nada technologies, inc. automation solutions and support semicon - - PowerPoint PPT Presentation

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nada technologies, inc. automation solutions and support semicon - - PowerPoint PPT Presentation

Apr 06, 2024 360 likes •550 views

nada technologies, inc. automation solutions and support semicon taiwan presentation automation products - 2007 NADAtech - automation solutions and support wafer automation company formed in 2002 comprised of former PST and Asyst

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nada technologies, inc.

automation solutions and support

semicon taiwan presentation

automation products - 2007

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wafer automation company formed in 2002

comprised of former PST and Asyst employees

45+ combined years in wafer sorter expertise

drawing from global customer experiences

 AMI, Atmel, CSP, Cypress, EM, Fujitsu, Globitech,

Goldstar, Hitachi, HP, IBM, Infineon, Intersil, ITT, KTI, LSI, MXIC, Micron, Motorola, NEC, NFI, Promos, Read-Rite, Samsung, Seiko Epson, Silterra, SMP, Sony, STMicro, TECH, TI, Toyota, TSMC, UMC, Utek, Vanguard, WaferTech, Winbond and more ….

focusing on engineering and customer service for new and existing sorter business and wafer automation

now key player in 1xx / 200mm wafer sorter business

  • ffices in taiwan, malaysia, china

NADAtech - automation solutions and support

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executing business on multiples levels of wafer automation

robotics service / support

robotics parts and spares

inhouse or on-site robotics refurbishing and repair

sorter service / support

sorter parts + automation components spares

sorter and automation engineering

software expertise

upgrade solutions for aging PST/Asyst products

refurbished sorting equipment solutions

new sorting equipment solutions

OEM automation solutions (300mm EFEM and 1xx/200mm handlers)

NADAtech - automation solutions and support

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SLIDE 4

PST sorter philosophy won long term sorter battle

kensington – vertically integrated – gone – all tools in process of being

  • scraped. unsupportable.

ioc - vertically integrated – fading fast – all tools in process of being

  • scraped. unsupportable. as parts die .. tool dies.

  • PST. supportable !!! still in use in fabs that are still open. Micron and

Motorola have tools STILL in use since 1993.

NADAtech has re-adopted this component philosophy.

ISEL, Equipe/PRI/Brooks robotics, Asyst ports, Cognex OCR

all world regions have support for these components due to their popularity.

why we continue this standard --- SIMPLE RELIABLE FAST.

NADAtech - oem component based solutions

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segment development

timeline

2002 parts, service, repairs

2003 parts, service, repairs + sorter upgrades

2004 parts, service, repairs, upgrades + new/refurb 200mm

2005 parts, service, repairs, upgrades, new/refurb 200mm + 300mm

2006 more oem relations 200mm and 300mm

2007 reticle segment started, backside wafer inspection

refurbished equipment

purchasing used PST tools on surplus market

refurbishing / upgrading

new equipment

sorters - 200mm open ,200mm SMIF , 200mm and 300mm

netOCR network based OCR for wide area OCR solution

200mm OEM handlers and 300mm EFEMs

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SLIDE 6

1xx / 200mm sorters

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SLIDE 7
  • em platforms
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latest platform

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SLIDE 9

nadatech studios

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“Sorter+” automation platform ( see separate presentation )

inspection/metrology modules added to E30 compliant sorter for integrated automation solutions

netOCR ( see separate presentation )

network based OCR solution for low cost wide area applications - example: probe floor inkless projects

Asyst/PST upgrades

wide range of offerings to extend legacy tools well beyond

SUREscan

Thrubeam based open cassette wafer mapping

PST upgrade and oem

ChipChecker

Sorter bolt on for wafer bevel chip detection

Detect chips down to .05mm in width

Adds 10 seconds per wafer.

