De Density nsity an and d La Large rge Sc Scale: ale: A 2 - - PowerPoint PPT Presentation

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RTu1B-4 Heter He erodyne odyne Sen ensing sing CMO MOS S Arra rray y with ith Hi High gh De Density nsity an and d La Large rge Sc Scale: ale: A 2 240 40-GHz, GHz, 32 32-Unit nit Receiv eceiver er Us Using ing a De a

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SLIDE 1

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

RTu1B-4

He Heter erodyne

  • dyne Sen

ensing sing CMO MOS S Arra rray y with ith Hi High gh De Density nsity an and d La Large rge Sc Scale: ale: A 2 240 40-GHz, GHz, 32 32-Unit nit Receiv eceiver er Us Using ing a De a De-Central Centralized ized Archit chitect ecture ure

Zhi Hu, Cheng eng Wan ang, g, an and Ruonan

  • nan Han

an

Massach sachus usetts tts Insti stitut tute of Techno chnology logy Cambridge, mbridge, MA, US USA

1

slide-2
SLIDE 2

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Intr

troduc

  • duction

tion

  • Array Architecture
  • Multi-functional Heterodyne Pixels
  • Phase Locking Circuitry
  • Measurement Results
  • Conclusion

2

Ou Outl tlin ine

slide-3
SLIDE 3

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

3

Ter erahe ahertz tz Ra Rada dar as as an an Im Impor

  • rtan

tant t Sen ensi sing ng Mod

  • de
  • Multiple

tiple sensin sing g modes es are re needed ed in naviga igation tion applicat catio ions ns where e safety ty is a priorit ity

– Examples: self-driving cars, unmanned aerial vehicles, etc.

[Source: robotic icsand ndaut autom

  • mat

ationne ionnews ws.com

  • m]

[Source: Getty Imag ages] es]

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SLIDE 4

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

4

Ter erahe ahertz tz Ra Rada dar as as an an Im Impor

  • rtan

tant t Sen ensi sing ng Mod

  • de
  • Multiple

tiple sensin sing g modes es are re needed ed in naviga igation tion applicat catio ions ns where e safety ty is a priorit ity

– Examples: self-driving cars, unmanned aerial vehicles, etc.

[Source: robotic icsand ndaut autom

  • mat

ationne ionnews ws.com

  • m]

[Source: Getty Imag ages] es] [National ional Resear earch h Counc ncil, il, Assess essment nt of Millim limete eter-Wa Wave and Teraher hertz z Techno hnolo logy gy for Detection ion and Ident ntific ificat atio ion n of Conceal aled Explosives es and Weapons ns, 2007]

~0.01 1 dB/m @ 2 240 GHz

  • Teraher

ertz tz sensing sing is an imp mporta tant nt compl mplemen ement t to light-based ased sensin sing g (e.g.

  • g. LiDAR)

R)

– Sub-THz waves have much lower propagation loss than light

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SLIDE 5

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

5

Pos

  • ssi

sible e Pat ath Towar ards ds Sharp arp THz Hz Be Beam am

  • If we use a

a singl gle e het eterodyn dyne e receiv iver er array, , – to obta tain in 1° beam m width, th, an area of 6cm x 6cm (~ 10,000 units) s) is needed ded at 240 GHz

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SLIDE 6

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

6

Pos

  • ssi

sible e Pat ath Towar ards ds Sharp arp THz Hz Be Beam am

10×10 Sparse TX Array 10×10 Dense RX Array

  • One possib

sible e soluti tion

  • n is based

ed on the two-way y array pattern

– On-board sparse TX array generates sharp beams – On-chip dense RX array synthesizes single beam to filter out TX sidelobes -- with relaxed, but still high, scale requirement

  • 30
  • 15

15 30

  • 30
  • 20
  • 10

RX Pattern TX Pattern Convoluted Pattern

Power Response (dB) Angle (Degree)

  • If we use a

a singl gle het eterodyn dyne e receiv iver er array, , – to obta tain in 1° beam m width, th, an area of 6cm x 6cm (~ 10,000 units) s) is needed ded at 240 GHz

slide-7
SLIDE 7

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

7

Revie iew of w of Pr Previo ious us On On-Chip ip THz Hz Sens ensin ing Ar Arrays ys

[E. Öjefor

  • rs,

, et al., , JSSC, , 2009] [R. Al Hadi et al., , JSSC, 2012] [R. Han et al., , JSSC, 2013]

