mean free path for electron scattering

From Seah and Dench, 1979. Surf. and Interface Anal.1.36

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Electron Sca9ering from Solid Sample (“reflec2on”)

How can we distinguish Auger peaks from ELS peaks?

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