Trident SRD Advanced Spin Rinse Dryers For 75-200mm 1 C l a s s O - - PowerPoint PPT Presentation

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

1

Trident SRD

Advanced Spin Rinse Dryers For 75-200mm

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Trident SRD: a range of configurations

2

Single Stack Roll Around

Starting at $28k

Single Stack Table Top

Starting at $26k

Dual Stack

Starting at $45k

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

3

Models for 150mm or smaller substrates: Model 8600: Dual Stack Model 4600: Single Stack, Roll-Around Model 2600: Single Stack, Table-Top Models for 200mm substrates: Model 8800: Dual Stack Model 8800HP: Dual Stack, High-Profile Cassettes Model 4800: Single Stack, Roll-Around Model 2800: Single Stack, Table-Top

For a range of wafer sizes: 50mm to 200mm

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

4

Trident SRDs provide an array

• f innovative features

Full wrap-around bowl heater Non-contact ultra-pure N2 heater Negative-pressure motor seal Door-top DC ionizer Stainless steel cabinetry Full-control facility panel

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

5

Delivering higher performance and major benefits

More uniform rinse Reduced particles Cleaner N2 Optimum drying performance FM4910 compliant CE certified

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

An elegant SRD design

6

Designed clean and simple Designed for reliable operation Designed for easy maintenance

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Maintaining cleaner N2

7

Filter positioned after the heater No N2 contact with the heater N2 stays cleaner

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Intuitive, graphical and flexible

8

Intuitive Graphical User Interface Touch-screen operation Non-proprietary controller: readily available components Easy operations and diagnostics screens

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

On-board facility panel

9

On-board DI and N2 regulation Precise control throughout EPO is a standard feature And much more…

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

All of these are standard Trident SRD features

10

Quick-disconnect rotors LCD color touch-screen GUI Easy-access maintenance panels Programmable Logic Controller Data logger DI water recirculation N2 saver Resistivity monitor controller & probe Static neutralizing bar EPO, front and rear Over-temperature protection Heater alarm Foot-activated door-open switch Mechanical door lock Ultra-pure valves, pillar fittings Drain-trap connection Direct-drive brushless motor All stainless steel cabinetry CE certified 1-year warranty, parts and labor

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Plus, additional options are available

11

GEM/SECS communication Stainless steel or FM4910 plastic Light tower with 3 indicator lamps (R/Y/G) Deluge Manifold for DI Rinse Rear display Bulk mount Extended 2-year warranty

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

World-class service and support

Factory-trained field service engineers world wide providing local support 24-hour onsite support Spare Parts Stock: same day shipment

12

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

P P Atlanta, GA Kalispell, MT

ClassOne Confidential

P Ulm, Germany FSE Spare Parts Depot P China Scientech P Taiwan Scientech

World-wide service and support

Partner Facility ClassOne Facility Parts Depot P Malaysia Q1 2017

P

Seattle, WA Singapore Advanti India GMS Applications Lab

C l a s s O n e T e c h n o l o g y : A d v a n c e d W e t P r o c e s s i n g E q u i p m e n t f o r t h e R e s t o f U s

Trident: A unique new class

• f SRD that delivers…

The performance you need At a price you can afford!

14