  • Dir

irec ect (Squa quare re-La Law) Det etec ector

  • r Arrays (la

larg rge scale) e)

  • Techn

hniq ique ues s of buildi ding ng large-sc scale ale direct t det etect ctor arrays s have e become come mature ure

  • Li

Limita tations tions of dire rect ct det etect ction

  • n

 Low responsivity and low SNR, due to limited received RF power (PIF ∝ PRF

2)

 Coherence of RF signals is lost, thus unable to perform beam-forming (electrical scanning)

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SLIDE 8

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

8

Revie iew of w of Pr Previo ious us On On-Chip ip THz Hz Sens ensin ing Ar Arrays ys

2 x 2 2 array [K. . Statnik nikov, , et al., , TMTT, , 2015] 8-un unit it array [C. Jiang ng, , et al., , JSSC, 2016]

  • Het

etero erodyne yne Det etec ector Arrays (small all scale ale)

  • Strengt

gths hs of het eterody dyne ne det etecti ction

 High responsivity and high SNR, by leveraging high LO power (PIF ∝ PLO ∙ PRF)  Coherence of RF signals is preserved, thus inherently capable of beam-forming

  • There

e are still challen enges ges of designin gning large-sc scal ale het eterody

  • dyne

ne det etect ctor

  • r arrays

s to form m sharp p beam am

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SLIDE 9

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Introduction
  • Array

y Archit chitecture ecture

  • Multi-functional Heterodyne Pixels
  • Phase Locking Circuitry
  • Measurement Results
  • Conclusion

9

Ou Outl tlin ine

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SLIDE 10

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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10

RX RX Chip ip: : Cent entral aliz ized ed vs.

  • s. De

De-Cent entraliz alized ed Ar Arrays ys

On-Chip Antennas Sub-THz Mixers On-Chip Sub-THz PLL Sensing Pixel Sub-THz LO Signal, fLO fIF

÷N PFD LPF

Reference Clock, fref

  • Central

tralized ized array relies s on a singl gle e LO source, ce, however er,

 LO power of each unit scales down as array scales up  Long LO feed lines are lossy and hard to route

8-un unit it array [C. Jiang ng, , et al., , JSSC, 2016]

  • Exam

ample le

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SLIDE 11

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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11

RX RX Chip ip: : Cent entral aliz ized ed vs.

  • s. De

De-Cent entraliz alized ed Ar Arrays ys

1 2 4 8 16 32

  • 115
  • 110
  • 105
  • 100
  • 95

Phase Noise

(dBc/Hz, f =1MHz)

Number of Coupled Units

On-Chip Antennas Sub-THz Mixers On-Chip Sub-THz PLL Sensing Pixel Sub-THz LO Signal, fLO fIF

÷N PFD LPF

Reference Clock, fref Coupled Local Oscillators Phase/Frequency Control, vctrl Sensing Pixel Sub-THz LO Signal, fLO

On-Chip Phase- Locked Loop

fIF On-Chip Sub-THz PLL

÷N PFD LPF

Reference Clock, fref On-Chip Antennas Sub-THz Mixers

  • De

De-Cent Centralized alized array ensures ures every unit havin ing g an LO source ce

 LO sources are coherently coupled; corporate feed is thus eliminated  Oscillator power requirement is relaxed  Bonus: LO phase noise improves as more units are coupled

  • Central

tralized ized array relies s on a singl gle e LO source, ce, however er,

 LO power of each unit scales down as array scales up  Long LO feed lines are lossy and hard to route

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SLIDE 12

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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12

Chal allen lenges ges of

  • f Scal

caling ing an and d Ou Our Sol

  • lutions

utions

Coupled Local Oscillators Phase/Frequency Control, vctrl Sensing Pixel Sub-THz LO Signal, fLO

On-Chip Phase- Locked Loop

fIF On-Chip Sub-THz PLL

÷N PFD LPF

Reference Clock, fref On-Chip Antennas Sub-THz Mixers

  • Densit

sity y challen lenge: ge:

– Within λ/2 ∙ λ/2 area, antenna,

  • scillator, mixer, coupler etc.

needs to be incorporated

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SLIDE 13

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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13

Vctrl

32 IF Signals Data Processing RF Receiving from Pattern 1 75-MHz Reference

λRF / 2

ILFD (÷) Divider Chain PFD Charge Pump LPF LO Signal RF Receiving from Pattern 2 Data Processing

λRF / 2

Slot Antenna Self-Oscillating Harmonic Mixer (SOHM) Slotline w/ LO signal LO Coupling MUX

