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Seeing glass in a new light: Chalcogenide glass-enabled integrated photonics Juejun (JJ) Hu Materials Science & Engineering, MIT Juejun (JJ) Hu PMAT hujuejun@mit.edu Former Members & Collaborators PMAT T @ Lan Li Tian Gu Derek

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SLIDE 1

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Seeing glass in a new light: Chalcogenide glass-enabled integrated photonics

Juejun (JJ) Hu Materials Science & Engineering, MIT

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SLIDE 2

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

PMAT T @

Funding support Former Members & Collaborators Kathleen Richardson Tian Gu Derek Kita Jerome Michon Ying Pan Qingyang Du Sarah Geiger Duanhui Li Shaoliang Yu Skylar Deckoff-Jones Carlos-Rios Ocampo Yifei Zhang Samuel Serna Mikhail Shalaginov Jun Qin Lan Li Hongtao Lin Anu Agarwal

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SLIDE 3

On-chip Sensing Metasurfaces 2-D material photonic integration Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics

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SLIDE 4

On-chip Sensing Metasurfaces 2-D material photonic integration Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics

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SLIDE 5

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

ChGs enabling substrate-agnostic integration

Epitaxy-free deposition Low deposition temperature

Cl F At Br I P N Bi As Sb S O Po Se Te Al B Tl Ga In Si C Pb Ge Sn

Weaker inter-atomic bonds

☺ ☺

Room temperature processing

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SLIDE 6

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Epitaxy-free deposition Low deposition temperature Versatile microfabrication

2 µm

Waveguide loss: 0.5 dB/cm Cavity Q-factor: 1.2 × 106

  • Opt. Lett. 41, 3090 (2016)

Ge23Sb7S70 glass waveguide

ChGs enabling substrate-agnostic integration

☺ ☺ ☺

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SLIDE 7

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Epitaxy-free deposition Low deposition temperature Versatile microfabrication

Chemical stability & inertness

ChGs enabling substrate-agnostic integration

☺ ☺ ☺ ☺

ChG can function as a passivation coating for 2-D materials

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SLIDE 8

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

R ~ 0.2 mm

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SLIDE 9

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Making stretchable photonics out of rigid glass

Grating coupler Resonator Devices on locally stiffened islands interconnected by serpentine waveguides

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Juejun (JJ) Hu hujuejun@mit.edu

PMAT

▪ Before 3000 cycles @ 42% ▪ After 3000 cycles @ 42%

Light Sci. Appl. 7, e17138 (2018)

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SLIDE 11

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

The world is not flat but rather 3-D

Planar device 3-D structure

Create 3-D photonics from planar structures via deterministic deformation

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SLIDE 12

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

3-D photonic fabrication

Delamination On stage Tape removal After buckling On substrate

5 mm

3-D structure

2 mm

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SLIDE 13

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

A sensor for 3-D stress mapping in soft materials

Fibers Fiber array block Device Collagen

A 3-D stress sensor with force sensitivity down to 10 nN

  • Photon. Res. 8, 194-201 (2020)
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SLIDE 14

On-chip Sensing Metasurfaces 2-D material photonic integration Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics

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SLIDE 15

On-chip Sensing Metasurfaces Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics

2-D material photonic integration

  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
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SLIDE 16

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Photonic integration of 2-D materials relies on hybrid transfer

Nature 474, 64-67 (2011)

Fabricated device 2-D layer transfer

Hybrid transfer: × 2-D layer rupture at pattern edges × Weak evanescent interaction × Limited throughput and integration capacity Monolithic integration: ✓ Improved yield and throughput ✓ Flexible 2-D layer placement ✓ Superior alignment accuracy × Material degradation

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SLIDE 17

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Thick dielectric growth on graphene is difficult due to its inert surface

× Direct dielectric deposition often results in defect formation which degrades graphene properties × Atomic layer deposition: low throughput for optical devices

500 1000 1500 2000 2500 3000 Prior to deposition After deposition

TiO2 Mobility (cm

2/Vs)

