Who is ASML One of the worlds leading manufacturer of chip-making - - PDF document

Company Secret

Introducing ASML and Application and Business Support

ASML Customer Support

Sander Stegeman Manager CS ABS Info-avond Industry-Master Nanoscience and Nanotechnology, Leuven

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Who is ASML

• One of the world’s leading manufacturer of chip-making

equipment and a key supplier to the chip industry.

• ASML designs, develops, integrates and services

advanced systems to produce semiconductors.

• In short, it makes the machines that print the chips.
• A global company founded in 1984 and headquartered in

Veldhoven (near Eindhoven), the Netherlands.

• The employer of 6,591 employees as of March 28, 2010

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$256 B Semiconductor Chips $1,357 B Electronic Applications $5.4 B Semiconductor Litho market

Source: Gartner 2008

From silicon to smart electronics

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ASML employees in US:1,457

Source: ASML Q4 2009

Over 60 sales and service offices located worldwide

ASML employees in Europe:3,800 ASML employees in Asia:1,291

ASML number 3 worldwide semiconductor equipment vendor

18% sales to US 77% sales to ASIA 5% sales to Europe

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ASML: the critical step of semiconductor manufacturing

Slicing Polishing Material deposition

• r modification

Photoresist coating

Exposure (step and scan)

Developing and baking Etching and ion implantation Removing the photoresist (ashing) Completed wafer Separation Packaging 2/ - 30x to build 3 dimensional structure Slide 6 | Company Secret

Photolithography – how an ASML system works

Reticle stage Light –entrance laser Wafer stages Lens module Illumination system

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• Deliver the highest quality in support to optimize the systems’

performance in IC manufacturing.

• Deliver and develop the means, methods, and qualified application

engineers to maximize system performance

• Support the ASML sales organization with its pursuit of strategic business
• pportunities

Mission Applications & Business Support

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Deliverables of the Applications and Business Support Organization

• New Technology design specification: Be the voice of the

customer to the ASML development organization.

• Introduce new options and technology
• Optimize machine-product interaction
• Solve process & IC performance

related problems

• Run joint customer/ASML development

projects

• Lead technical consultancy projects

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Who are our customers

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Applications & Business Support - activities

• New Product Introduction
• Consultancy projects
• Customer process optimization
• Field escalation support
• Knowledge transfers to Customer and Field

engineers

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Applications & Business Support - competencies

• Imaging (improve uniformity of imaged patterns)
• Defectivity (minimize immersion litho stack defects)
• Low k1 (optimize pupils & masks through litho simulations)
• Focus (bring wafer in image plane)
• Overlay (alignment of different layers in chip)
• Productivity (number of wafers per hour)
• Start-up (first silicon out with good wafers per day)
• Metrology (measure CD, OV and Focus/Dose as input for

scanner correction)

• Computational Litho (improve Litho by applying corrections

based on measured and simulated data)

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Litho Process Design

Maximize Good Wafers Per Month Maximize Good Wafers Per Month

Customer goal

C Customized

ustomized

O Overlay

verlay I

Improvement

mprovement

Make a step in Productivity:

• Maximize time efficiency
• Maximize speed efficiency

Make a step in Imaging:

• Prepare for a new node
• Decrease imaging rework
• Increase chip speed

Make a step in Overlay:

• Decrease overlay rework
• Prepare for a new node

C Customized

ustomized

I Imaging

maging I

Improvement

mprovement

C Customized

ustomized

P Productivity

roductivity I

Improvement

mprovement

CII CII COI COI CPI CPI

Applications Consultancy

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Different views of Applications Consultancy work Example: Process Transfer

• Foundry fabs make product for other customers.
• TSMC (foundry) intends to run an IBM 65nm process.
• ASML Applications Engineers transfer the IBM process

to the TSMC fab:

• Find illumination conditions
• Find dose/focus conditions
• Optimize machine performance

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Different views of Applications Consultancy work Example: Ensure IC circuit Optical Transfer is optimal

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Fab Start-Up phases: ASML Start-Up Support phases:

INSTALLATION POST-INSTALLATION PRE-INSTALLATION VOLUME PRODUCTION PROCESS QUAL INSTALLATION PREPARATION PILOT PRODUCTION

1st Silicon Out 1st System Move-in

TIME FAB RAMP-UP

Different views of Applications Consultancy work Example: ABS Startup Project

• ABS engineer involved in all phases
• Typical 6 months onsite stay

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What Do We Need for CS ABS?

• University degree (MSc or PhD) in:
• Optics, Physics, Electronics / Micro electronics, IC

manufacturing, Process technology, Nanoscience & Nanotechnology

• Strong technical background and drive towards solutions
• Team player
• Strong analytical skills
• Good (multi cultural) communicative skills and customer
• rientation
• Willingness to travel international up to 30%

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What Do We Offer?

• Working with leading edge technologies
• Challenging job with interfaces to customers, R&D and

Marketing

• Customer projects all over the world
• Dynamic environment
• Participation in development projects to define the future

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Interested?

• Contact me or my colleague
• Joost van den Eijnden (HR)
• Sander Stegeman (ABS)
• Apply for a job at www.asml.com
• Application Engineer Customer Support
• Start-up Engineer Customer Support

Company Secret

Commitment