[PPT] - Single atom identification and manipulation using atomic force PowerPoint Presentation

SLIDE 1

Single atom identification and manipulation using atomic force microscopy

Yoshiaki Sugimoto

Ge Sn

JST-DFG workshop on Nanoelectronics

SLIDE 2

Introduction

M. Abe

Associate Professor

S. Morita

Professor

Japan

Osaka

O. Custance

Visiting Associate Professor

SLIDE 3

Bottom-up nanotechnology

Invention of STM Invention of STM

R.P. Feynman R.P. Feynman

There's Plenty of There's Plenty of Room at the Bottom Room at the Bottom 1982 1982

T=5 K CO molecule Cu(111) surface Atom manipulation Atom manipulation

The technology for atom The technology for atom-

by

by-

atom construction of

atom construction of nano nano-

devices

devices

Logic gate constructed Logic gate constructed by atom manipulation by atom manipulation

A.J. Heinrich, et al., A.J. Heinrich, et al., Science Science 298 298 (2002) 1381. (2002) 1381. D.M. D.M. Eigler Eigler, et al., , et al., Nature Nature 344 344 (1990) 524. (1990) 524.

1959 1959

G.

G. Binnig

Binnig

H. Rohrer
H. Rohrer

T=4 K

Ni(100) surface Xe atom

SLIDE 4

Our approach

Using Atomic force microscopy (AFM) Using Atomic force microscopy (AFM) At room temperature At room temperature Evaporation of various atom species various atom species Atom Atom Manipulation Manipulation Atom Atom Identification Identification At cryogenic temperature Using Scanning tunneling microscopy (STM) Previous Previous atom manipulation and assembly atom manipulation and assembly Our approach Our approach

SLIDE 5

Outline

Atom imaging Atom discrimination Atom identification Atom manipulation

At room temperature

A A A B A A A B

Using AFM

SLIDE 6

Atom imaging

Atom discrimination Atom identification Atom manipulation Atom imaging

At room temperature

A A A B A A A B

Using AFM

SLIDE 7

Experimental setup

Commercial Si cantilever (Nano World) f0=160 kHz, k=30 N/m, Q=13000, A=20 nm (Typical values) Ar ion sputtering （UHV）

Top view Side view Top view of AFM unit

Base pressure <5×10-11 Torr

SLIDE 8

AFM images of various surfaces

Si(111)-(7x7) Si(100)-(2x1) Ge(111)-c(2x8) KCl(100) Pb/Si(111)-(1x1) Metal Semiconductor Insulator

Si atom Si atom Ge atom

SLIDE 9

Atom discrimination

Atom identification Atom manipulation Atom imaging Atom discrimination

At room temperature

A A A B A A A B

Using AFM

SLIDE 10

Discrimination between Sn and Si atoms

Sn:50% Si:50% Sn:75% Si:25% Sn:99% Si:1%

Si Sn The amount of evaporated Sn atoms increases Sn/Si(111)-(√3×√3)

Si surface Sn atoms

SLIDE 11

The limitation of atom discrimination from image

Si In Sb Si In and Si Sb and Si Sn and Ge Ge Sn Si, Sn, and Pb mixed surface Only two atomic contrasts? More than three atomic contrasts?

SLIDE 12

Atom identification

Atom manipulation Atom imaging Atom discrimination Atom identification

At room temperature

A A A B A A A B

Using AFM

SLIDE 13

Atom identification based on force measurement

Si, Sn, Pb mixed surface

Si Sn Pb

Si Si Sn Si Pb Si

FSi-Si FSi-Sn FSi-Pb

The chemical bonding force between tip apex atoms and surface atoms can be measured by AFM.

SLIDE 14

The method for measuring the interaction force

2 4 6 8 10 12 14 16 18 20 22 24

24
22
20
18
16
14
12
10
8
6
4
2

Δf[Hz]

Δf

2
1

1 2 3

Z[Å]

2 4 6 8 10 12 14 16 18 20 22 24

4
3

F[nN]

F Numerical

Z[Å]

Total

calculation ∫

−

− − = Δ

A A

z A z z F dz k A f f

2 2 2

) ( π

2 4 6 8 10 12 14 16 18 20 22 24

4
3
2
1

1 2 3

F[nN] Z[Å]

FvdW

2

6Z R A F

H vdW

− =

2 4 6 8 10 12 14 16 18 20 22 24

4
3
2
1

1 2 3

F[nN] Z[Å]

Subtraction FShort=FTotal-FvdW

The chemical bonding force between tip apex atoms and surface atoms can be measured.

