Alan Feinstein, Nanomotion Ltd. Confidential Page 1 Introduction - - PowerPoint PPT Presentation

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Performance and Applications of L1B2 Ultrasonic Motors Alan Feinstein, Nanomotion Ltd. Confidential Page 1 Introduction Compact ultrasonic motors Principle of operation: transferring electrical energy into mechanical momentum by

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Performance and Applications of L1B2 Ultrasonic Motors

Alan Feinstein, Nanomotion Ltd.

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Introduction

 Compact ultrasonic motors

– Principle of operation: transferring electrical energy into mechanical momentum by frictionally coupling a vibrating elastic stator to a moving stage

 Technology Advantages

– High power density – Unlimited travel – Direct drive – Compact dimensions – High resolution – High dynamic range – Fast response time – Superior ―move and settle‖ performance – Built in brake – Built in ―clutch‖ – No intrinsic magnetic field / No EMI – UHV Compatible

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The Piezoelectric Effect

 Direct Effect:

– Converts mechanical strain into electric charge – This effect is used in microphones, accelerometers, gas lighters etc.

 Reverse Effect:

– Converts electrical fields into crystal deformation – An effect used for generating vibrations and motion in actuators, transducers etc.

F F

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Quadratic electrode design producing L1&B2 vibration modes by diagonal excitation

L1B2 Ultrasonic Motor – Basic Principles

Stiff bearing for backing the ceramic strip

Side spring with side bearing mechanism for backlash free motion

Hard ceramic tip and strip enable friction force transfer Back spring maintain constant tip contact force Bending Mode Longitudinal Mode

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Architecture of a Precision Motion Solution

Closed loop motion control

– Ultrasonic motor coupled to a motion axis – Motor driver – Motion controller – Position feedback (position encoder)

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Basic Driver Design

Translates controller command to motor voltage

Motor Velocity to Controller Command relationships:

– With dead zone – Without dead zone – Actuator mode, for increased accuracy near the target area

Nanomotion AB1A driver*, HR type motor Nanomotion AB5 driver*, HR type motor

* Nanomotion Ltd. User Manual HR Motors. Available online: http://www.nanomotion.com/wp-content/ uploads/2015/09/HR00458000-00-HR-Motor-User-Manual.pdf.

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Basic Driver Design

 Coupling between the mechanical resonance of a vibrating piezo-

ceramic and the electrical resonance of an AC driving circuit

– Relatively high vibration amplitude – Low DC supply voltages – High efficiency in (low) DC to (high) AC voltage conversion

  • Small driver can power a large number of motors in parallel

Nanomotion AB1A driver* architecture

*AB1A Driver . Available online: http://www.nanomotion.com/wp-content/uploads/2015/01/AB1A458000-00-User-Manual-AB1A1.pdf .

Diagram of the output stage with an internal LC card (single channel with a direction switch)

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Open Loop Motion Generation

 Force-Velocity Performance determined by:

– Amplitude and Frequency of tip motion

  • Element Geometry
  • d31 piezoelectric coefficient
  • Amplitude of the applied electric field
  • Quality of the mechanical and electrical resonances

– Friction Forces: element Preload force and Friction Coefficient

  • Correct choice of the friction couple materials

 Velocity Profile

– 𝑊 𝑢 = 𝑊

𝑛𝑏𝑦 𝐷

∙ 1 − 𝑓−𝑢

𝜐 , 𝜐 =

𝑛𝑊

𝑛𝑏𝑦

𝐺

𝑛𝑏𝑦

– 𝐺

𝑛𝑏𝑦 = Maximal Force

– 𝑊

𝑛𝑏𝑦 = Maximal Velocity

– 𝑛 = moving mass – 𝑊

𝑛𝑏𝑦 𝐷

= Max. Vel. at a given command level

Nanomotion HR2 motor Nanomotion AB1A driver Linear motion axis (mass 235 gram)

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Closed Loop Control Scheme

Closed Loop Control

– High bandwidth PIV controller with a non-linear mechanism – Servo loop special position control elements

  • Offset mechanism—provides an initial command starting value to overcome the inherent dead

zone

  • Zero Feed Forward mechanism—improves the stage settling time
  • Dead Zone mechanism—takes advantage of the motor intrinsic friction to prevent jitter and

improve settling time

* Nanomotion Ltd. XCD Software Version 1.4.0.7. Available online: http://www.nanomotion.com/wp- content/uploads/2014/05/XCD-software-version-1-4-0-7.pdf.

Motion controller servo loop block diagram Nanomotion XCD controller*

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Operational Conditions

 Proper choice of materials allows smooth motor

  • peration

– In a high vacuum (e.g. Nanomotion high vacuum motors) – In a clean room (e.g. Nanomotion motors for semiconductor metrology) – Wide Temperature range

  • NM standard HR motors: from 0° to +50°C
  • NM Edge motors: from -55° to +80°C
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Example: Positioning Accuracy

NM HR8-V motor, linear stage with a 0.5 kg mass (FB75-100-HR8 stage)

– 10 mm movements back and forth – Settling time < 100 ms – Settling window <50 nm

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Example: Positioning Accuracy w/DC mode

NM HR8-V motor, linear stage with a 0.5 kg mass 4 nm step

Peled, G.; Yasinov, R.; Karasikov, N. Performance and Applications of L1B2 Ultrasonic Motors. Actuators 2016, 5, 15.

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Example: High Accuracy Metrology Stage

 28 kg inspection stage, NM HR motors, DC mode active

– 1 mm steps, at 3 mm/s, 100 mm/s^2 – Convergence target radius: 10 nm – Position error after each step < 2 nm – Drift Specification: less than 2 nm in 2.5 hours

Position Drift 3 hours after the end of motion Position Error after each 1mm step

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Example: High Accuracy Metrology Stage

 28 kg inspection stage, NM HR motors, DC mode active

1 mm steps, at 3 mm/s, 100 mm/s^2

Position error after each step < 2 nm Example Convergence to less than 30 nm in 100 ms, to less than 2 nm in 200 ms

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Example: Positioning Accuracy – Rotary stage

Nanomotion FBR60, powered by two NM HR2 vacuum motors

Consecutive 90° moves

Position error is measured 10 seconds after the end of motion

Peled, G.; Yasinov, R.; Karasikov, N. Performance and Applications of L1B2 Ultrasonic Motors. Actuators 2016, 5, 15.

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Example Applications – Vacuum/Space

NM HR2 vacuum motor

230 gram linear vacuum stage

Operating in high vacuum (1E-6 Torr) – Back and forth 1.8 mm steps – 90 million cycles – 40 mm/s velocity – Average rms position error below 3 um

Motion Profile

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Example Applications – Semiconductor Metrology

 Example

Semiconductor and Metrology stages

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Example Applications – Optics/Optronics

 NM Edge type motor

– Max. vel. > 200 mm/s, a – Max. (stall) force > 0.35 N – Motor Stiffness > 0.06 N/µm

 Example NUC shutter stage

– 15 grams – Aperture area: 14.7 × 17.0 mm – Open/Close time: 150 ms

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Markets Served

Semiconductors Medical Defense

Custom solutions

Building blocks

components

Markets

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Standard components

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Building Blocks –Subsystems- Solutions