system for critical cleanroom supplies 18 June 2019 DTU ENRIS - PowerPoint PPT Presentation

Leif S. Johansen, Thøger Eskildsen, Jesper Hanberg & Jörg Hübner DTU Nanolab, Ørsteds Plads 347, Kgs. Lyngby, Denmark Risk management system for critical cleanroom supplies 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 1

It all began with a tiny hole… 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 2

Secondary side Primary side Pressure relief on HBr regulator 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 3

Leak in HBr gas pipe 1 mm hole “Pressure relief valve” (check valve) To regulator 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 4

Common gas cabinet 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 5

Corroded gas valves for three process gases… 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 6

Corroded gas valves for three process gases… 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 7

Summary of events • HBr leak corroded three gas panels, valves and bottles • Lead time for new gas panels: 6 months • Gas work lead time: >1 month • Reinstallation time: 2 weeks (incl. entire new HBr line) • Lead time for HBr: 5 months • Lead time for BCl 3 : 6 months • BCl 3 bottle connector was wrong (CGA instead of DIN) • Bottle connector lead time: >1 month • Down time of HBr & CH 4 : Ca. 7 months • Total down time of BCl 3 : 9 months (!) • Many projects seriously affected • Serious risks were not identified 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 8

ISO 9001:2015 • DTU Nanolab is ISO2009:2015 certified • “… a ctions to address risks and opportunities…” • A need to address risks in mission critical cleanroom supplies 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 9

Risk level assessment • How do you quantify a risk? • Risk = Probability x Consequence • Probability: 1-5 • Consequence: 1-5 • 1-3: Very low risk • 4-7: Low risk • 8-13: Medium risk • 14-19: High risk • 20-25: Very high risk • Risk level can help prioritize actions 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 10

Labmanager • LabManager – DTU Danchip’s proprietary lab management system • Our home- made LIMS, Coral, Nemo,… – Booking – Start/stop – Competences – Equipment status – Invoicing – Wafer shop – CAPAs • Browser based • No s/w installation needed • Accessible anywhere (with login) • Runs a LAMP server stack (Linux, Apache, MySQL, PHP) • Like a tailor made suit: fit us quite well 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 11

Summary 2 x 4 = 8  Medium risk 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 12

Risk list – ”The sum of all known fears” and how to prioritize 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 13

Preventive actions for the gas incident • Don’t share corrosive gases with other gases (not implemented yet) • Combine pressure relief valve with burst disc • Stock all gas spares – Pipe (150 metres coax) – Valves – Gauges – Panels – Bottle connectors • Consider stocking spare bottles (not implemented) 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 14

Summary • Gas incident showed need for risk assessment • A system for risk management of cleanroom supplies implemented • In line with ISO 9001:2015 requirements • Runs on LabManager • Risk = Probability x Consequence • List of identified risks • Helps log and prioritize preventive work on known risks • Inside every small problem there is a big one struggling to get out • There’s always the unexpected… 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 15

Thanks to… Jesper Hanberg & Thøger Eskildsen PHP-programming of risk lists in LabManager software Leif S. Johansen & Jan V. Eriksen Work on cleanroom supplies Own many actions on the risk list Jörg Hübner Set the vision, gave the orders and kept everyone on their toes 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 16

Thank you for your attention… Summary 18 June 2019 DTU ENRIS 2019 Risk management system for critical cleanroom supplies 17