SOLID STATE PROTEIN SENSOR Veronica Martinez-Vargas & Teresa - - PowerPoint PPT Presentation

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solid state protein sensor
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SOLID STATE PROTEIN SENSOR Veronica Martinez-Vargas & Teresa - - PowerPoint PPT Presentation

Jul 05, 2023 286 likes •530 views

SOLID STATE PROTEIN SENSOR Veronica Martinez-Vargas & Teresa Turmanian Dr. John Suehle, Mentor Semiconductor & Dimensional Metrology Division National Institute of Standards and Technology(NIST) Why is it important? Personalized

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SLIDE 1

SOLID STATE PROTEIN SENSOR

Veronica Martinez-Vargas & Teresa Turmanian

  • Dr. John Suehle, Mentor

Semiconductor & Dimensional Metrology Division National Institute of Standards and Technology(NIST)

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SLIDE 2

Personalized medicine

  • Disease Identification
  • Treatment (effects of pharmaceuticals)
  • Identification of Neurotransmitter

Why is it important?

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SLIDE 3
  • A device that is used to detect the presence
  • f specific atoms, molecules and ions in liquids

by changing the amount of current.

What is a solid state protein sensor ?

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SLIDE 4

How does it work?

SiO2 membrane MoS2 flake Al2O3 dielectric Gate source drain Vd Vg e - Biomolecule solution

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SLIDE 5

Why use MoS2? Energy Band Gap: 1.2-1.8 eV

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SLIDE 6

Construction of target substrate

  • ut of a silicon-on-insulator (SOI)

wafer

Si3N4 Si 1-1-1 SiO2 Si 1-0-0 Si3N4

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SLIDE 7

SiO2

Etch, oxidize & place device on membrane

Si 1-1-1 Si 1-0-0 SiO2

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SLIDE 8

Photoresist SiO2 Si 1-0-0 SiO2 Si 1-1-1

Etched and oxidized

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SLIDE 9

Exfoliate MoS2 flakes

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SLIDE 10

Cleaning the dummy and target substrates

Acetone 70 C 30 mins. Blow dry with nitrogen gas gun Isopropyl Alcohol Room temp 5 mins. De-ionized Water Room temp 1 min.

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SLIDE 11

Before and after cleaning

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SLIDE 12

Deposit MoS2 flakes onto dummy substrate

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SLIDE 13

Hai Li, Jumiati Wu, Xiao Huang, Zongyou Yin, Juqing Liu, and Hua Zhang, 2014. ACS Nano,

  • J. 8, 6564.

Transfer process

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SLIDE 14

Transfer of MoS2 flakes from dummy onto target

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SLIDE 15

Criteria for desired flakes

  • 2 – 10 µm in length and width
  • Roughly rectangular shape
  • 10 – 20 nm thick
  • Relatively flat surface

Optical microscopy (OM) Atomic force microscopy (AFM)

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SLIDE 16

Length: ~0.861 µm Width: ~2.016 µm Average Thickness: 15.020 nm

A rejected MoS2 flake

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SLIDE 17

Length: ~2.365 µm Width:~3.751 µm Average Thickness: 17.959 nm

A candidate MoS2 flake

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SLIDE 18

AutoCAD: Source, Gate, and Drain

Source Gate Drain

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SLIDE 19

AutoCAD: Source, Gate, and Drain

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SLIDE 20

VG ID Before protein After protein VT VT

How we predict the sensor to behave

Log [ID] VG

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SLIDE 21
  • Brought this project to a point where a

working device is very nearly completed.

  • When completed it will be a breakthrough in

biomedical technology and diagnostic capability

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SLIDE 22
  • Dr. John Suehle
  • Dr. Dave Seiler
  • Dr. Arvind Balijepalli
  • Jungjoon Ahn
  • Dr. Joseph Robertson
  • Dr. Hao Zhu
  • Dr. Joseph Kopanski
  • NIST staff
  • SPS staff

Acknowledgements

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SLIDE 23

Future work: e-beam lithography

1 2 4 5 6 3

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SLIDE 24

Future work

Probe Station Wire Bonding to PC Board Protein Sensing