A novel technique to improve the quality of ex-situ lift-out FIB - PowerPoint PPT Presentation

Nov 26, 2022 •380 likes •543 views

A novel technique to improve the quality of ex-situ lift-out FIB foils Anja Schreiber and Richard Wirth Helmholtz Centre Potsdam GFZ German Research Centre for Geosciences Focused Ion Beam (FIB): site-specific TEM sample preparation FIB

A novel technique to improve the quality of ex-situ lift-out FIB foils Anja Schreiber and Richard Wirth Helmholtz Centre Potsdam GFZ German Research Centre for Geosciences
Focused Ion Beam (FIB): site-specific TEM sample preparation FIB systems operated at GFZ Potsdam FEI FIB 200 TEM FEI Quanta 3D image courtesy Anja Schreiber, GFZ, Potsdam
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out 4
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out experimental setup Selective thinning of a FIB foil on a perforated carbon film on a TEM grid Sample chamber open, stage in horizontal TEM grid in specimen holder seen from position with specimen holder (from Quanta above. system) attached.
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out experimental setup Selective thinning of a FIB foil on a perforated carbon film on a TEM grid Stage tilted at 35 °
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out FIB foil on a perforated carbon film on a TEM grid
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Additional selective thinning of an existing TEM foil Milling conditions: 11pA; 30keV; 35 ° Operation conditions: 30 keV; 11pA 5 um 2 um HAADF image Al 2 O 3 with Ti-Nb-oxide nanoinclusions
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out original thickness (first milling) 2000 nm second milling third milling HAADF image
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Additional selective thinning of an existing TEM foil Operation conditions: 30 keV; 11pA 5 um 2 um HAADF image Al 2 O 3 with Ti-Nb-oxide nanoinclusions
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Fe-carbon nitride inclusions in diamond (Juina, Brazil) diamond graphite HAADF image (Z-contrast + diffraction contrast)
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Fe-carbon nitride inclusions in diamond (Juina, Brazil) diamond graphite HAADF image (Z-contrast + diffraction contrast)
Focused Ion Beam (FIB) TEM sample preparation: ex situ lift out Fe-carbon nitride inclusions in diamond (Juina, Brazil) diamond graphite HAADF image (Z-contrast + diffraction contrast)
Focused Ion Beam (FIB) TEM sample preparation: Transmission Kikuchi Diffraction (TKD) in SEM Experimental setup
Focused Ion Beam (FIB) TEM sample preparation: Transmission Kikuchi Diffraction (TKD) in SEM SEM image Colour coded orientation maps

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