Multi- scale Manufacturing at Kims Group Things Natural Tunable RF - - PowerPoint PPT Presentation

S.G. KIM, MIT

Multi- scale Manufacturing at Kim’s Group

The Microworld

0.1 nm 1 nanometer (nm) 0.01 µm 10 nm 0.1 µm 100 nm 1 micrometer (µm) 0.01 mm 10 µm 0.1 mm 100 µm 1 millimeter (mm) 1 cm 10 mm 10-2 m 10-3 m 10-4 m 10-5 m 10-6 m 10-7 m 10-8 m 10-9 m 10-10 m

Visible

The Nanoworld

1,000 nanometers =

Infrared Ultraviolet Microwave Soft x-ray

1,000,000 nanometers =

DNA proteins nm Molecule, Atoms bacteria 1 µm red blood cell ~5 µm

Human hair ~ 10-50 µm wide

+ - + - + - + E3

Things Natural Energy Harvesting RF Switch Tunable Photonics Nanopipette

air substrate

PMMA on Si a d

Things Engineered at Kim’s Lab.

Energy Harvesting from Environmental Vibrations

Inter-digitated Electrode PZT ZrO2 + - + - + - + membrane E3

PMPG RF transm itter + Sensor +

Piezoelectric MEMS power generator, d33 mode Monolithic MEMS devices

• 3V peak, 20 µW/ mm 2
• Comparable to Li/ LiCoO2 battery

Large-scale Autonomous Wireless Sensor Network

• Remote sensing of man-made and natural

infrastructures

• Structural health monitoring (Plants, Planes)
• Smart bearings for machine diagnostics
• R. Sood, et al., Hilton Head Conference 2004

S.G. KIM, MIT

Self- cleaning MEMS switch for 1011 cycles

100 billion cycle direct contact switch

Micro-undulated self-cleaning contact Lateral Au wall by molded electroplating Large strain PZT microactuator

Monolithic MEMS devices

• Maintain 0.1 Ω for 1 billion cycles and on
• low insertion loss, high isolation, low voltage

Low cost RF switches

• GSM cell phones
• High power military RF switches

Grooved surface Large strain PZT

Ω

S.G. KIM, MIT

• Y. Shi, et al., IEEE MEMS 2005, Miamit, Fl, January

2005

• N. Conway, et al., IEEE MEMS 2004, Maastricht,

Netherlands, January 2004

Tunable Photonic Crystals

Electrostatic Actuation1 Piezoelectric Actuation2

Strain tuning of microphotonic devices Monolithic MEMS devices Tunable Gratings1,2 Tunable Microcavity Resonator3 Smart communication devices for all-optical systems

Tunable Photonic Bandgap3

air substrate SiO

2 deformable

membrane integrated tri

• layer

piezoelectric microactuator 1D photonic crystal microcavity Si waveguide

0.2 0.4 0.6 0.8 1 1430 1470 1510 1550 1590

wavelength (nm) Normalized transmission

band gap band gap

• 1. Information Sciences, 149, pp. 31-40, 2003

2 . Applied Optics, Vol. 42, No. 4, 2003

• 3. Appl. Phys. Lett. , V.84,2004

S.G. KIM, MIT

Transplanting Carbon Nanotubes

Nanostructure assembly, a mechanical way Applications

• Massive Parallel Nanoprobe

Array

• Nanopipette
• Nanotip Cell Manipulation
• Ultra tough composites

Nanolelleting1

• Micro-blocks or cylinders with

nanotubes embedded

• Basic building blocks for

nano-assembly and transplantation

S.G. KIM, MIT

CMPed and Transplanted CNT bundle

1 T. El-Aguizy, et al., Applied Physics Letters, Vol. 85, No. 25, P.5995, 2004

Self-assembly or transplanting nanopellets

MIT PECVD CNT machine

Required Gas

• C2H2, CH4, + NH3

Controlled Temp.

• ver whole substrate (4”φ)
• 700~ 1200 oC

Working Pressure

• 1~ 10 Torr

(Base pressure: ~ 10-6 Torr)

• Temp. measurement

& feedback Large Area Substrate

• 4” diameter

Plasma Power

• DC 1000V, 1A

Heated Substrate

S.G. KIM, MIT

CNT with acetylene gas

S.G. KIM, MIT

MIT Nanoscanning Platform for Bio Assays

• Nanotube tip with tunable

stiffness in-plane AFM

• (Underwater specimen)
• Simultaneous Imaging and

Pipetting

• Multi-energy

probing/channeling

• Arrayable scanning
• C. Muller-Falcke, et al., Optics East, Philadelphia, PA, October, 2004

S.G. KIM, MIT