NC-AFM

SLIDE 15

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] ance [Å]

Si Sn We repeated force measurements using different tip apex states. Different cantilevers Different tip structure and composition by intentional tip-surface contact

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] ance [Å]

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] e [Å]

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] ance [Å]

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] ance [Å]

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] Dist Distance [Å] ance [Å]

S Sn n Si Si

The chemical bonding force: Sn and Si

Lateral precision: ±0.1Å

M. Abe, et al.,
M. Abe, et al., Appl
Appl. Phys.

. Phys. Lett Lett. . 87 87 (2005) 173503. (2005) 173503.

Atom tracking technique

SLIDE 16

Marked tip-apex dependence

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] N] Distan Distance ce [Å [Å]

1
1

1 2 3

2.
2.0
1.
1.5
1.
1.0
0.
0.5

0. 0.0 0. 0.5

F [ F [nN] N] Dis Distance [Å ce [Å] ]

Pb/Si Pb/Si Sn/Si Sn/Si

S Sn n Si Si Pb Pb Si Si

5 sets by various tip states 5 sets by various tip states

Absolute values of the chemical bonding force is useless for atom identification Absolute values of the chemical bonding force strongly depend on the tip apex structure or composition.

Different force

SLIDE 17

2
1

1 2 3 1 2 3

1.
1.0
0.
0.8
0.
0.6
0.
0.4
0.
0.2

0. 0.0 0. 0.2 0. 0.4 0. 0.6 0. 0.8 1. 1.0

F / F / F FSi

Si ( (Set et)

Distan Distance ce [Å [Å]

2
2
1
1

1 2 3

3
3
2
2
1
1

1 2

F [ F [nN] N] Distan Distance ce [Å [Å]

1
1

1 2 3

2.
2.0
1.
1.5
1.
1.0
0.
0.5

0. 0.0 0. 0.5

F [ F [nN] N] Dis Distance [Å ce [Å] ]

1
1

1 2 3

1.
1.0
0.
0.8
0.
0.6
0.
0.4
0.
0.2

0. 0.0 0. 0.2 0. 0.4 0. 0.6 0. 0.8

F / F / F FSi

Si ( (Set et)

Distan Distance ce [Å [Å]

Sn/Si Sn/Si relative relative interaction ratio: interaction ratio: 77% Pb/Si Pb/Si relative relative interaction ratio: interaction ratio: 59%

Averaged relative interaction ratio

Sn/Si Sn/Si Pb/Si Pb/Si

The The relative interaction ratio relative interaction ratio of the maximum attractive chemical bonding forces

f the maximum attractive chemical bonding forces

for the same tip for the same tip remains nearly constant independently on the tip remains nearly constant independently on the tip

S Sn n Pb Pb Si Si

5 sets by various tip states 5 sets by various tip states

Si Si

F i n g e r p r i n t s f

r

t h e s i n g l e a t

m

i d e n t i f i c a t i

n

SLIDE 18

Atom fingerprints

Si Sn Pb

FSn FPb FSi

Si Sn Pb

F’Sn F’Pb F’ Si FSn / FSi=0.77 FPb / FSi=0.59 F’Sn / F’Si=0.77 F’Pb / F’Si=0.59

SLIDE 19

0.1
0.1

0.0 0.0 0.1 0. 0.2 0.3 .3 0. 0.4 0.5 .5 0.6 0.6 1 2 3 4 5 6

Atom c Atom counts unts Topog Topographic heig raphic height ht [Å [Å]

1

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

To Total tal fo force rce [nN] [nN] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

2

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

3

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

4

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

5

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

6

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

7

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

8

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

9

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

10

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

11

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

12

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

13

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

14

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

15

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

16

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

17

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

18

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

19

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

20

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

21

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

22

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

23

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

24

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

To Total tal fo force rce [nN] [nN] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

25

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

26

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

27

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

28

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

29

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

30

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

31

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

32

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

33

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

34

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

35

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

36

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

37

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

38

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

39

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

Total for l force [ ce [nN] N] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å]

