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Industrial Inline Control for Industrial Inline Control for Advanced Vacuum Advanced Vacuum Roll to Roll Systems Roll to Roll Systems Gerhard Steiniger Gerhard Steiniger Web inspection inspection - - surface surface Quallity Quallity Web control 7.4 7.4 - - 7684 7684 control 1 1

Industrial Inline Control for Advanced Vacuum Industrial Inline Control for Advanced Vacuum Roll to Roll Systems Roll to Roll Systems Outline Outline � � High productive layers for packaging High productive layers for packaging � � Copy protect layers by high rate electron Copy protect layers by high rate electron beam evaporation beam evaporation � � Ultra high barrier layers for solar and OLED Ultra high barrier layers for solar and OLED FED FED � � Inline ellipsometric control for solar and Inline ellipsometric control for solar and OLED OLED 2 2

High productive productive layers layers for for packaging packaging High Wafer Gas OD measure -ment Metallized Metallizing process Substrate Plasma Inline layer uniformity control Cathode Uncoated Power 3 3

High productive layers for food packaging World Largest Al boat system by Applied Materials with 4,5 m coating width Al boat evaporators for Food Packaging 4 4

Effective evaporation evaporation system system Effective � Annual output up to 11 000 t � Patented staggered boat arrangement for 4,45 m coating width � Optical inline thickness control by � High coating uniformity measurement of the absorption at a single wavelength 5 5

Copy protect layers by high rate electron Copy protect layers by high rate electron beam evaporation beam evaporation Fabry Perot color shift layer system (e.g. Al - Al 2 O 3 – Al *) for copy protection of banknote, medical packaging and decorative coatings Our Business in future with color shift *patented 6 6

Fabry- -Perot Perot- -Filter Filter with with color color shift shift effect effect Fabry Fabry Perot layer system (Al - Al 2 O 3 – Al) Top layer (semi-transparent) Middle layer (variable) Base layer (mirror) Colour related to middle layer thickness Due to a new process control technology implemented in the TOPBEAM TM system colour shift reflection layers can be pro- duced with a productivity rate which is twenty times higher compared to the standard sputter web coating technology. 7 7

Copy protect layers by high rate electron Copy protect layers by high rate electron beam evaporation beam evaporation Fabry Perot layer system (e.g. Al - Al 2 O 3 – Al) for copy protection of banknotes and decorative coatings 8 8

High rate evaporation evaporation with with Electron Electron Beam Beam High rate Closed loop layer control - data feedback from multiple head sensors to beam scanning unit Uniformity for evaporation down to +- 2 % possible 9 9

Electron Beam evaporation system with one or two EB guns Crucible with evaporation material EB with 2100 mm coating width � 2 Electron beam guns 10 10

Inline control of the layer thickness Inline control of the layer thickness Spectral reflection measurement of the Al 2 O 3 layer along web width Inline control by ESCOSYS* uniform layer new EB power distribution 11 11 •Registered trademark

Best coating technology depending on Best coating technology depending on the application and customers need the application and customers need sputtering evaporation Boat or Electron Beam � less dense layers � best quality � less variable composition � less particles � variable composition � high rate ( order m/s ). Up � “ low rate “ ( order to 25 times lower cost / m² m/min ) e.g. copy protection for banknotes color shift layer Al – AlO – Al Coating cost : 18 $ / m² 0,8 $ / m² 12 12

Ultra high barrier layers for solar and OLED FED Ultra high barrier layers for solar and OLED FED 13 13

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Functional Layers for FED* : Multi-layer stack for ultra high barrier films for display and solar applications Inorganic layers : Al 2 O 3 ,SiOx: Electron Beam evaporation : sputtering , PECVD : high rate , reasonable cost best quality , higher cost web speed e.g. 10 m/s e.g. 2 m/min - 0,03 m/s Flexible solar – medium lifetime Flexible solar , OLED Al 2 O 3 Cross-linked layer Al 2 O 3 inline in vacuum Al 2 O 3 or off-line at air* Al 2 O 3 PET *e.g. ORMOCER by ISC/FhG *FED : Flexible Electronic Devices 15 15

Modular Roll Coater Modular Roll Coater Unwind Module Process Module Rewind Module 1 Process Module with 3 Process Stations e.g. sputtered Al 2 O 3 for barrier layers Unwind Module Process Module 1 Process Module 2 Rewind Module 2 Process Modules, 6 Process Stations 16 16 * TM

TM SMARTWEB TM SMARTWEB 2 Process Process Modules Modules, , 6 Process Stations 6 Process Stations 2 17 17

Sputter Deposition Sources Sputter Deposition Sources planar and rotatable rotatable cathodes for cathodes for Metals,TCO Metals,TCO, , planar and Oxides Oxides 18 18

Ellipsometric inline inline control control for for Ellipsometric electron beam beam and and sputtering sputtering systems systems electron . Ellipsometry Ellipsometry Photometry offers new R possibilities: separate : Ψ , ∆ � n , k � Absorption ( SiOx) � Layer thickness � Possible relations to : thickness + � Density T composition � Layer-properties 19 19

Utilization of an ellipsometer in a of an ellipsometer in a sputter sputter system system Utilization For single layers and multilayer systems (future) 20 20

Ellipsometer installed in a Ellipsometer installed in a modular sputter system modular sputter system Chamber with roller for stable measurement lamp and modulator of the UFMWE* Monochromator of *(Ultra Fast Multi Wavelength ellipsometer receiver 21 21 Ellipsmeter by Jobin)

Advanced inline inline measurement measurement by by ellipsometer ellipsometer Advanced in a high speed speed electron electron beam beam evaporation evaporation system system in a high Installation of the ultra fast multi-wavelength ellipsometer in a high rate evaporation electron beam system Modulator Monochromator „Dangerous life“ - 3 m above ground for the Ellipsometer staff 22 22

Electron beam beam inline inline process process control control with with Electron the ellipsometer ellipsometer the SiO x barrier layer on PET film with 12 µ m thickness 100 10 Web speed 8 m/s Th-actual Th-set 90 8 web speed web speed 80 6 web-speed [ m/s ] 70 4 thickness [ nm ] 60 2 Set 55 nm 50 0 40 -2 thickness Start control by web-speed 30 -4 Set 25 nm 20 -6 0 5000 10000 15000 20000 25000 web-length [ m ] 23 23

Ultra high barrier for encapsulation Ultra high barrier for encapsulation The development of roll to roll inline control is supported by the � EU project : FLEXONICS* ( Ultra high barrier for r2r encapsulation of flexible electronics ) Multilayer-system : � Inorganic layer : Al 2 O 3 , SiO Cross-linked layer : on air by ORMOCER lacquer ( SiO 2 network ) first results r2r - 4 layer stack : water vapor and oxygen permeation � in the order of 1 x 10 – 4 ** for sputtering and evaporation *Partners : University Thessalonica, Jobin/Horiba ,IVV/ISC /FhG, ** g/m**2/day – cc/m**2/day Alcan, Applied MaterialI,Isovolta, Siemens, Konarca, Uni. Graz, 24 24

Conclusion Conclusion Advanced vacuum coating technology Advanced vacuum coating technology and the use of latest developments of and the use of latest developments of inline measurement and control inline measurement and control techniques offers techniques offers new solutions for flexible solar, OLED new solutions for flexible solar, OLED and copy protect markets and copy protect markets 25 25

Thank you 「感謝」 Kansha! Danke Gerhard Steiniger Gracias Merci H.J. Lotz , P. Sauer Applied Materials Technology Center Alzenau - Germany 26 26