Aristotle University of Thessaloniki Thessaloniki Aristotle University of Physics Department Physics Department GR- GR -54124 Thessaloniki, Greece 54124 Thessaloniki, Greece, http:// , http://ltfn.physics.auth.gr ltfn.physics.auth.gr Real- -time & in time & in- -Line Optical Monitoring of Functional Line Optical Monitoring of Functional Real Nanolayer Deposition on Flexible Polymeric Deposition on Flexible Polymeric Nanolayer Substrates Substrates Prof. S. Logothetidis Logothetidis Prof. S. Lab for Thin Films - Lab for Thin Films - Nanosystems Nanosystems & & Nanometrology Nanometrology (LTFN) (LTFN) Physics Department, AUTh AUTh Physics Department, 1 11th TAPPI European PLACE Conference
Outline Outline Polymeric Materials: New Emerging Technologies & Applications Polymeric Materials: New Emerging Technologies & Applications Spectroscopic Ellipsometry Ellipsometry : Principles & Methodology : Principles & Methodology Spectroscopic Optical Properties of Materials for the Production of Flexible Optical Properties of Materials for the Production of Flexible Electronic Devices (FEDs FEDs) ) Electronic Devices ( Anisotropic Polymeric Substrates Anisotropic Polymeric Substrates Barrier Nano Nano- -layers layers Barrier Electrodes & Transparent Conductive Oxides (TCOs TCOs) ) Electrodes & Transparent Conductive Oxides ( Organic Conductive Oxides Organic Conductive Oxides Up- -scaling of Optical Sensing techniques from Lab scale to scaling of Optical Sensing techniques from Lab scale to Up Large scale r2r Production Processes Large scale r2r Production Processes Summarising & Conclusions Summarising & Conclusions 2 11th TAPPI European PLACE Conference
Outline Outline Polymeric Materials: New Emerging Technologies & Applications Polymeric Materials: New Emerging Technologies & Applications Spectroscopic Ellipsometry Ellipsometry : Principles & Methodology : Principles & Methodology Spectroscopic Optical Properties of Materials for the Production of Flexible Optical Properties of Materials for the Production of Flexible Electronic Devices (FEDs FEDs) ) Electronic Devices ( Anisotropic Polymeric Substrates Anisotropic Polymeric Substrates Barrier Nano Nano- -layers layers Barrier Electrodes & Transparent Conductive Oxides (TCOs TCOs) ) Electrodes & Transparent Conductive Oxides ( Organic Conductive Oxides Organic Conductive Oxides Up- -scaling of Optical Sensing techniques from Lab scale to scaling of Optical Sensing techniques from Lab scale to Up Large scale r2r Production Processes Large scale r2r Production Processes Summarising & Conclusions Summarising & Conclusions 3 11th TAPPI European PLACE Conference
Polymeric Materials: Polymeric Materials: New Emerging Technologies & Applications New Emerging Technologies & Applications The interest on the Polymeric materials in in a wide range of a wide range of Scientific,Technological Scientific,Technological The interest on the Polymeric materials & Industrial Applications originates originates from the from the Very Important Properties Very Important Properties they they & Industrial Applications exhibit and their Low Cost Low Cost & & Flexibility Flexibility in in Use Use in in Large Area Processes Large Area Processes . . exhibit and their Barrier Films & Coatings for Barrier Films & Coatings for Encapsulation Encapsulation Protective & Decorative & Decorative Coatings Coatings Protective Corrosion Resistant Coatings Corrosion Resistant Coatings Final Applications Final Applications Flexible Electronics Devices Flexible Electronics Devices Optoelectronic & Electronic Devices Optoelectronic & Electronic Devices Optical & & Recording Devices Recording Devices Optical Biocompatible - - Medical Implants Medical Implants Biocompatible 4 11th TAPPI European PLACE Conference