Integrated directly into all sorting functions

additional product offerings

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SLIDE 11

upgrades

SUREscan OEM upgrade

SUREscan for Asyst/PST

RBuilder upgrade for Asyst/PST

OCR upgrades for Asyst/PST

ChipChecker for Asyst/PST

Asyst SMS Robotics Upgrade

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software capabilities

developing sorter software since 1990

evolution from PST pals thru Asyst sms and spartan developments

experiences have culminated in NADAtech’s ns + RBuilder platform

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RBuilder software

ns is NADAtech’s control software

RBuilder is recipe creation tool utilizing simple intuitive scripting

scripts entered via GUI

scripts are text based so recipes are portable and downloadable

multi-carrier selection setups

integrated carrier maps and ocr

SUREscan carrier qc reports slot min/max and std devs

alarms host for outta spec carrier

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powerful scripting language

sample script for complex customer recipe

vendor scribe to inhouse correlation table download

full read and simultaneous randomize (wafer sleuth)

swap of corr ID “05” and “18” to specific slots

all created thru RBuilder GUI interface

  • - top of file --

scribe=Vendor correlate=corrfile.dat readrand a,* swapid ‘05’ to 5 swapid ‘18’ to 18

  • - end of file --
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recipes emulated with RBuilder at one customers site

STANDARD

  • 1. 1-12 & 13-24 SPLIT
  • 2. AUTOSORT A
  • 3. GET 2 & 4 (DESTINATION B)
  • 4. MOVE NO-READ
  • 5. MOVEREAD
  • 6. ODD_EVEN
  • 7. READ SLOT NUMBER
  • 8. READ X
  • 9. READ VENDOR
  • 10. READ WR#2,3,&4
  • 11. RECOMBINE LOT
  • 12. YESort

CMP

  • 1. LOOK AHEAD
  • 2. LOT POLISH
  • 3. LOT RECOMBINE
  • 4. POPS
  • 5. INSPECT

ETCH

  • 1. MOVE - NO READ
  • 2. PICK ONE WAFER AT RANDOM FROM A
  • 3. READ SLOT NUMBER
  • 4. SORTPLUS1
  • 5. SORT_REVERSE
  • 6. SORT_W_DUMMY
  • 7. SORT_WITH_OPEN_SLOT1
  • 8. TRENCH_SORT
  • 9. RANDOM PILOT B to C
  • 10. RANDOM READ A to C
  • 11. PICK RANDOM

THINFILM

  • 1. D8A

REMOTE

  • 1. CORRVIEW
  • 2. CORRSORT
  • 3. 0060 CORRELATE
  • 4. RANDOMIZE_TOP
  • 5. 9500SLEUTH
  • 6. AUTOSORT
  • 7. CORRREAD234
  • 8. DIFFUSION
  • 9. READRANDOM
  • 10. MOVEXSLOT
  • 11. SORTPLUS1
  • 12. YECORRSORT
  • 13. RPNO3
  • 14. VENDORA
  • 15. ALIGN90
  • 16. SLEUTH2
  • 17. DIFFUSIONSW
  • 18. FIND5-6
  • 19. SLEUTH90
  • 20. EMPTY1
  • 21. SLEUTHNO1
  • 22. SLEUTHNO25
  • 23. ETCH5-18
  • 24. CORRFIND5-18
  • 25. DESCMASHSORT
  • 26. RPNO
  • 27. CMP-SLOT
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limited internationalization is available

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SLIDE 18

customer list

recaptured PST/Asyst customers

Freescale MOS11, MOS12, MOS13, EKB

Texas Instruments – world wide 200mm supplier

AMIS, Micron, WaferTech, Atmel, Samsung, ST, MAXIM, SEMATECH

Taiwan - TSMC, UMC, MXIC, ProMOS, VIS, Winbond

Japan - FASL, Micron, Fujitisu, Sony thru Asyst Japan

SEA - Silterra, Chartered, TECH

new customers

Sumco, MEMC, onsemi, cypress, inteliepi (4” GaAs )

Fairchild

recaptured OEMs

Hologenix ( 150/200/300mm slip finder, magic mirror )

new OEMs

Tegal ( efem )

Xitronix ( efem )

Graphtek ( macro defect/residue detection)