A novel technique to improve the quality of ex-situ lift-out FIB - - PowerPoint PPT Presentation

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Nov 26, 2022 380 likes •545 views

A novel technique to improve the quality of ex-situ lift-out FIB foils Anja Schreiber and Richard Wirth Helmholtz Centre Potsdam GFZ German Research Centre for Geosciences Focused Ion Beam (FIB): site-specific TEM sample preparation FIB

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A novel technique to improve the quality of ex-situ lift-out FIB foils

Anja Schreiber and Richard Wirth

Helmholtz Centre Potsdam GFZ German Research Centre for Geosciences

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Focused Ion Beam (FIB): site-specific TEM sample preparation

FIB systems operated at GFZ Potsdam

FEI FIB 200 TEM FEI Quanta 3D

image courtesy Anja Schreiber, GFZ, Potsdam

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out experimental setup

Sample chamber open, stage in horizontal position with specimen holder (from Quanta system) attached. TEM grid in specimen holder seen from above.

Selective thinning of a FIB foil on a perforated carbon film on a TEM grid

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out experimental setup

Selective thinning of a FIB foil on a perforated carbon film on a TEM grid

Stage tilted at 35°

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

FIB foil on a perforated carbon film on a TEM grid

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5 um 2 um

Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Additional selective thinning of an existing TEM foil Milling conditions: 11pA; 30keV; 35°

Operation conditions: 30 keV; 11pA

HAADF image Al2O3 with Ti-Nb-oxide nanoinclusions

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

HAADF image

2000 nm

riginal thickness (first milling)

second milling third milling

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5 um 2 um

Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Additional selective thinning of an existing TEM foil

Operation conditions: 30 keV; 11pA

HAADF image Al2O3 with Ti-Nb-oxide nanoinclusions

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

Fe-carbon nitride inclusions in diamond (Juina, Brazil)

HAADF image (Z-contrast + diffraction contrast) diamond graphite

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

Fe-carbon nitride inclusions in diamond (Juina, Brazil)

HAADF image (Z-contrast + diffraction contrast) diamond graphite

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Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out

Fe-carbon nitride inclusions in diamond (Juina, Brazil)

HAADF image (Z-contrast + diffraction contrast) diamond graphite

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Focused Ion Beam (FIB) TEM sample preparation:

Transmission Kikuchi Diffraction (TKD) in SEM

Experimental setup

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Focused Ion Beam (FIB) TEM sample preparation:

Transmission Kikuchi Diffraction (TKD) in SEM

SEM image Colour coded orientation maps

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