(off-chip)

λRF / 4

Chal allen lenges ges of

  • f Scal

caling ing an and d Ou Our Sol

  • lutions

utions

  • Density

sity challen enge: ge:

– Within λ/2 ∙ λ/2 area, antenna,

  • scillator, mixer, coupler etc.

needs to be incorporated

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SLIDE 14

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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14

  • Self-Os

Oscil cillat atin ing g harmonic

  • nic mixer

er (SOHM) emp mployed ed

– Oscillator and mixer condensed into one component

  • Slot
  • tline

ine-res reson

  • nator
  • r-based

sed

  • scil

illat ator

  • r coupling

ing emp mployed

  • Two interlea

eaved ed 4x4 array integr grat ated ed (Aunit

unit =

= λ/2 /2 ∙ λ/2)

Vctrl

32 IF Signals Data Processing RF Receiving from Pattern 1 75-MHz Reference

λRF / 2

ILFD (÷) Divider Chain PFD Charge Pump LPF LO Signal RF Receiving from Pattern 2 Data Processing

λRF / 2

Slot Antenna Self-Oscillating Harmonic Mixer (SOHM) Slotline w/ LO signal LO Coupling MUX

(off-chip)

λRF / 4

Chal allen lenges ges of

  • f Scal

caling ing an and d Ou Our Sol

  • lutions

utions

  • Density

sity challen enge: ge:

– Within λ/2 ∙ λ/2 area, antenna,

  • scillator, mixer, coupler etc.

needs to be incorporated

slide-15
SLIDE 15

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Introduction
  • Array Architecture
  • Mult

lti-functiona functional l Het eter erodyne

  • dyne Pi

Pixels ls

  • Phase Locking Circuitry
  • Measurement Results
  • Conclusion

15

Ou Outl tlin ine

slide-16
SLIDE 16

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

16

EM EM Str truc ucture ture of

  • f a S

a Sin ingle le Cel ell

  • The array consists

sists of 16 cells, s, each h cell conta tains ns 2 units

  • The bound

undaries aries of each unit is well-defi efine ned, d, as a result t of LO coupler pler design gn

  • The unit

t is structu ucturally and electrical ctrically y symme metric; tric; a PEC bounda ndary (AB AB) ) can be drawn in the middle e at f0

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SLIDE 17

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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17

Hi Highli light ght I: I: Mul ulti tifuncti functional

  • nal Str

tructure uctures

Vctrl

45°@f0 45°@f0 VDD TL3 TL1 TL2 TL4 VIF TL5 TL4' TL1' 60°@f0 C3

C2 C1

TL3'

C4 90°@2f0 EM structure as refer erence

  • TL

TL4 and TL4’ are slot antennas

  • TL

TL3 and TL3’ are resonator and coupler

  • f oscilla

illator

  • rs
  • TL

TL1, TL1’, TL2, and TL5 are integr gral al compone

  • nent

nts s of oscil illat ator

  • rs
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SLIDE 18

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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18

Hi Highli light ght I: I: Mul ulti tifuncti functional

  • nal Str

tructure uctures

TL3 TL1 TL2 TL4 TL5 Virtual Ground C2 C1 C3

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SLIDE 19

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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19

Hi Highli light ght I: I: Mul ulti tifuncti functional

  • nal Str

tructure uctures

TL3 TL1 TL2 TL4 TL5 Virtual Ground C2 C1 C3

TL3 TL1 TL4 C1 M1

Self-Feeding Oscillator

Enhance instability Antenna (Resonator II) Coupler (Resonator I)

[Han et al., , JSSC, , 2013]

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SLIDE 20

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

20

Hi Highli light ght I: I: Mul ulti tifuncti functional

  • nal Str

tructure uctures

TL3 TL1 TL2 TL4 TL5 Virtual Ground C2 C1 C3

TL3 TL1 TL4 C1 M1

Self-Feeding Oscillator

Enhance instability Antenna (Resonator II) Coupler (Resonator I)

[Han et al., , JSSC, , 2013]

V2f0 Vf,RF Vf,IF

Short @ f0

TL1 TL3 from

  • scillator

from antenna

+

Oscillates Down-converts Receives

slide-21
SLIDE 21

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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21

Hi Highli light ght I: I: Mul ulti tifuncti functional

  • nal Str

tructure uctures

TL3 TL1 TL2 TL4 TL5 Virtual Ground C2 C1 C3

  • Self-oscilla
  • scillati

ting g harm rmoni nic c mixer r (SOHM HM) ) can be re regarded ded as an oscill illator

