A novel approach for batch production of micro holes by micro EDM - - PowerPoint PPT Presentation

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A novel approach for batch production of micro holes by micro EDM - - PowerPoint PPT Presentation

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A novel approach for batch production of micro holes by micro EDM Shun-Tong Chen a , Yunn-Shiuan Liao b a Dept. of Mechatronic Technology, National Taiwan Normal University, Taiwan chenst@ntnu.edu.tw b Dept. of Mechanical Engineering, National

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2007/11/12 4M2007 1

A novel approach for batch production of micro holes by micro EDM

Shun-Tong Chena, Yunn-Shiuan Liaob

a Dept. of Mechatronic Technology, National Taiwan Normal University, Taiwan

chenst@ntnu.edu.tw

b Dept. of Mechanical Engineering, National Taiwan University

liaoys@ntu.edu.tw

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Outline

Introduction (background and objective) Hardware Approach Experiment Conclusions

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Background

Micro holes can be applied widely to various fields such as aerostatic air bearing Ink-jet nozzle Micro-jet cooling device

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Background (cont.)

Various micro machining techniques have been developed to fabricate micro holes. Costly → → → → MEMS and LASER Difficult → → → → micro drilling and punching

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Objective

To develop an approach for batch production of micro holes by micro EDM.

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The multi-function tabletop machine tool

Micro Milling Micro Hi-Speed Milling Micro EDM Micro Wire-EDM Micro on-line Measurement

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A novel micro Wire-EDM Mechanism

Machining region

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Partial magnification of the micro Wire-EDM

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The mechanism design

  • f reverse micro Wire-EDM
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(Batch production of mass micro holes) Material： ： ： ：SUS304

Positioned directly

The proposed approach

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Finished micro electrodes array by reverse micro Wire-EDM

100 pillars 21µ µ µ µm width Over 700µ µ µ µm height More than 33 aspect ratio

Experiment

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The machining of the batch mode micro EDM. .

Material： ： ： ：SUS304

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Finished 900 micro holes array

Material： ： ： ：SUS304

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Finished holes array by pyramid tip electrode machining

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Finished holes array by flat end electrode machining

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Surface roughness on the hole-wall

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The average consumption of the electrode

Before processing： ： ： ：360µ µ µ µm After processing： ： ： ：210µ µ µ µm Have consumed→ → → →150µ µ µ µm

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Before processing： ： ： ：700µ µ µ µm After processing： ： ： ：160µ µ µ µm Have consumed → → → → 540µ µ µ µm

The average consumption of the electrode

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Machining time for single hole

Average drilling time : 66.2 (sec) for each hole.

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Machining time for holes array

Average drilling time : 19.5 (sec) for each hole.

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Conclusions

An approach for batch production of micro holes is successful developed. A good positional accuracy, dimensional accuracy, and surface roughness of the drilled holes are achieved. Compared with single hole machining, the holes array machining can be saved about two-third time.

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Thank you very much for your kind attention!

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Machining time for holes array

Average drilling time : 19.5 (sec) for each hole.

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Machining time for holes array

Average drilling time : 19.5 (sec) for each hole.

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Tension control of the micro wire

Basic idea Top view of the mechanism

(Patent pending)