SLIDE 1
- A CAD/CAM approach for layer
A CAD/CAM approach for layer-
- based FIB processing
- µ
A CAD/CAM approach for layer- -based FIB processing based FIB - - PowerPoint PPT Presentation
A CAD/CAM approach for layer- -based FIB processing based FIB - - PowerPoint PPT Presentation
A CAD/CAM approach for layer- -based FIB processing based FIB processing A CAD/CAM approach for layer
SLIDE 2
SLIDE 3
- CHARPAN project
CHARPAN Technical Principle
CHARPAN POC tool: 43.000 ion beams working in parallel within 25 µm x 25 µm exposure field 1st Lens Stopping Plate at Beam Cross-Over 2nd Lens Substrate / Stage Deflected Beamlets
APS
programmable Aperture Plate System
200x reduction electrostatic ion projection optics Ion Source Condenser Optics Aperture Plate Blanking Plate Deflecting Electrodes
SLIDE 4
- CHARPAN project
Aperture Plate Blanking Plate
(MEMS on CMOS chip)
ion beam from single source
Blanking & Ground Electrodes
10 10 -
- 25 nm at Substrate
25 nm at Substrate 2 2 -
- 5
5 µ µm m 200x 200x unblanked beam blanked beam
programmable Aperture Plate System (APS)
SLIDE 5
- CHATPAN tool performance
SLIDE 6
- 3D data creation
CAD software
Data export
STL manipulation software
Data validation and repair Slicing of the STL model
GDSII translator and viewer
Setting-up of process parameters
Lithography software
FIB data processing
STL translator Simulation software
Approach
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- Proc. IMechE, Part B, accepted
SLIDE 7
- 3D data creation
CAD software Data export STL manipulation software Data validation and repair Slicing of the STL model GDSII translator and viewer Setting-up of process parameters Lithography software FIB data processing STL translator Simulation software
3D data creation and export
SLIDE 8
- 3D data creation
CAD software Data export STL manipulation software Data validation and repair Slicing of the STL model GDSII translator and viewer Setting-up of process parameters Lithography software FIB data processing STL translator Simulation software
Data validation and repair
SLIDE 9
- Layer-by-layer
Grey tone
3D data creation CAD software Data export STL manipulation software Data validation and repair Slicing of the STL model GDSII translator and viewer Setting-up of process parameters Lithography software FIB data processing STL translator Simulation software
Slicing of the STL model
SLIDE 10
- 22800 kB *
2400 KB * 16840 KB 5000 KB 0.16 nm 102000 22800 kB * 2400 KB * 63000 KB 17100 KB 0.044 nm 348000 File size (from STL in binary format) 63 layers 569 layers File size Binary ASCII Error Number of triangles GDSII stream STL data (10x10 arrays square lenses)
Errors due to surface faceting
SLIDE 11
- Data compatibility
CATS screen shots of the top GDSII layer (# 52) segmented in trapezoids for e-beam patterning with a resolution of: a) 10 nm, b) 5 nm and c) 1 nm. CATS screen shots of the lens GDSII model prepared for e-beam pattering with a resolution of 1 nm: a) layers 49 to 52; b) layers 39 to 52.
SLIDE 12
- 3D data creation
CAD software Data export STL manipulation software Data validation and repair Slicing of the STL model GDSII translator and viewer Setting-up of process parameters Lithography software FIB data processing STL translator Simulation software
IonShaperTM ??? GEANT4 ???
Setting-up of process parameters
before sputtering sputtered 250 nm
ion intensity optimized with Ionshaper
SLIDE 13
- 3D data creation
CAD software Data export STL manipulation software Data validation and repair Slicing of the STL model GDSII translator and viewer Setting-up of process parameters Lithography software FIB data processing STL translator Simulation software
Elphy Quantum Lithography hardware and software
FIB data processing
SLIDE 14
- Template manufacture
2 um
NIL imprinting (S-FIL)
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