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Angstrom Sciences- For more info . . . Cylindrical Magnetrons - - PowerPoint PPT Presentation
Angstrom Sciences- For more info . . . Cylindrical Magnetrons - - PowerPoint PPT Presentation
Angstrom Sciences- For more info . . . Cylindrical Magnetrons www.angstromsciences.com Business for over 20 years Numerous US Patents including Profiled Magnets Turbulent water flow Complete Cylindrical Cathodes TCO,
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Angstrom Sciences
37 Employees 10 CNC Machinists In-House R&D Laboratory On-Site Manufacturing 8 Engineering Staff
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85% or greater target utilization
Longer run times
Narrow Vapor Flux
Clean and efficient sputtering
Average 20% Power Savings
Operates at lower power level
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For more info . . . www.angstromsciences.com
Advanced profiled Magnetic Design for optimal utilization
and uniformity
Gas Integration Options Argon and Reactive gas inputs DC, Pulsed DC and MF Power Vertical and Horizontal mounting options Anode assembly is available Can accommodate existing system layout Recommendation for Optimal Uniformity Magnet bar length: 6” overhang on each side of substrate 2”-4” source to substrate
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For more info . . . www.angstromsciences.com
Profiled magnets naturally conform to the curvature of cylindrical target Magnetics:
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Rotating Cylindrical Magnetron Solutions:
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Rotating Cylindrical Magnetron Solutions:
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Rotating Cylindrical Magnetron Solutions:
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Rotating Cylindrical Magnetron Solutions:
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Cathode Drive Overview:
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Cathode Drive Overview:
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Target Assembly Overview:
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Target Assembly Overview:
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Calculating Target Lifetime (Example) Assumptions: Non Reactive Process Film Density = Target Density 1 Cathode Putting down film layer
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Calculating Target Lifetime (Example) Assumptions: Non Reactive Process Film Density = Target Density
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Calculating Target Lifetime (Example)
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Calculating Target Lifetime (Example)
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Calculating Sputter Deposition Rate
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Angstrom Sciences Cylindrical Magnetron Arrays
2D Magnetic Field Modeling
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Angstrom Sciences Cylindrical Magnetron Arrays
3D Magnetic Field Modeling
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Magnet Assemblies have “interchangeable” turnaround designs that may be manufactured to your specific type of target.
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Substrate Cylindrical Ma Chamber/Zone Shielding More material is directed to the substrate, dramatically reducing build-up
- n shields and resulting in a cleaner and more stable process that
requires les power to achieve a specific deposition rate! ASI’s patented profiled magnets reduce the distance between the racetracks in comparison to more conventional approaches
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Static Deposition Profile for a Single Cylindrical Magnetron (10.5 deg racetrack separation for ASI vs. 14.7 deg for a “typical” cylindrical magnetron)
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Angstrom Sciences Cylindrical Magnetron Arrays
0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1
- 300
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100 200 300
Normalized Deposition Profile For a Dual Rotatable Magnetron
Typical 14.7 ASI 10.5
STANDARD COAT ZONE SHIELDING WIDTH
ASI cylindrical racetrack separation of 10.5 degrees results in ~ 14% of material deposited on shields "Typical" conventional cylindrical racetrack separation of 14.7 degrees results in ~21% of material deposit on shields
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Angstrom Sciences Cylindrical Magnetron Arrays
3.5m Magnet Arrays for architectural Glass Coaters
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Angstrom Sciences Cylindrical Magnetron Arrays
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Angstrom Sciences Cylindrical Magnetron Arrays
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NdFeB, Profiled magnets
Modular Design
Greater target utilization (85% guaranteed!)
Improved uniformity
Stainless steel encapsulation
Solid Construction
304 Stainless Steel
6061 Aluminum
Design
Compact Drive Assembly
Quick Target changes
2 Year Warranty
No-cost maintenance training
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