  • r that

– Oscillat ates es at f0 = 120 GHz and simultaneously generates LO signal fLO = 2f0 = 240 GHz – Receives es RF power from resonator (TL4, Resonator II) – Down-con

  • nverts RF to IF, i.e. fIF = fRF – 2f0 (using the non-linearity of the transistor)
  • Osci

cillat ator

  • r is optim

imized ized to the optim imal al phase e condit ition ion by choosin

  • sing

g proper ZTL1

L1 and φTL1 L1

TL3 TL1 TL4 C1 M1

Self-Feeding Oscillator

Enhance instability Antenna (Resonator II) Coupler (Resonator I)

[Han et al., , JSSC, , 2013]

V2f0 Vf,RF Vf,IF

Short @ f0

TL1 TL3 from

  • scillator

from antenna

+

Oscillates Down-converts Receives

slide-22
SLIDE 22

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

22

Hi Highli light ght II: II: Nea ear-fie ield ld In Inter erfer erenc ence

TL3 TL1 TL4 C1 M1 Antenna (Resonator II) Coupler (Resonator I)

  • Resona

nator r I an and II are for coupling ng and radiation ation cancelling ng

  • For explana

nati tion, n, E-field d distr stribut utions ns are needed

slide-23
SLIDE 23

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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23

E- Field

Power Flow TL2 TL5

d c b a

Hi Highli light ght II II: : Nea ear-fie ield ld In Inter erfer erenc ence e at at f0

  • At f0 =

= fLO

LO/2

/2, , wa waves s in TL3 induce duce coupling ng bet etween n

  • scillator
  • rs
  • E-Field

d polari rizat zations ns in TL3 and TL4 of adjacent nt units s ensure ure radiati ation n cancellati tion n at f0

TL3 TL1 TL4 C1 M1 Antenna (Resonator II) Coupler (Resonator I)

  • Resona

nator r I an and II are for coupling ng and radiation ation cancelling ng

  • For explana

nati tion, n, E-field d distr stribut utions ns are needed

TL1' TL4 TL4' TL1 TL3' TL3 C4

Dummy

C3

Current Source

TL2 TL5

  • Full-wave Simulati

ulation

  • n (ports

ts at drains ns are driven) en)

  • Theoreti

retica cal predicti diction

slide-24
SLIDE 24

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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24

E- Field

Weak Power Leakage TL2 TL5 Cgd LO Power Confinement

Hi Highli light ght II II: : Nea ear-fie ield ld In Inter erfer erenc ence e at at 2f0

  • At 2f0

0 =

= fLO

LO,

, wa waves s are largely y confine ned d withi thin n the trans nsist stor

  • Pot
  • tenti

ntial radiati ation n is cancelled d due to polari riza zati tions

  • ns

TL3 TL1 TL4 C1 M1 Antenna (Resonator II) Coupler (Resonator I)

  • Resona

nator r I an and II are for coupling ng and radiation ation cancelling ng

  • For explana

nati tion, n, E-field d distr stribut utions ns are needed

  • Full-wave simula

mulati tion n (ports ts at drains ains are driven) n)

  • Theoreti

retica cal predicti diction

slide-25
SLIDE 25

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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um 10-12 June 2018, Philadelphia, PA

25

E- Field

Power Injection TL2 TL5

Hi Highli light ght II II: : Nea ear-fie ield ld In Inter erfer erenc ence e at at fRF

RF

TL3 TL1 TL4 C1 M1 Antenna (Resonator II) Coupler (Resonator I)

  • Resona

nator r I an and II are for coupling ng and radiation ation cancelling ng

  • For explana

nati tion, n, E-field d distr stribut utions ns are needed

  • At fRF

RF, wa

waves are received d by an antenn ennas as sinc nce they y are from m a far far-field ld source ce with h the same polari rizatio zation

  • Down-con
  • nverted

d IF signa nals are thus us out-of

  • f-phase

phase

  • Full-wave simula

mulati tion n (ports ts at antenn ennas s are dri riven) en)

  • Theoreti

retica cal predicti diction

slide-26
SLIDE 26

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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26

E- Field

Power Injection TL2 TL5

E- Field

Weak Power Leakage TL2 TL5 Cgd LO Power Confinement

E- Field

Power Flow TL2 TL5

d c b a

Rec ecap ap: : Mul ulti ti-functi functionalit

  • nality

y + + Nea ear-fie ield ld In Inter erfer erenc ence

TL3 TL1 TL4 C1 M1 Antenna (Resonator II) Coupler (Resonator I)

