Colibrys ACCELERATION TILT SENSORS 9/7/2016 This document and the - PowerPoint PPT Presentation

Colibrys ACCELERATION TILT SENSORS 9/7/2016 This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

TS family Tilt sensors 1. Colibrys 3. Applications 4. TS family 2. What is tilt MEMS products measurement? technology specifications 6. Conclusions 7. Sources of 8. Annexes 5. Introducing information TS9001: • Product architecture • Specifications: bias performance, bias stability • Competitive landscape 2 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

OUR VISION World leader for high-end , robust MEMS sensors, supported by a commitment of excellence over the long term Partner of choice for who wants to pioneer in innovative high performance MEMS 3 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

OUR MISSION Being the strategic partner for MEMS technology within the Safran group, Safran Colibrys is a worldwide leader in the high-end MEMS accelerometer market 4 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

MEMS capacitive technology 2 Mechanics • Spring-mass system • Large mass and small gap • Controlled gas damping 1 ADC MEMS MEMS ASIC • Silicon micro-machined sensor chip • High-end dual side alignment and photolitho • 3 wafers assembly by silicon fusion bonding (SFB)  3D Bulk Technology 5 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Colibrys key differentiation: Bulk micromachining Surface micro-machining Bulk micro-machining - In plan - Out of plan Sensor design displacement displacement - Thin proof mass - Thick proof mass - Gap control by photolithography and Gap control - Gap control by oxide growth (precision 1.5%) DRIE etching (precision 17%) - Gap of ~2µm ±300Å - Gap of ~4 to 6µm ± 10’000Å - 5 to 15 milligrams - 0.03 to 0.3 milligrams Mass - Much lower Brownian noise and better - Larger noise and lower stability stability due to larger mass - 2 x 15 to 50pF - 2 x 2 to 5pF Capacitor - Much larger capacitances: required for - Larger noise and lower stability low noise and high stability - Smaller in size - Larger in size - Up to three axis possible with one - Only one axis single die - Hybrid assembly Manufacturing - Monolithic - Longer etching time - MEMS above IC due to mass thickness (>350µm). - Rapid etching due to small thickness of - More expensive and larger but better the mass (thickness ~5 to 10µm) performances (no compromises) - Lower manufacturing cost 6 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Colibrys key differentiation: Bulk micromachining Surface micro-machining Bulk micro-machining - In plan - Out of plan Sensor design displacement displacement Bulk micromachining - Thin proof mass - Thick proof mass - Gap control by photolithography and Gap control - Gap control by oxide growth (precision 1.5%) DRIE etching (precision 17%) combined with hybrid - Gap of ~2µm ±300Å - Gap of ~4 to 6µm ± 10’000Å - 5 to 15 milligrams - 0.03 to 0.3 milligrams Mass assembly offer the best - Much lower Brownian noise and better - Larger noise and lower stability stability due to larger mass - 2 x 15 to 50pF - 2 x 2 to 5pF Capacitor opportunity for high-end - Much larger capacitances: required for - Larger noise and lower stability low noise and high stability - Smaller in size performances - Larger in size - Up to three axis possible with one - Only one axis single die - Hybrid assembly Manufacturing - Monolithic - Longer etching time - MEMS above IC due to mass thickness (>350µm). - Rapid etching due to small thickness of - More expensive and larger but better the mass (thickness ~5 to 10µm) performances (no compromises) - Lower manufacturing cost 7 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

What is Tilt measurement? Fig. 2. Tilt sensor output vs rotation at 360° What is Tilt? Tilt is an angle of object inclination with respect to terrestrial gravity vector (1G). Fig. 1. tilt angle  g   [ ] 1 cos( ) Tilt sensor position a g 8 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

STANDARD PERFORMANCES: TS9001 – 1G STATIC MEASUREMENTS UP TO +/-90°  Geotechnical monitoring of critical locations: in-place inclinometers  Civil Engineering: survey and SHM  Railways: train positioning systems  Military: levelling antennas 9 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

STANDARD PERFORMANCES TS8002 – 2G STATIC 3D MEASUREMENTS OR VIBRATION ENVIRONMENTS  Drilling: logging while drilling (LWD)  Railways: train tilt systems  Naval – Military: sonar towed arrays antenna  Industrial: construction machines 10 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

HIGH PERFORMANCES: TS1000T – 2,5,10G ENERGY SECTOR, HIGH TEMPERATURE  High precision tilt measurement is required for harsh environments, high depth exploration in Energy market - Oil and Gas extraction, Fracking, Mining...  TS1000T target applications in Energy market :  MWD (Measurement While Drilling)  HDD (Horizontal Directional Drilling)  Orientation of borehole logging instruments. 11 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

How to choose an accelerometer for the energy market? System accuracy Sectors of energy applications Logging Borehole Wireline, Measurement HDD, survey survey inplane, While Drilling orientation of inclinometers (MDW) logging instruments < 0.1° all error, EOL < 0.5-1° all error, EOL - 40°C + 125°C 12 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

TS family products: specifications Colibrys Tilt Products Unit TS9001.D TS8002.D TS1002T Datasheet Tilt measurement What does it define for Range Typ. (1 σ ) +/- 1 g (+/-90°) +/- 2g +/- 2g key parameters tilt measurement ? Bias temperature °/°C <0.006 0.012 0.0086 coeficient Bias long term System long lifecycle without re- Bias Long term stability ̽ ° < 0.043 < 0.086 <0.114 stability calibration; maintenance economy; long term accuracy Scale factor mV/g 2000 1000 1350 Non linearity Better SF accuracy Scale factor temperature ppm/°C 100 100 120 coeficient Noise Resolution – lowest acceleration measured Scale Factor long term ppm 300 300 1000 Stability (one Year) Reliability of Long lifecycle, repeatability of parameters performances, tight spread Resolution @ 1Hz ° 0.0025 0.0057 0.0004 Noise (in Band) [° /√Hz] 0.0005 0.001 0.0004 Consumption Adapted for autonomous system, especially for civil Non- Linearity % FS <1 < 0,3 <1 Engineering Operating temperature [°C] -40 to 125°C -40 to 125°C - 50+175 * the test conditions for the TS1000T are more severe Shock (single shock) [g] 6000 6000 6000 compared to other Colibrys sensors Consumption mW 2 2 9.9 Package LCC20 LCC48 LCC20 13 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran

Essential Tilt applications for TS product family  The main differentiation factor of Colibrys sensors – accurate functioning in harsh environments, performance long term stability, high reliability  Those features are indispensable for tilt applications in 4 targeted by TS Family Markets : Energy Civil Military Railways Engineering 14 Colibrys / Confidential / Tilt presentation This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran