Uppsala University
Magnet neto-pl plasmonic asmonic Au/ u/Tb Tb18
18Co
Co82
82
nano nano-ring ring res esona
- nator
Magnet neto-pl plasmonic asmonic Au/ u/Tb Tb 18 18 Co Co 82 82 - - PowerPoint PPT Presentation
Magnet neto-pl plasmonic asmonic Au/ u/Tb Tb 18 18 Co Co 82 82 nano nano-ring ring res esona onator tors s Initial patterning and update by Agn iuiulkait Uppsala University Motivation Fabricate magneto-plasmonic
Uppsala University
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Figure 1. Faraday rotation measured at 600 nm wavelength of incident light for the hybrid structure film
14/09/2018 Uppsala University 4 Electron-beam evaporation of Al2O3 mask Al O Ar milling through an Al2O3 mask remaining after resist removal Ar+ L=400 nm Rout=120 nm Rin L=400 nm Resulting disc or ring square arrays after Ar+ milling through Al2O3 mask R=120 nm Spin-coating of PMMA
Development and removal
PMMA Writing of a disc (or ring) pattern via electron beam lithography e-beam exposure
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14/09/2018 Uppsala University 6 (a) Disc
(b) Thick rings (c) Thin Rings
Figure 2. SEM micrographs of EBL patterned (a) disc, (b) donut and (c) ring arrays.
Sample Nominal radius* Actual radius** Rout, nm Rin, nm Rout, nm Rin, nm a 120 40 125±5 b 60 126±5 30±5 c 80 123±5 60±5 Broken rings*** 100 “Broken” “Broken”
*Nominal radius from the patterning file **Actual radius dimensions measured from SEM micrographs ***Not shown, can be found in Additional information
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Figure 3. Optical transmission measurements of nano- arrays shown in Fig.2.
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Figure 4. Schematic of polar MOKE measurement
Tb18Co82 alloy, exhibit out-of-plane magnetization
µ0H
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Figure 5. Spectroscopic magneto-optical measurements of nano-arrays shown in Fig. 2: (a) Faraday rotation and (b) ellipticity.
(a) (b) x10 x10
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Figure 6. Magnetic Faraday rotation measurements at 600 nm wavelength of nano-arrays.
(a) Discs (b)Donuts (c) Rings (a) Disc
(b) Thick rings (c) Thin Rings
Figure 1. Faraday rotation measured at 600 nm wavelength of incident light for the hybrid structure film
Compare to:
structures, namely, outer diameter becomes slightly larger while the inner – smaller, resulting in thicker rings than expected from the design.
appears as closed discs;
broken rings and lost magnetization of the sample;
extending to IR region for three magnetic arrays of discs, thick and thin rings.
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reduce dimensions from 120 nm outer radius to …
worked on Au/AlOx/TbCo/AlOx multilayer);
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Patch 1 – 40 nm: Discs Patch 2 – 60 nm: Thick rings Patch 3 – 80 nm: Thin rings Patch 4 – 100 nm: Broken rings
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