  • Resona

nator r I an and II are for coupling ng and radiation ation cancelling ng

  • For explana

nati tion, n, E-field d distr stribut utions ns are needed

  • At 2f0,

, wa waves are largely confined ned within thin the trans nsistor

  • r
  • Pot
  • tenti

ntial radiati ation n is cancelled d due to polari riza zati tions

  • ns
  • At f0, waves in TL3 induce

duce coupling ling bet etween oscill llator

  • rs
  • E-Field

d polari rizat zations ns in TL3 and TL4 of adjacent nt units s ensure ure radiati ation n cancellati tion n at f0

  • At fRF

RF, wa

waves are received d by an antenn ennas as sinc nce they y are from m a fa far-field d source with th the same polari riza zati tion

slide-27
SLIDE 27

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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27

Sim imul ulation ation Resu esults ts of

  • f SOH

OHM Per erform

  • rmance

ance

  • DC Power

er per unit: t: 43.2 mW mW

  • Conver

ersion sion loss s (CL): ): 16 dB (with th 50 50-Ω outpu put t load)

  • Noise

se figure ure (NF): F): 46.5dB dB at fIF

IF =5 MHz; 19.3 dB at fIF IF =100 MHz 1k 10k 100k 1M 10M

  • 120
  • 100
  • 80
  • 60
  • 40
  • 20

Phase Noise of f0 (dBc/Hz) Frequency Offset (Hz)

10k 100k 1M 10M 100M 1G

  • 170
  • 160
  • 150
  • 140
  • 130

IF Noise PSD (dBm/Hz) Frequency (Hz) 90 135 180 225 270

  • 10

10 20

Directivity in H-Plane (dBi) Phi (degree)

  • 20
  • 10

0 10 20

90 135 180 225 270

  • 10

10 20

Directivity in E-Plane (dBi) Theta (degree)

  • 20
  • 10

0 10 20

  • Antenn

nna a peak k directi ctivity: ty: 4.8 dB; antenn nna effici icien ency: cy: 40 %

Simulat lated d beam am-stee eering ing resu sult lts Simulat lated d IF noise se floor

  • or

Simulat lated d f0 phase se noise se

slide-28
SLIDE 28

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Introduction
  • Array Architecture
  • Multi-functional Heterodyne Pixels
  • Ph

Phase ase Locking cking Circuit cuitry

  • Measurement Results
  • Conclusion

28

Ou Outl tlin ine

slide-29
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RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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29

Ov Over ervie view w of

  • f th

the Ph e Phas ase e Lo Locki cking ng Cir ircuit cuitry

Phase/Frequency Control, vctrl Sub-THz LO Signal, fLO

On-Chip Phase- Locked Loop

÷N PFD LPF

Reference Clock, fref

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30

Ov Over ervie view w of

  • f th

the Ph e Phas ase e Lo Locki cking ng Cir ircuit cuitry

  • Bott
  • ttom
  • m two pixel units

ts inject ct a small all amoun unt t of waves es at f0 = 120 GHz into

  • the divid

ider er

  • PLL compo

pone nent nts s generat ate e the VCO O contr trol

  • l volta

tage ge for the entire e array

  • Due to array-wi

wide de coupl pling, ng, all units s are locked ed

Phase/Frequency Control, vctrl

On-Chip Phase- Locked Loop

÷N PFD LPF

Reference Clock, fref Pixel at Row 8, Col 2 Pixel at Row 8, Col 3

Vf0, DC LO Power to ILFD

Array Boundary

ILFD Switch

45°@f0 45°@f0 To Oscillators 54°@f0 22°@f0 22°@f0

ILFD

Equivalent Circuit

ILFD

≈ Open

AC Cap AC Cap AC Cap

Sub-THz LO Signal, fLO

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RTu1B-4 2018 8 IEEE MTT-S Radio

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31

Des Desig ign of n of th the 12 e 120-GH GHz Di Divid ide-by by-16 6 Di Divid ider er

  • 1st

st stage:

ge: div-by by-4 ILFD, D, based sed on finj

nj = 4fosc sc mixin

ing g with h 3fosc

sc

  • 2nd

nd stage:

ge: div-by by-4 ILFD, D, based sed on inject cted ed signa nals s modulat atin ing g the current nt sources ces of the ring osci cillat ator

  • r
  • Tot
  • tal

al DC power consum sumpti ption:

  • n: 10.5 mW

mW

VT VT VT VDD Vf0/16 Vf0 VP VDD,osc Vtune VDD, buf VB Vf0/4, p VDD, buf VB Vf0/4, n

0.54nH 0.29nH 0.29nH 0.54nH 10kΩ 10kΩ 2pF 2pF

VT VT

4 μm 4 μm 10 μm 6 μm 3 μm 10kΩ 20 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 6 μm 1 μm

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SLIDE 32

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Introduction
  • Array Architecture
  • Multi-functional Heterodyne Pixels
  • Phase Locking Circuitry
  • Me

Meas asurement urement Res esults ults

  • Conclusion

32

Ou Outl tlin ine

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33

Vctrl Output Reference Input Divider Output PLL DC Biases Array DC Biases MUX DC Biases MUX Output 1 Chip MUX

ADG726

High-Res Silicon Wafer Drilled PCB MUX Output 2 CMOS Chip Hemispheric, High-Res Silicon Lens

Di Die Ph e Photo

  • an

and C d Chip ip Pac ackaging aging De Deta tail ils

Array

Boundary Terminations ILFD & Buffers Dividers, PFD, Charge Pump

IF Outputs

Boundary Terminations

1.4 mm 2.0 mm

1.1 mm 1.1 mm

Interface

  • Silicon

con lens is attached ached to the backside ckside of the chip (backsid ackside e radiati tion)

  • n)
  • Off-Chi

hip p multi tiple plexer er is used d to select ect the desired ed IF signal al from 32 outpu puts ts

  • Techn

hnol

  • logy:
  • gy: 65nm CMOS;

S; chip area 2.8 mm2 (1. 1.21 1 mm2 for the array)

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RTu1B-4 2018 8 IEEE MTT-S Radio

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34 Power Supply Agilent N9020A MXA Spectrum Analyzer WR-3.4 Antenna VDI WR-3.4 Frequency Extender (TX Mode) ZFL-500LN Amplifiers HP 83732B Signal Generator

fRF / 18 fIF fLO / 3200 10 MHz Sync ...

LDO Board (ADP7157) Keysight E-8257D Signal Generator

DC Biases fRF

Silicon Lens Silicon Wafer Chip 10cm

  • 20 dBm
  • 120 dBm

 Center: 73.2 MHz  Span: 200 kHz  RBW: 10 Hz

Ov Over ervie view w of

  • f th

the C e Chip ip Mea easur surem ement ent

VDI 220-to-320GHz Frequency Extender Chip and PCB Spectrum Analyzer Signal Generator

  • VDI WR-3.

3.4 extende nder is used d as the RF source ce

  • Frequ

quen ency cy reference nce of the chip and the VDI source ce are synch chroni

  • nized

ed

  • Lockin

ing g range e of the array (obta taine ned d from divider der outpu put): t): 232.96 6 GHz Hz – 234.88 GHz Hz

Spec ectr trum m of the div ivider ider output

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RTu1B-4 2018 8 IEEE MTT-S Radio

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35

Mea easur sured ed IF IF S Spectr ectra a at at Lo Low/ w/High High Freq equen uenci cies es

  • Flick

cker er noise se domina nates es until ~ 450 MHz (IF F amp mp BW = 500 MHz)

IF noise se spectr trum m (from

  • m spec

ectr trum m analy alyzer)

White Noise Floor 0 dBm  Start: 1.0 MHz  Stop: 500.0 MHz  RBW: 100 kHz

  • 100 dBm

4.6 MHz 475 MHz

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RTu1B-4 2018 8 IEEE MTT-S Radio

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36

Noise Floor when RF Signal is Absent 4.6-MHz IF Signal 63 dB SNR

(normalized to 1-Hz RBW) 0 dBm

  • 100 dBm

 Center: 4.60 MHz  Span: 2.00 MHz  RBW: 100 Hz

Noise Floor when RF Signal is Absent 475-MHz IF Signal 87 dB SNR

(normalized to 1-Hz RBW) 0 dBm

  • 100 dBm

 Center: 475 MHz  Span: 50.0 MHz  RBW: 100 kHz

Mea easur sured ed IF IF S Spectr ectra a at at Lo Low/ w/High High Freq equen uenci cies es

  • Flick

cker er noise se domina nates es until ~ 450 MHz (IF F amp mp BW = 500 MHz)

