Chemical Vapor Deposition Dave Newby 4/30/09 What is CVD? - - PowerPoint PPT Presentation

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Chemical Vapor Deposition Dave Newby 4/30/09 What is CVD? - - PowerPoint PPT Presentation

Nov 17, 2022 180 likes •388 views

Chemical Vapor Deposition Dave Newby 4/30/09 What is CVD? Courtesy J. Ogren http://ssl.kaist.ac.kr/2007/sub6_1.php Motivation/Applications http://www.ticoating.com Reactor Design Reactants in Deposition on Substrate Waste out Heat

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SLIDE 1

Chemical Vapor Deposition

Dave Newby 4/30/09

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SLIDE 2

What is CVD?

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SLIDE 3

Motivation/Applications

http://ssl.kaist.ac.kr/2007/sub6_1.php http://www.ticoating.com Courtesy J. Ogren

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SLIDE 4

Reactor Design

Reactants in Waste out Heat Deposition on Substrate

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SLIDE 5

Reactants Adsorption/Reaction Diffusion/Growth Waste/Excess Substrate Container Wall

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SLIDE 6

Nucleation & Growth Reaction Transport

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SLIDE 7

Reactions/Chemistry

Pierson 64

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SLIDE 8

Gas Dynamics/Mass Transport

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SLIDE 9

Ohring 163

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SLIDE 10

Diffusion

Pierson 146

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SLIDE 11

Diffusion

Pierson 146

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SLIDE 12

Limiting Step?

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SLIDE 13

Nucleation/Growth

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SLIDE 14

Nucleation

Ohring 196

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SLIDE 15

Nucleation

Ohring 174

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SLIDE 16

Growth

Ohring 197

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SLIDE 17

Lattice Mismatch and Strain

Pierson 57

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SLIDE 18

Graphene: An Application

Yu et al. Gruneis/Vyalikh

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SLIDE 19

Thank You

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SLIDE 20

Selected References:

Yu, Qingkai et al. Applied Phys. Lett. 93, 113103 (2008) Gruneis, A. and Vyalikh, D. (2008) “Tunable hybridization of electronic state of graphene and a metal surface” arXiv:0803.2761v1 Ohring, Milton. The Materials Science of Thin Films. 1st

  • Edition. New York: Academic Press, 1992.

Hugh, Pierson. Handbook of Chemical Vapor Deposition. 2nd

  • Edition. Park Ridge: Noyes Publications, 1999.