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EE 213, Microscopic Nanocharacterization of Materials Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190 Admin. Asst.

EE 213, Microscopic Nanocharacterization of Materials Class website: https://ee213-winter16-01.courses.soe.ucsc.edu Time/place: Tu/Th 10-11:45am. Baskin 156 Mike Isaacson, Baskin 237 Email: msi@soe.ucsc.edu Tele: 831-459-3190 Admin. Asst. Rachel Cordero: rcordero@soe.ucsc.edu, 831-459-2921 EE 213, Nanocharacteriza2on/M.Isaacson
S = NJ σ YF S = signal in counts/sec N = # atoms in volume probed J = current density in probe (#/area/sec) σ = cross section for interaction (area) Y = yield of process to be detected F = efficiency of collection EE 213, Nanocharacteriza2on/M.Isaacson
K ab
EE 213, Nanocharacteriza2on/M.Isaacson
Beer’s law
Inelastic mean free path for electron scattering From Seah and Dench, 1979. Surf. and Interface Anal.1.36
Absorption length
From D.Kyser
100 nm Aluminum Film Self-Supported on Silicon Fingers secondary electron image SE only SE + SE(BSE) M. Isaacson and K. Lin EE 213, Nanocharacteriza2on/M.Isaacson
Elas2c sca9ering
Z 3/2 Langmore, Wall and isaacson. Op2k.38(4).(1973).335-350.
MITIO INOKUTI Rev. Mod. Phys. 43, 297 (1971)
From MSI, Cornell AEP 661 notes
Xray and Auger Electron Yields Cambridge University Press
Siegnahn, et.al. ESCA. 1967
Calcula2ons of K shell excita2on by electrons
EE 213, Nanocharacteriza2on/M.Isaacson
Nanodevices Require Atomic Characterization / heavy atoms Scanning Transmission Electron Microscope EE 213, Nanocharacteriza2on/M.Isaacson
Single atom imaging by annular dark field (ADF) STEM Chicago STEM ~1975 Nion UltraSTEM 2007 Nion UltraSTEM 2010 � 40 keV: 2.5 Å Au atom 100 keV: 1 Å Au atom 200 keV: 0.6 Å Au atom � The resolution has improved, and so has the stability. � In ADF STEM, the potential well around the nucleus is imaged. ADF STEM can thus potentially show atoms as only about 0.3 Å large. � From Ondrej Krivanek
EELS from nucleic acid bases From: M. Isaacson, 1972
Energy Loss Spectra of Metal Fluorides M. Scheinfein and M. Isaacson, J.Vac.Sci.Tech.B4(1) 1986. 326 – 332.
Inelastic mean free path for electron scattering From Seah and Dench, 1979. Surf. and Interface Anal.1.36
Electron Sca9ering from Solid Sample ( “ reflec2on ” ) How can we distinguish Auger peaks from ELS peaks?

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