  • At 4.6 MHz (belo

elow w corner frequ quen ency), cy), SNR = 63 dB (RBW = 1Hz)

  • At 475 MHz (beyond
  • nd corner

er frequen ency), cy), SNR = 87 dB (RBW = 1Hz)

  • Other

er pixels s are re also

  • locked;

ed; they y have e similar ilar responses, nses, and their ir fIF

IF all shifts

ts simul ulta tane neousl

  • usly

y as fref shifts ts

IF noise se spectr trum m (from

  • m spec

ectr trum m analy alyzer) IF spec ectr trum m (fIF

IF = 4.6 MHz)

Hz) IF spec ectr trum m (fIF

IF = 475 MHz)

Hz)

White Noise Floor 0 dBm  Start: 1.0 MHz  Stop: 500.0 MHz  RBW: 100 kHz

  • 100 dBm

4.6 MHz 475 MHz

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RTu1B-4 2018 8 IEEE MTT-S Radio

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37

Mea easur sured ed 4. 4.6-MHz Hz IF IF of

  • f Som
  • me

e Ot Other er Units Units

Row w 3, Col 4 Row w 2, Col 2 Row w 1, 1, Col 3 Row w 7, Col 2 Row w 8, Col 2 Row w 6, Col 3

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RTu1B-4 2018 8 IEEE MTT-S Radio

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38

90 120 150 180 210 240 270

  • 25
  • 20
  • 15
  • 10
  • 5

5 10 Measured Pattern Simulated Pattern Theta (Degree) E-Plane Antenna Directivity (dBi) 90 120 150 180 210 240 270

  • 25
  • 20
  • 15
  • 10
  • 5

5 10 Measured Pattern Simulated Pattern Phi (Degree) H-Plane Antenna Directivity (dBi)

Ant Antenn enna a Pat atter ern and P n and Per erform

  • rmance

ance Ev Eval aluation uation

  • Conver

ersion sion gain (dB) CG CG = = PIF

IF – PRF RF , where

PIF

IF =

= PIF,

, analy lyzer zer – Gamp, and

PRF

RF =

= PRF, TX + + DTX

TX +

+ GRX

RX – 20log10 10(λ/(4

/(4πd))

  • Noise

se figure ure (dB) B) NF NF = = Pnoise

se – (-174

4 dBm) ) – CG CG, where Pnoise

ise = 10log10 10(1

(10(Pnoise

noise, , ana naly lyze zer – Gamp)/10 – 10

10-17.4

.4)

(considering NFamp = 3dB)

  • Here, we have

e Gamp = 49 dB, PRF,TX

TX =

= -7.1 1 dBm, , DTX

TX = 24 dBi,

, DRX

RX = 6.0 dB, ηRX RX = 40 % (simul

mulated), ed), λ = 1. 1.28 mm, d = 0.1 m

  • For fIF

IF = 475 MHz (beyond

  • nd corner

er frequ quen ency), cy), CG CG = = -42.4 dB, NF NF = 44.2 dB dB

Measu asured d and d simulat lated ed anten enna a patter erns s (E-Plane) lane) Measu asured d and d simulat lated ed anten enna a patter erns s (H-Pla lane) e)

Defin ine e Sensiti sitivi vity ty = = NEP EP ∙ √1000Hz = = -174 dBm + + NF NF + 30dB; ; for for fIF

IF = 475 MHz,

z, Sensi sitivi tivity ty = 0.10 .105 pW pW

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RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

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39

Mea easur sured ed Ph Phas ase e Noi

  • ise of

se of th the L e LO S O Sig igna nal

Down-converted 2f0

  • 10 dBm
  • 110 dBm

 Center: 240 MHz  Span: 2.00 MHz  RBW: 20 Hz

  • 84 dBc/Hz @ 1-MHz Offset
  • 40 dBc/Hz @ 1-kHz Offset

0 dBc/Hz

  • 100 dBc/Hz

Power Supply Agilent N9020A MXA Spectrum Analyzer WR-3.4 Antenna HP 83732B Signal Generator

2f0 - Δf Δf fLO / 3200 10 MHz Sync ...

