Black Phosphorus Field Effect Transistors Albert Liu Black - - PowerPoint PPT Presentation

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Black Phosphorus Field Effect Transistors Albert Liu Black - - PowerPoint PPT Presentation

Black Phosphorus Field Effect Transistors Albert Liu Black Phosphorus Synthesis Process: Red phosphorus is heated to 1000 C at 10kbar. 1. The red phosphorus is cooled at a rate of 100 C an hour to 600 C. 2. Red Phosphorus


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SLIDE 1

Black Phosphorus Field Effect Transistors

Albert Liu

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SLIDE 2

Black Phosphorus

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  • Synthesis Process:

1. Red phosphorus is heated to 1000°C at 10kbar. 2. The red phosphorus is cooled at a rate of 100°C an hour to 600°C.

Red Phosphorus Structure Black Phosphorus Structure

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SLIDE 3

Fabrication of FET Transistors

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  • Fabrication Process:

1. Thin flakes of Black Phosphorus peeled from bulk crystal 2. Flakes deposited on silicon wafer with SiO2 layer in between 3. Metal (Cr, Au) contacts deposited on top of flakes by evaporation

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SLIDE 4

Drain Current Modulation

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  • Large drain current modulation observed
  • Large subthreshold swing observed (~5V per decade)

Vds = 10mV (red curve) and 100mV (green curve)

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SLIDE 5

Hall Coefficient

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  • The Hall coefficient is given by (for electrons):
  • Positive (negative) hall coefficient was observed for negative

(positive) gate voltage

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SLIDE 6

Drain Current Saturation

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  • Device parameters:

– Device thickness: 5nm – Oxide thickness: 90nm – Channel length: 4.5microns – Channel width: 2.3microns

Vg = -30V (black), -25V (red), -20V (green), -15V (blue)

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SLIDE 7

Sheet Resistance

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  • The sheet resistance RS is defined by:
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SLIDE 8

Mobility Temperature Dependence

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  • Above 100K, the mobility follows a power law:

where

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SLIDE 9

Citation

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Nature Nanotechnology 9, 372–377 (2014)