sraf insertion via supervised dictionary learning
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SRAF Insertion via Supervised Dictionary Learning Hao Geng 1 , Haoyu - PowerPoint PPT Presentation

Jan 04, 2024 •320 likes •601 views

SRAF Insertion via Supervised Dictionary Learning Hao Geng 1 , Haoyu Yang 1 , Yuzhe Ma 1 , Joydeep Mitra 2 , Bei Yu 1 1 The Chinese University of Hong Kong 2 Cadence Inc. 1 / 19 <latexit

  1. SRAF Insertion via Supervised Dictionary Learning Hao Geng 1 , Haoyu Yang 1 , Yuzhe Ma 1 , Joydeep Mitra 2 , Bei Yu 1 1 The Chinese University of Hong Kong 2 Cadence Inc. 1 / 19

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10,000,000,000 Core i7 Core 2 Duo 1,000,000,000 Number of Transistors Pentium 4 per Integrated Circuit Intel Microprocessors 100,000,000 Pentium II 10,000,000 486 Pentium 386 1,000,000 Invention of the 286 100,000 Transistor 8086 Doubles every 2.1 yrs 4004 10,000 1,000 100 10 1 1940 1950 1960 1970 1980 1990 2000 2010 2020 Year 2 / 19

  3. Nanometer Era of Manufacturing: An Inverter Example 3 / 19

  4. Optical Proximity Correction (OPC) Design target 4 / 19

  5. Optical Proximity Correction (OPC) Wafer Mask Design target without OPC 4 / 19

  6. Optical Proximity Correction (OPC) Wafer Mask Design target without OPC with OPC 4 / 19

  7. What is SRAF? ◮ Patterns deliver light to target features without printing themselves ◮ Make isolated features more dense ◮ Improve the robustness of the target patterns ◮ Rule-based [Jun+,SPIE’15], Model-based [Shang+,Mentor’05], Machine learning model-based [Xu+,ISPD’16] SRAF (a) OPC Target PV band (b) (a) Printing with OPC only (2688 nm 2 PV band area); (b) Printing with both OPC and SRAF (2318 nm 2 PV band area). 5 / 19

  8. Outline Supervised Feature Revision SRAF Insertion Experimental Results 6 / 19

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