Polymeric Materials: Polymeric Materials: New Emerging Technologies & Applications New Emerging Technologies & Applications The Fabrication of the state-of-the-art Products includes their encapsulation into transparent Polymeric media to Protect them against atmospheric O 2 & H 2 O-moisture, which are harmful for their Performance & Long-term Stability. Large- -scale scale roll roll- -to to- -roll roll (r (r2r) 2r) Large Encapsulation Concept Encapsulation Concept Encapsulation system Encapsulation system (roll length ~3000 m & 2 m width) (roll length ~3000 m & 2 m width) Encapsulant (Flexible polymer layer) Encapsulant (Flexible polymer layer) Encapsulated Encapsulated FEDs FEDs FEDs FEDs roll roll roll roll roll roll Functional Thin Film Functional Thin Film electronic modules electronic modules (ITO layers, electron transport (ITO layers, electron transport layers, organic emitters, etc.) layers, organic emitters, etc.) 5 11th TAPPI European PLACE Conference
Polymeric Materials: Polymeric Materials: Large Scale Production of novel products Large Scale Production of novel products Plasma Assisted Evaporation and Sputtering techniques for the deposition of functional nano-layers onto flexible polymeric films by large scale r2r techniques Plasma Assisted Evaporation Sputtering 6 11th TAPPI European PLACE Conference
Outline Outline Polymeric Materials: New Emerging Technologies & Applications Polymeric Materials: New Emerging Technologies & Applications Spectroscopic Ellipsometry Ellipsometry : Principles & Methodology : Principles & Methodology Spectroscopic Optical Properties of Materials for the Production of Flexible Optical Properties of Materials for the Production of Flexible Electronic Devices (FEDs FEDs) ) Electronic Devices ( Anisotropic Polymeric Substrates Anisotropic Polymeric Substrates Barrier Nano Nano- -layers layers Barrier Electrodes & Transparent Conductive Oxides (TCOs TCOs) ) Electrodes & Transparent Conductive Oxides ( Organic Conductive Oxides Organic Conductive Oxides Up- -scaling of Optical Sensing techniques from Lab scale to scaling of Optical Sensing techniques from Lab scale to Up Large scale r2r Production Processes Large scale r2r Production Processes Summarising & Conclusions Summarising & Conclusions 7 11th TAPPI European PLACE Conference
Spectroscopic Ellipsometry Ellipsometry – – SE SE … ….. .. Spectroscopic The optical monitoring of Polymeric The optical monitoring of Polymeric substrates & Deposition of transparent substrates & Deposition of transparent barrier layers is being performed by barrier layers is being performed by Spectroscopic Ellipsometry Ellipsometry in a wide in a wide Spectroscopic spectral region (IR to Vis Vis- -fUV fUV) ) spectral region (IR to Determination of Thickness Determination of Thickness, , Bonding Bonding structure & structure & Configurations Configurations, , Vibrational Vibrational properties, properties , Electronic transitions Electronic transitions, , Stoichiometry, Stoichiometry , Optical anisotropy Optical anisotropy, , Deposition Rate , Deposition Rate , Growth Growth Mechanisn Mechanisn etc. etc. Infra- Infra -Red region Red region : : 900 900 - - 4000 cm 4000 cm - -1 1 Extensive spectral range: Extensive spectral range: NIR – – Vis Vis - - farUV farUV region region: : 0.7 NIR 0.7 - - 6.5 6.5 eV eV 8 11th TAPPI European PLACE Conference
Near IR – – Visible Visible – – far UV far UV Near IR Phase Modulated Spectroscopic Ellipsometry Ellipsometry Phase Modulated Spectroscopic IN-SITU CONFIGURATION 3-6.5 eV Polarizer Polarizer Polarizer Polarizer Polarizer Polarizer Analyzer Analyzer Analyzer Analyzer Photoelastic Photoelastic Photoelastic Photoelastic Photoelastic Photoelastic Modulator Modulator Modulator Modulator Modulator Modulator Detector Detector Detector Detector Optical Fiber Optical Fiber Optical Fiber Optical Fiber Xe lamp Xe lamp Xe lamp Xe lamp lamp lamp lamp lamp Xe Xe Xe Xe Sample Sample Sample Sample Monochromator Monochromator Monochromator Monochromator Shutter Shutter Shutter Shutter Shutter Shutter Data Acquisition Data Acquisition Data Acquisition Data Acquisition Computer Computer Computer Computer Study of the Electronic Structure & Study of the Electronic Structure & Properties of the Polymeric materials Properties of the Polymeric materials (Electronic transitions Electronic transitions) ) ( EX-SITU CONFIGURATION 9 0.7- 6.5 eV 11th TAPPI European PLACE Conference
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