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

To Total tal fo force rce [nN] [nN] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å] 0. 0.0 0.4 0.8 1. 1.2 1. 1.6 2.0 2. 2.4 1 2 3 4 5 6 7 Atom c Atom counts unts Max Maximum at mum attr tract active total forc l force [nN e [nN]

77% 59% 100% Only 10 Δf(Z) averaged per force curve

0.
0.1

0.0 0.0 0.1 .1 0.2 0.2 0.3 0.4 0.5 .5 0. 0.6 1 2 3 4 5 6

Atom counts Atom counts Topogr Topographi aphic h height ight [Å] [Å] Pb Sn Si

1

1 2 1 2 3 4 3 4 5 6 7 8 5 6 7 8 9 10

2.5
2.5
2.0
2.0
1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

To Total tal fo force rce [nN] [nN] Est Estimated t mated tip-surface distance [Å] p-surface distance [Å]

3 -2 -1

1 1 2 3 2 3 4 5 4 5 6 7 6 7 8

22
22
20
20
18
18
16
16
14
14
12
12
10
10
8
8
6
6
4
4
2
2

Δf [H f [Hz] z] Distance [Å] Distance [Å] 0.0 0.0 0.4 .4 0.8 0.8 1.2 1.6 1.6 2.0 2.4 2.4 1 2 3 4 5 6 7 Ato Atom co coun unts ts Maximum at Maximum attr tract active total for tal force [nN e [nN]

Pb Sn Si

Atom identification: Si, Sn, Pb Low Si local chemical coordination

Y. Sugimoto, et al.,
Y. Sugimoto, et al., Nature

Nature 446 446 (2007) 64. (2007) 64.

SLIDE 20

Only 10 Δf(Z) averaged per force curve

2
1

1 2 3 1 2 3 4 5 4 5 6 7 6 7 8

25
25
20
20
15
15
10
10
5
5

Δf [Hz] f [Hz] Distance [Å] Distance [Å]

0.1

.1 0.0 0.1 0.2 .2 0.3 .3 0.4 .4 0.5 .5 0.6 0.7 .7 1 2 3 4 5 6

Atom counts Atom counts Topographic heig Topographic height [Å] ht [Å]

Pb Sn Si

0. 0.0 0.2 .2 0. 0.4 0.6 .6 0.8 0.8 1.0 1.2 1.2 1.4 1.6 1.6 1 2 3 4 5 6 7 8

Atom counts Atom counts Maximum at Maximum attr tract active t ve total for tal force [nN e [nN] Pb Sn Si

77% 59% 100%

1

1 2 3 2 3 4 5 6 7 8 9 8 9 10

1.5
1.5
1.0
1.0
0.5
0.5

0.0 0.0

To Total tal fo force rce [nN] [nN] Esti Estimated ti mated tip-surface distance [Å] p-surface distance [Å]

Atom identification: Si, Sn, Pb High Si local chemical coordination

Y. Sugimoto, et al.,
Y. Sugimoto, et al., Nature

Nature 446 446 (2007) 64. (2007) 64.

SLIDE 21

Atom manipulation

Atom manipulation Atom imaging Atom discrimination Atom identification

At room temperature

A A A B A A A B

Using AFM

SLIDE 22

Conventional lateral manipulation ‘Interchange lateral manipulation’ Instrument STM （Only conductive surface） AFM （All surface） Method On top In plane Temperature Cryogenic temperature Room temperature Nano structure

Ge atom Sn atom

New manipulation method

SLIDE 23

The direction of Sn migration is same as the scan direction.

Ge atom Sn atom Interchange lateral manipulation

Y. Sugimoto, et al.,
Y. Sugimoto, et al., Nature materials

Nature materials 4 4 (2005) 156. (2005) 156.

The procedure of creating atom letters at room temperature

SLIDE 24

The atom letters

A B C D E F G H I

SLIDE 25

Application to other systems

Si In Sb Si Si Sn Sn/Si(111)-(√3×√3) In/Si(111)-(√3×√3) Sb/Si(111)-(7×7)

SLIDE 26

Interchange vertical manipulation

I Interchange lateral manipulation nterchange lateral manipulation I Interchange vertical manipulation nterchange vertical manipulation

Construction time: 9 hours

SLIDE 27