SiO2

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SLIDE 18

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Compatibility of ChGs with graphene

ChG maintains the structural and optoelectronic properties

  • f graphene

G 2D

  • Nat. Photonics 11, 798 (2017)
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SLIDE 19

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Compatibility of ChGs with other 2-D materials

MoS2 Black phosphorus InSe Hexagonal BN

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SLIDE 20

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

ChGs as a passivation layer for 2-D materials

Black phosphorus 30 nm Ge23Sb7S70 glass film

The multifunctional ChG material

✓ Broadband light guiding medium ✓ Passivation layer for 2-D materials ✓ Gate dielectric

  • Nat. Photonics 11, 798 (2017)
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SLIDE 21

On-chip Sensing Metasurfaces 2-D material photonic integration Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics

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SLIDE 22

On-chip Sensing Metasurfaces 2-D material photonic integration Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)

Chalcogenide photonics

Flexible photonics

  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

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SLIDE 23

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Optical phase change materials (O-PCMs)

Quench Anneal Amorphous Crystalline Index change Dn > 1 Covalent bonding Resonant bonding

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SLIDE 24

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Traditional O-PCMs (Ge-Sb-Te) are optically lossy

Optical losses in O-PCMs are bound by interband absorption at short wavelength and free carrier absorption at long wavelength Short l : Band-to-band absorption (both a- & c-) Long l : Free carrier absorption (c- only)

Band-to-band Free carrier

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SLIDE 25

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

GSST: an extreme broadband transparent phase change alloy

✓ Index change: Dn = 1.7 – 2.1 ✓ Loss: k < 0.01 1 – 18.5 mm (a) 4 – 18.5 mm (c) FOM 100x higher than GST-225

2 4 6 8 10 12 14 16 18 1 2 3 4 5 6 1 2 3 4 5 6

Extinction coefficient k Refractive index n Wavelength (mm)

Dn = 1.7 – 2.1 k < 0.01 Ge2Sb2Se4Te1 (GSST)

  • Nat. Commun. 10, 4279 (2019)
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SLIDE 26

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

30 μm 1 μm 30 μm

Patterned Metasurfaces Subwavelength Pixels GSS4T1 1 2 Vdd Pulse 1 2

Free-space reflective light modulator pixel

  • Nat. Commun. 10, 4279 (2019)
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SLIDE 27

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Switching of free-space reflective pixel

22% absolute reflectance contrast

2 4 6 8 10 12 14 0.0 0.1 0.2 0.3 0.4

Reflectance Time [s]

Consistent 1,000 cycle switching

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SLIDE 28

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Electrically switchable metasurface based on GSST

First demonstration of electrically switchable metasurface based on O-PCMs

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SLIDE 29

Juejun (JJ) Hu hujuejun@mit.edu

PMAT

Switchable metasurface: multi-state operation

Amorphous Crystalline

500 ms – variable voltage 5 µs – 24.5 V

1200 1300 1400 1500 1600 10 20 30 40

Reflectance (%) Wavelength (nm) Half-octave (480 nm) spectral tuning Increasing voltage 9.5 V 11.3 V

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SLIDE 30

On-chip Sensing Metasurfaces 2-D material photonic integration Flexible photonics Nonreciprocal & nonlinear optics Optical phase change materials

Photonic Materials Research Group (PMAT)

  • Appl. Phys. Lett. 114, 051103 (2019)
  • Photon. Res. 6, 506 (2018)

Nanophotonics 7, 393 (2018) ACS Photonics 5, 5010 (2018)

  • Photon. Res. 6, B37 (2018)
  • Opt. Express 27, 13781 (2019)
  • Nat. Commun. 9, 1481 (2018)
  • Nat. Commun. (2019)
  • Opt. Lett. 43, 94-97 (2018)
  • Nat. Photonics 11, 798 (2017)
  • J. Opt. 20, 044004 (2018)
  • Nat. Photonics 8, 643 (2014)

Light Sci. Appl. 7, e17138 (2018) Optica 5, 44 (2018)

Chalcogenide photonics