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Silicon nitride based TriPleX Photonic Integrated Circuits for sensing applications Arne Leinse a.leinse@lionix-int.com 2 11-Dec-18 Micronano Conference 2018 Our chips drive your business 2 What are Photonic ICs (PICs)? Photonic


  1. Silicon nitride based TriPleX Photonic Integrated Circuits for sensing applications Arne Leinse a.leinse@lionix-int.com 2 11-Dec-18 Micronano Conference 2018 Our chips drive your business 2

  2. What are Photonic ICs (PICs)? Photonic Integrated Circuits (PICs) are devices • on which several optical components are integrated; PICs are usually fabricated using a wafer-scale • technology using substrates of silicon, silica or InP; Most PICs use waveguides to allow the • realization of couplers, filters, power splitters, combiners and active elements with optical gain or attenuation; • A PIC by itself is not a product! Interfacing with fibers or free-space • Interfacing with electronics • Thermal interfacing • Mechanical support • 11-Dec-18 Micronano Conference 2018 Our chips drive your business 3

  3. 4 TriPleX TM : some geometries...  Adjustable polarization properties (sensors  telecom)  Low optical attenuation  Small bend radii (small footprint!)  Design by geometry  Silicon and glass compatible  Spot size converters 11-Dec-18 Micronano Conference 2018 Our chips drive your business 4

  4. Optical Coherence Tomography (OCT) Forensics/biometrics fingerprint identification Dermal imaging optical biopsies 11-Dec-18 Micronano Conference 2018 Our chips drive your business 5

  5. Optical Coherence Tomography (OCT) Common path interferometer CCD Optical power (a.u.) Arrayed 800 nm 850 nm 900 nm Waveguide Grating based In- and output spectrometer Second stage AWG First stage AWG 11-Dec-18 Micronano Conference 2018 Our chips drive your business 6

  6. Optical Coherence Tomography (OCT) system response mirror distance (  m ): 1.0 0 30 50 100 150 200 250 300 350 400 OCT signal (a.u.) 0.5 0.0 0 200 400 600 800 depth(  m) 11-Dec-18 Micronano Conference 2018 Our chips drive your business 7

  7. Evanescent field sensing 11-Dec-18 Micronano Conference 2018 Our chips drive your business 8

  8. Evanescent field sensing Shift of resonance peak of phase shift induced by change in refractive index or adsorbed layer thickness SHIFT FSR Signal amplitude MRR 1/Wavelenght SHIFT FSR Signal amplitude aMZI 1/Wavelenght 11-Dec-18 Micronano Conference 2018 Our chips drive your business 9

  9. Evanescent field sensing 11-Dec-18 Micronano Conference 2018 Our chips drive your business 10

  10. Evanescent field sensing 25000 4500 PBS 4000 aMZI 20000 3500 Shift (picometer) aMZIs Shift (picometer) 3000 15000 2500 2000 10000 1500 Thrombin 1000 5000 MRRs 500 MRR 0 0 0 100 200 300 400 500 600 700 0 300 600 900 1200 1500 Time (s) Time (s) Response of sensors to different Binding of thrombin onto aptamer modified sensor sucrose concentrations in demi  Difference in signal yield: aMZI /MRR ≈ 10.5 Prototype sensor chip with  aMZI sensitivity can be tuned by design MRRs and aMZIs in one chip 11-Dec-18 Micronano Conference 2018 Our chips drive your business 11

  11. Narrow linewidth laser - Gas Sensing  Accurate wavelength control enables accurate readout of absorption spectra of gasses.  In adddition to 1550 range other wavelength ranges possible by using different gain sections 11-Dec-18 Micronano Conference 2018 Our chips drive your business 12

  12. Narrow linewidth laser  Double ring reflector, attached to Gain Laser output Heating 1 ring Input and reflected light Causes spectrum to hop across wavelengths 11-Dec-18 Micronano Conference 2018 Our chips drive your business 13

  13. Narrow linewidth laser 11-Dec-18 Micronano Conference 2018 Our chips drive your business 14

  14. Narrow linewidth laser - Gas Sensing Photodiode Tunable Laser Sensor 11-Dec-18 Micronano Conference 2018 Our chips drive your business 15

  15. Micronano Conference 2018 16 PIC access Application specific design area Laser 11-Dec-18 Our chips drive your business 16

  16. Micronano Conference 2018 17 16 th run 17 th run 18 th run Tape out 28 Feb 2019 31 July 2019 30 Nov 2019 Devices ready 30 June 2019 20 Dec 2019 30 Apr 2020 https://photonics.lionix-international.com/mpw-service/ Special academic discount 11-Dec-18 Our chips drive your business 17

  17. Micronano Conference 2018 18 Q&A 11-Dec-18 Our chips drive your business 18

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