of Au microstructure on a Si 3 N 4 channel waveguide and its - - PowerPoint PPT Presentation

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Dec 12, 2023 244 likes •441 views

Laser-induced forward transfer of Au microstructure on a Si 3 N 4 channel waveguide and its plasmonic effect Abbas Salmanirezaei Kamalpreet S. Kaur Geert Van Steenberge Laser Plasmonic Printing Effect of Au structures of Au strcutures

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Laser-induced forward transfer

f Au microstructure
n a Si3N4 channel waveguide

and its plasmonic effect

Abbas Salmanirezaei Kamalpreet S. Kaur Geert Van Steenberge

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5/27/2015 Abbas Salmanirezaei – Ghent University 2

Plasmonic Effect

f Au strcutures

Laser Printing

f Au structures

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Currently, fabrication of the metallic structures on waveguides requires two-steps:

1. defining metallic structure using ebeam

lithography and etching

2. defining waveguide around the metallic

structure by second litho step followed by etching

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Laser Printing of Au structures

a slow and complicated process

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Laser Printing of Au structures

LIFT = Laser Induced Forward Transfer

high resolution features
(non-)planar substrate
Variety of materials
Inexpensive
Maskless
Single-step process

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Laser Printing of Au structures

Amplitude Systems SATSUMA laser Average Power 5.3 W Pulse Energy 10 μJ Beam Diameter X direction: 2.1μm Y direction: 2.1μm Pulse Duration 273 fs Central Wavelength 1030 nm Objective Lens NA = 0.4 Mag: 20X microSTRUCT vario (2912-295)

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Laser Printing of Au structures

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Laser Printing of Au structures

J = 443 (mJ/cm2)

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Laser Printing of Au structures

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Plasmonic Effect

f Au strcutures

Laser Printing

f Au structures

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Plasmonic Effect of Au structures

Abbas Salmanirezaei – Ghent University

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Plasmonic Effect of Au structures

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Plasmonic Effect of Au structures

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Plasmonic Effect of Au structures

Fundamental TM mode @ 1.38 µm

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Plasmonic Effect of Au structures

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Plasmonic Effect of Au structures

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Plasmonic Effect of Au structures

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THANKS for your attention!

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Any Question?

5/27/2015 Abbas Salmanirezaei – Ghent University