Chemical Vapor Deposition Dave Newby 4/30/09 What is CVD? - PowerPoint PPT Presentation

Nov 17, 2022 •180 likes •385 views

Chemical Vapor Deposition Dave Newby 4/30/09 What is CVD? Courtesy J. Ogren http://ssl.kaist.ac.kr/2007/sub6_1.php Motivation/Applications http://www.ticoating.com Reactor Design Reactants in Deposition on Substrate Waste out Heat

Chemical Vapor Deposition Dave Newby 4/30/09
What is CVD?
Courtesy J. Ogren http://ssl.kaist.ac.kr/2007/sub6_1.php Motivation/Applications http://www.ticoating.com
Reactor Design Reactants in Deposition on Substrate Waste out Heat
Reactants Waste/Excess Diffusion/Growth Adsorption/Reaction Substrate Container Wall
Nucleation & Growth Reaction Transport
Reactions/Chemistry Pierson 64
Gas Dynamics/Mass Transport
Ohring 163
Diffusion Pierson 146
Diffusion Pierson 146
Limiting Step?
Nucleation/Growth
Nucleation Ohring 196
Nucleation Ohring 174
Growth Ohring 197
Lattice Mismatch and Strain Pierson 57
Graphene: An Application Yu et al. Gruneis/Vyalikh
Thank You
Selected References: Yu, Qingkai et al. Applied Phys. Lett. 93, 113103 (2008) Gruneis, A. and Vyalikh, D. (2008) “Tunable hybridization of electronic state of graphene and a metal surface” arXiv:0803.2761v1 Ohring, Milton. The Materials Science of Thin Films. 1st Edition. New York: Academic Press, 1992. Hugh, Pierson. Handbook of Chemical Vapor Deposition. 2nd Edition. Park Ridge: Noyes Publications, 1999.

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