LDO Board (ADP7157) Keysight E-8257D Signal Generator

DC Biases 2f0

VDI WR-3.4 Frequency Extender

(RX Mode)

Near Field ZFL-500LN Amplifiers

  • VDI extender

nder is placed ed very close se to the chip to captu ture e the leaked ed near-fiel eld d radiati tion

  • n at 2f

2f0

  • Measur

sured ed 2f0 phase e noise e at 1 MHz offse fset t is -84 dBc/Hz /Hz

Spec ectr trum m of the leak aked 2f0 signal al Measu asured d phase se noise se of the 2f0 signal al

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RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

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40

Per erform

  • rmance

ance Com

  • mparison

arison

Refe ferenc rences es This Work rk [5] [5] [1] [1] [2] [2] [3] [3] Det etecti tion n Met ethod Heterodyne Detection Square-Law (Direct) Detection Array y Size ze 4x8 8 4x4 Array y Scalability Yes No Yes Yes Yes RF Frequenc quency y (GHz) 240 320 280 320 280 Sensiti sitivi vity (pW pW) 0.105 † 71.4 917 1080 250 DC Power (mW mW) 980 117 6 38 180 Chip p Area (mm2) 2.80 3.06 5.76 6.76 6.25 Techno nology gy 65nm CMOS 130nm SiGe 130nm CMOS 180nm SiGe 130nm SiGe

Not

  • tes:

es:

† Calculated based on PIF and Pnoise at fIF = 475 MHz

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RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

41

Per erform

  • rmance

ance Com

  • mparison

arison

Refe ferenc rences es This Work rk [5] [5] [1] [1] [2] [2] [3] [3] Det etecti tion n Met ethod Heterodyne Detection Square-Law (Direct) Detection Array y Size ze 4x8 8 4x4 Array y Scalability Yes No Yes Yes Yes RF Frequenc quency y (GHz) 240 320 280 320 280 Sensiti sitivi vity (pW pW) 0.105 † 71.4 917 1080 250 DC Power (mW mW) 980 117 6 38 180 Chip p Area (mm2) 2.80 3.06 5.76 6.76 6.25 Techno nology gy 65nm CMOS 130nm SiGe 130nm CMOS 180nm SiGe 130nm SiGe

Not

  • tes:

es:

† Calculated based on PIF and Pnoise at fIF = 475 MHz

slide-42
SLIDE 42

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • Introduction
  • Array Architecture
  • Multi-functional Heterodyne Pixels
  • Phase Locking Circuitry
  • Measurement Results
  • Conclusion
  • nclusion

42

Ou Outl tlin ine

slide-43
SLIDE 43

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • For the first

st time, me, het eter erod

  • dyne

yne receiv iver er array y has achieved ed large ge scale e and high h dens nsity ity that at are comparable arable to those se of square uare-la law w det etect ector

  • r arra

rays ys

  • Our arra

ray improves es the sensitivit sitivity y by ∼ 680x compared ared with h the 8-unit it het eter erody

  • dyne

ne receiv iver er arra ray, , and by ∼2400x x compar ared d with h the best t square are- law det etect ector

  • r arrays

ys

  • Scala

labili bility ty and sensitiv sitivity ity improvem emen ents ts make sub-THz THz arra ray y technology nology a a more re promis mising ing candidat date for the implem lemen entat tation ion of high-resoluti resolution n beam- forming ming image gers in t n the fut uture ure

43

Con

  • ncl

clusio usion

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SLIDE 44

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

  • The au

e author

  • rs

s would ld lik ike t e to thank

– Guo Zhang, Jack Holloway and Dr. Xiang Yi at MIT for technical discussions – Dr. Andrew Westwood and Kathleen Howard at Keysight Inc. for their support to the experimental instruments

  • This

is work rk was supp pported ed by

– The National Science Foundation CAREER Award (ECCS-1653100) – Taiwan Semiconductor Manufacturing Company (TSMC) – The Singapore-MIT Research Alliance

44

Ack ckno nowl wledg edgement ement

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SLIDE 45

RTu1B-4 2018 8 IEEE MTT-S Radio

  • Frequen

quency Integrat egrated ed Circui cuits s Symposi

  • sium

um 10-12 June 2018, Philadelphia, PA

RTu1B-4

He Heter erodyne

  • dyne Sen

ensing sing CMO MOS S Arra rray y with ith Hi High gh De Density nsity an and d La Large rge Sc Scale: ale: A 2 240 40-GHz, GHz, 32 32-Unit nit Receiv eceiver er Us Using ing a De a De-Central Centralized ized Archit chitect ecture ure

Zhi Hu, Cheng eng Wan ang, g, an and Ruonan

  • nan Han

an

Massach sachus usetts tts Insti stitut tute of Techno chnology logy Cambridge, mbridge, MA, US USA

45