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High Resolution, High Sensitivity SIMS Analysis for DualBeams - - PowerPoint PPT Presentation
High Resolution, High Sensitivity SIMS Analysis for DualBeams - - PowerPoint PPT Presentation
High Resolution, High Sensitivity SIMS Analysis for DualBeams Brandon Van Leer The world leader in serving science What SIMS can do? Mass Spectra Depth profile Elemental maps: 32 S in steel 3D data: AlGaAs layers XY spatial XZ depth 2
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SEM/EDS TEM/EDS Atom Probe SIMS on DualBeam Probe beam
electron electron Atom extraction ion
Analysis beam
x-ray x-ray Ion (100% ionization) ion (1% ionization)
Isotope analysis
No No Yes Yes
Quantitative
Yes Yes Yes No
Lateral resolution
1µm 0.5-1nm 0.3 - 0.5nm 50nm
Depth resolution
1µm 2-10nm (specimen thickness) 0.1 - 0.3nm 20nm
Detection limit
1000ppm 1000ppm 5-10 atomic ppm for one minor element (boron, carbon,…) 10-100ppm
Lightest element
Li (?) B H H
Vacuum
10-3 - 10-4 Pa 10-5 Pa 10-7 - 10-10 Pa 10-3 - 10-4 Pa
Advantage
Routine High spatial resolution/3D atomic resolution/3D spatial and depth resolution/light elements/depth profile/detection limit
SEM/EDS: scanning electron microscope / energy-dispersive spectrometer TEM/EDS: transmission electron microscope / energy-dispersive spectrometer DualBeam: Gallium FIB used for a DualBeam as an example.
Analytical techniques comparison
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Secondary Ion Mass Spectrometry (SIMS) is a materials chemical analysis technique based on measure mass-to-charge ratio (m/z) from detected secondary ions, which are emitted as a small fraction of charged particles in sputtering from solid material surfaces by bombardment of primary ion beam.
What is TOF-SIMS?
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SIMS application example for Li-ion battery research
SIMS applications:
- Lithium element distributions after
charge and discharge states.
- Co, Ni, Mn depth distribution.
- Binder materials element
distribution. Positive electrode Negative electrode Conductor SIMS enables precise characterization of Li containing materials
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SIMS application example for Li-ion battery research
7Li+ distribution map in a lithium-ion battery cathode. Horizontal field
width (HFW) of the image is 40μm. Li, Ni, Mn and Co elements depth profile in a lithium-ion battery cathode
7Li+ 16O-
Lithium and Oxygen lateral distributions in Lithium-ion battery cathode
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Polyvinylidene fluoride binders in lithium-ion battery cathode
PVDF: polyvinylidene fluoride binders, 19F- SIMS image shows the distributions of the binders materials
SEM/EDS is very challenging for mapping the binder element fluoride distribution, but can be efficiently imaged using SIMS technique.
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SIMS application example for steels
11B 16O 56Fe 142Nd 27Al
ISE
SIMS maps showing the distribution of B, O, Al, Nd and Fe in a NdFeB magnet
SIMS allows detection of light and low concentration elements is steels
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AlGaAs layers in 3D
58nm AlGaAs layer 25nm AlGaAs layer
3D SIMS data reconstruction of 27Al in a multi-layers stacks of GaAs/AlGaAs layers grown on metal. The thin 25nm AlGaAs layer is uneven growth from a metal substrate.
Sample was provided by: Prof. Venkat Selvamanickam from UH-Mechanical Engineering, University Houston, USA
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Join our DualBeam – SIMS talk on Thursday!
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